SG54552A1 - Diamond-like thin film forming apparatus and method - Google Patents

Diamond-like thin film forming apparatus and method

Info

Publication number
SG54552A1
SG54552A1 SG1997003060A SG1997003060A SG54552A1 SG 54552 A1 SG54552 A1 SG 54552A1 SG 1997003060 A SG1997003060 A SG 1997003060A SG 1997003060 A SG1997003060 A SG 1997003060A SG 54552 A1 SG54552 A1 SG 54552A1
Authority
SG
Singapore
Prior art keywords
diamond
thin film
forming apparatus
film forming
thin
Prior art date
Application number
SG1997003060A
Inventor
Naoyuki Kajita
Yamaji Shigeru
Nakatani Hajime
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of SG54552A1 publication Critical patent/SG54552A1/en

Links

SG1997003060A 1996-08-30 1997-08-27 Diamond-like thin film forming apparatus and method SG54552A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23054896A JPH1072285A (en) 1996-08-30 1996-08-30 Equipment for forming diamond-like carbon thin film and forming method therefor

Publications (1)

Publication Number Publication Date
SG54552A1 true SG54552A1 (en) 1998-11-16

Family

ID=16909493

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1997003060A SG54552A1 (en) 1996-08-30 1997-08-27 Diamond-like thin film forming apparatus and method

Country Status (2)

Country Link
JP (1) JPH1072285A (en)
SG (1) SG54552A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001192206A (en) * 2000-01-05 2001-07-17 Sumitomo Electric Ind Ltd Method for manufacturing amorphous carbon-coated member
JP4567867B2 (en) * 2000-10-24 2010-10-20 キヤノンアネルバ株式会社 Film forming apparatus for magnetic recording disk and method for manufacturing magnetic recording disk
JP5721050B2 (en) * 2011-03-08 2015-05-20 日産自動車株式会社 Roll coater device

Also Published As

Publication number Publication date
JPH1072285A (en) 1998-03-17

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