SG54309A1 - Alignment system particularly for x-ray or photo lithography - Google Patents

Alignment system particularly for x-ray or photo lithography

Info

Publication number
SG54309A1
SG54309A1 SG1996008298A SG1996008298A SG54309A1 SG 54309 A1 SG54309 A1 SG 54309A1 SG 1996008298 A SG1996008298 A SG 1996008298A SG 1996008298 A SG1996008298 A SG 1996008298A SG 54309 A1 SG54309 A1 SG 54309A1
Authority
SG
Singapore
Prior art keywords
ray
alignment system
system particularly
photo lithography
lithography
Prior art date
Application number
SG1996008298A
Other languages
English (en)
Inventor
Paul Kaiser
Original Assignee
Karl Suss Ag Prazisionsgerate
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Karl Suss Ag Prazisionsgerate filed Critical Karl Suss Ag Prazisionsgerate
Publication of SG54309A1 publication Critical patent/SG54309A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7026—Focusing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
SG1996008298A 1990-04-04 1991-04-03 Alignment system particularly for x-ray or photo lithography SG54309A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4010880A DE4010880C1 (fr) 1990-04-04 1990-04-04

Publications (1)

Publication Number Publication Date
SG54309A1 true SG54309A1 (en) 1998-11-16

Family

ID=6403756

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996008298A SG54309A1 (en) 1990-04-04 1991-04-03 Alignment system particularly for x-ray or photo lithography

Country Status (4)

Country Link
EP (1) EP0450592B1 (fr)
JP (1) JPH04225515A (fr)
DE (2) DE4010880C1 (fr)
SG (1) SG54309A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3296239B2 (ja) * 1997-03-27 2002-06-24 ウシオ電機株式会社 間隙設定機構を備えたプロキシミティ露光装置
DE10303902B4 (de) * 2003-01-31 2004-12-09 Süss Microtec Lithography Gmbh Verfahren und Vorrichtung zum Ausrichten eines Justier-Mikroskops mittels verspiegelter Justiermaske
US6950188B2 (en) 2003-04-23 2005-09-27 International Business Machines Corporation Wafer alignment system using parallel imaging detection

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3265891D1 (en) * 1982-01-06 1985-10-03 Ibm Alignment system for lithographic proximity printing
US4595295A (en) * 1982-01-06 1986-06-17 International Business Machines Corporation Alignment system for lithographic proximity printing
US4580900A (en) * 1982-04-02 1986-04-08 Eaton Corporation Auto focus alignment and measurement system and method
EP0116953A2 (fr) * 1983-02-18 1984-08-29 Hitachi, Ltd. Appareil d'alignement

Also Published As

Publication number Publication date
EP0450592A2 (fr) 1991-10-09
EP0450592B1 (fr) 1997-08-13
DE69127218T2 (de) 1997-12-04
DE4010880C1 (fr) 1991-05-02
JPH04225515A (ja) 1992-08-14
DE69127218D1 (de) 1997-09-18
EP0450592A3 (en) 1992-05-13

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