SG43804A1 - Robust bond for micromachine sensor - Google Patents
Robust bond for micromachine sensorInfo
- Publication number
- SG43804A1 SG43804A1 SG1996001034A SG1996001034A SG43804A1 SG 43804 A1 SG43804 A1 SG 43804A1 SG 1996001034 A SG1996001034 A SG 1996001034A SG 1996001034 A SG1996001034 A SG 1996001034A SG 43804 A1 SG43804 A1 SG 43804A1
- Authority
- SG
- Singapore
- Prior art keywords
- robust bond
- micromachine sensor
- micromachine
- sensor
- robust
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/219,398 US5520054A (en) | 1994-03-29 | 1994-03-29 | Increased wall thickness for robust bond for micromachined sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
SG43804A1 true SG43804A1 (en) | 1997-11-14 |
Family
ID=22819110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1996001034A SG43804A1 (en) | 1994-03-29 | 1995-02-22 | Robust bond for micromachine sensor |
Country Status (10)
Country | Link |
---|---|
US (1) | US5520054A (ja) |
EP (1) | EP0753134A1 (ja) |
JP (1) | JPH09511061A (ja) |
CN (1) | CN1143412A (ja) |
BR (1) | BR9507211A (ja) |
CA (1) | CA2184161A1 (ja) |
CZ (1) | CZ283796A3 (ja) |
PL (1) | PL316142A1 (ja) |
SG (1) | SG43804A1 (ja) |
WO (1) | WO1995026495A1 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5668319A (en) * | 1994-02-07 | 1997-09-16 | The Regents Of The University Of California | Micromachined accelerometer |
WO1998015807A1 (en) * | 1996-10-07 | 1998-04-16 | Lucas Novasensor | Silicon at least 5 micron high acute cavity with channel by oxidizing fusion bonding and stop etching |
GB9709710D0 (en) | 1997-05-13 | 1997-07-02 | Fet Electronics Ltd | Conditioner circuit for torque sensor |
JP2000193544A (ja) * | 1998-12-25 | 2000-07-14 | Ngk Insulators Ltd | 力センサ |
US6543291B1 (en) * | 2000-01-06 | 2003-04-08 | Kulite Semiconductor Products, Inc. | Wet-to-wet pressure sensing assembly |
US6820491B2 (en) * | 2002-10-05 | 2004-11-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Pressure differential measuring tool |
DE102004006197B4 (de) * | 2003-07-04 | 2013-10-17 | Robert Bosch Gmbh | Verfahren zur Herstellung eines mikromechanischen Drucksensors |
US7159468B2 (en) * | 2004-06-15 | 2007-01-09 | Halliburton Energy Services, Inc. | Fiber optic differential pressure sensor |
US7691723B2 (en) * | 2005-01-07 | 2010-04-06 | Honeywell International Inc. | Bonding system having stress control |
US7543502B2 (en) * | 2005-04-08 | 2009-06-09 | Analatom Incorporated | Compact pressure-sensing device |
US7214324B2 (en) * | 2005-04-15 | 2007-05-08 | Delphi Technologies, Inc. | Technique for manufacturing micro-electro mechanical structures |
US7624642B2 (en) * | 2007-09-20 | 2009-12-01 | Rosemount Inc. | Differential pressure sensor isolation in a process fluid pressure transmitter |
US8371175B2 (en) * | 2009-10-01 | 2013-02-12 | Rosemount Inc. | Pressure transmitter with pressure sensor mount |
JP6225591B2 (ja) * | 2013-09-17 | 2017-11-08 | カシオ計算機株式会社 | 高気密機器 |
DE102014109491A1 (de) | 2014-07-08 | 2016-02-11 | Endress + Hauser Gmbh + Co. Kg | Differenzdruckmesszelle |
US20170203954A1 (en) * | 2016-01-19 | 2017-07-20 | Rosemount Aerospace Inc. | Mems pressure sensor with modified cavity to improve burst pressure |
DE102017122264A1 (de) | 2017-09-26 | 2019-03-28 | CiS Forschungsinstitut für Mikrosensorik GmbH | Drucksensorchip und Verfahren zu seiner Herstellung |
JP2020030066A (ja) * | 2018-08-21 | 2020-02-27 | アズビル株式会社 | 圧力センサ |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4600912A (en) * | 1985-01-25 | 1986-07-15 | Bourns Instruments, Inc. | Diaphragm pressure sensor with improved tensile loading characteristics |
US4800758A (en) * | 1986-06-23 | 1989-01-31 | Rosemount Inc. | Pressure transducer with stress isolation for hard mounting |
US4773269A (en) * | 1986-07-28 | 1988-09-27 | Rosemount Inc. | Media isolated differential pressure sensors |
US4823230A (en) * | 1988-03-04 | 1989-04-18 | General Electric Company | Pressure transducer |
US5062302A (en) * | 1988-04-29 | 1991-11-05 | Schlumberger Industries, Inc. | Laminated semiconductor sensor with overpressure protection |
JPH03282342A (ja) * | 1990-03-30 | 1991-12-12 | Yokogawa Electric Corp | 半導体圧力計 |
DE4107658A1 (de) * | 1991-03-09 | 1992-09-17 | Bosch Gmbh Robert | Montageverfahren fuer mikromechanische sensoren |
JP2864803B2 (ja) * | 1991-09-02 | 1999-03-08 | 横河電機株式会社 | シリコン圧力センサ |
JPH05142074A (ja) * | 1991-11-22 | 1993-06-08 | Yokogawa Electric Corp | 半導体圧力計 |
US5257547A (en) * | 1991-11-26 | 1993-11-02 | Honeywell Inc. | Amplified pressure transducer |
AU658524B1 (en) * | 1993-08-17 | 1995-04-13 | Yokogawa Electric Corporation | Semiconductor type differential pressure measurement apparatus and method for manufacturing the same |
-
1994
- 1994-03-29 US US08/219,398 patent/US5520054A/en not_active Expired - Lifetime
-
1995
- 1995-02-22 PL PL95316142A patent/PL316142A1/xx unknown
- 1995-02-22 JP JP7525159A patent/JPH09511061A/ja active Pending
- 1995-02-22 CA CA002184161A patent/CA2184161A1/en not_active Abandoned
- 1995-02-22 WO PCT/US1995/002245 patent/WO1995026495A1/en not_active Application Discontinuation
- 1995-02-22 CZ CZ962837A patent/CZ283796A3/cs unknown
- 1995-02-22 CN CN95191918A patent/CN1143412A/zh active Pending
- 1995-02-22 EP EP95910322A patent/EP0753134A1/en not_active Withdrawn
- 1995-02-22 BR BR9507211A patent/BR9507211A/pt not_active Application Discontinuation
- 1995-02-22 SG SG1996001034A patent/SG43804A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
EP0753134A1 (en) | 1997-01-15 |
JPH09511061A (ja) | 1997-11-04 |
CN1143412A (zh) | 1997-02-19 |
WO1995026495A1 (en) | 1995-10-05 |
US5520054A (en) | 1996-05-28 |
CZ283796A3 (en) | 1997-11-12 |
CA2184161A1 (en) | 1995-10-05 |
BR9507211A (pt) | 1997-09-09 |
PL316142A1 (en) | 1996-12-23 |
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