SG35023A1 - A method of beveled contact opening formation - Google Patents

A method of beveled contact opening formation

Info

Publication number
SG35023A1
SG35023A1 SG1995001600A SG1995001600A SG35023A1 SG 35023 A1 SG35023 A1 SG 35023A1 SG 1995001600 A SG1995001600 A SG 1995001600A SG 1995001600 A SG1995001600 A SG 1995001600A SG 35023 A1 SG35023 A1 SG 35023A1
Authority
SG
Singapore
Prior art keywords
contact opening
opening formation
beveled contact
beveled
formation
Prior art date
Application number
SG1995001600A
Inventor
Teo Yeow Meng
Liu Lian Jun
Original Assignee
Teo Yeow Meng
Liu Lian Jun
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/328,584 external-priority patent/US5453403A/en
Application filed by Teo Yeow Meng, Liu Lian Jun filed Critical Teo Yeow Meng
Priority to SG1995001600A priority Critical patent/SG35023A1/en
Publication of SG35023A1 publication Critical patent/SG35023A1/en

Links

SG1995001600A 1994-10-24 1995-10-20 A method of beveled contact opening formation SG35023A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG1995001600A SG35023A1 (en) 1994-10-24 1995-10-20 A method of beveled contact opening formation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/328,584 US5453403A (en) 1994-10-24 1994-10-24 Method of beveled contact opening formation
SG1995001600A SG35023A1 (en) 1994-10-24 1995-10-20 A method of beveled contact opening formation

Publications (1)

Publication Number Publication Date
SG35023A1 true SG35023A1 (en) 1997-02-01

Family

ID=26664908

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1995001600A SG35023A1 (en) 1994-10-24 1995-10-20 A method of beveled contact opening formation

Country Status (1)

Country Link
SG (1) SG35023A1 (en)

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