SG148111A1 - Device for the uv treatment of a wafer or substrate - Google Patents

Device for the uv treatment of a wafer or substrate

Info

Publication number
SG148111A1
SG148111A1 SG200803572-7A SG2008035727A SG148111A1 SG 148111 A1 SG148111 A1 SG 148111A1 SG 2008035727 A SG2008035727 A SG 2008035727A SG 148111 A1 SG148111 A1 SG 148111A1
Authority
SG
Singapore
Prior art keywords
wafer
substrate
treatment
light
leds
Prior art date
Application number
SG200803572-7A
Inventor
Ruedi Portmann
Original Assignee
Powatec Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powatec Gmbh filed Critical Powatec Gmbh
Publication of SG148111A1 publication Critical patent/SG148111A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Device Packages (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Device for the UV treatment of a wafer or substrate A device for UV treatment of an object, especially a wafer or substrate, with UV light contains a UV light source (3) comprising a plurality of LEDs (11) and a heat sink (12). The LEDs emit UV light or light containing UV light. The heat sink serves to emit the lost heat generated by the LEDs to the ambient environment.
SG200803572-7A 2007-05-15 2008-05-09 Device for the uv treatment of a wafer or substrate SG148111A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200720007003 DE202007007003U1 (en) 2007-05-15 2007-05-15 Device for UV treatment of a wafer or substrate

Publications (1)

Publication Number Publication Date
SG148111A1 true SG148111A1 (en) 2008-12-31

Family

ID=38320429

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200803572-7A SG148111A1 (en) 2007-05-15 2008-05-09 Device for the uv treatment of a wafer or substrate

Country Status (3)

Country Link
CN (1) CN201298538Y (en)
DE (1) DE202007007003U1 (en)
SG (1) SG148111A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8242595B2 (en) 2007-08-10 2012-08-14 Panasonic Electric Works SUNX Co., Ltd. Heatsink and semiconductor device with heatsink

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140095875A (en) * 2013-01-25 2014-08-04 서울바이오시스 주식회사 Air purifying apparatus using ultraviolet light emitting diode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8242595B2 (en) 2007-08-10 2012-08-14 Panasonic Electric Works SUNX Co., Ltd. Heatsink and semiconductor device with heatsink

Also Published As

Publication number Publication date
CN201298538Y (en) 2009-08-26
DE202007007003U1 (en) 2007-07-26

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SG148111A1 (en) Device for the uv treatment of a wafer or substrate