SG144824A1 - High density, low oxygen re and re-based consolidated powder materials for use as deposition sources & methods of making same - Google Patents

High density, low oxygen re and re-based consolidated powder materials for use as deposition sources & methods of making same

Info

Publication number
SG144824A1
SG144824A1 SG200800180-2A SG2008001802A SG144824A1 SG 144824 A1 SG144824 A1 SG 144824A1 SG 2008001802 A SG2008001802 A SG 2008001802A SG 144824 A1 SG144824 A1 SG 144824A1
Authority
SG
Singapore
Prior art keywords
powder
deposition sources
low oxygen
methods
high density
Prior art date
Application number
SG200800180-2A
Inventor
Fenglin Yang
Carl Derrington
Bernd Kunkel
Original Assignee
Heraeus Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Inc filed Critical Heraeus Inc
Publication of SG144824A1 publication Critical patent/SG144824A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/05—Mixtures of metal powder with non-metallic powder
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

HIGH DENSITY, LOW OXYGEN RE AND RE-BASED CONSOLIDATED POWDER MATERIALS FOR USE AS DEPOSITION SOURCES & METHODS OF MAKING SAME A method of making Re and Re-based materials comprises steps of: providing a Re powder starting material or a Re powder starting material and at least one additional powder material; subjecting at least the Re powder to a first degassing treatment for reducing the oxygen content thereof; increasing the density of the degassed Re powder or a mixture of the degassed Re powder and the at least one additional powder material to form a green billet; subjecting the billet to a second degassing treatment to further reduce the oxygen content; and consolidating the billet to form a consolidated material with greater than about 95% of theoretical density and low oxygen content below about 200 ppm for Re and below about 500 ppm for Re-based materials formed from the mixture, excluding oxygen from non-metallic compounds and ceramics. Materials so produced are useful in the manufacture of deposition sources such as sputtering targets. (Figure 1)
SG200800180-2A 2007-01-08 2008-01-08 High density, low oxygen re and re-based consolidated powder materials for use as deposition sources & methods of making same SG144824A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US87941807P 2007-01-08 2007-01-08
US90763307P 2007-04-13 2007-04-13
US11/969,172 US20080166255A1 (en) 2007-01-08 2008-01-03 High density, low oxygen re and re-based consolidated powder materials for use as deposition sources & methods of making same

Publications (1)

Publication Number Publication Date
SG144824A1 true SG144824A1 (en) 2008-08-28

Family

ID=39608168

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200800180-2A SG144824A1 (en) 2007-01-08 2008-01-08 High density, low oxygen re and re-based consolidated powder materials for use as deposition sources & methods of making same

Country Status (3)

Country Link
US (1) US20080166255A1 (en)
SG (1) SG144824A1 (en)
TW (1) TW200912010A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10675685B2 (en) 2014-01-14 2020-06-09 Raytheon Technologies Corporation Method for preventing powder depletion/contamination during consolidation process
US9963344B2 (en) * 2015-01-21 2018-05-08 National Technology & Engineering Solution of Sandia, LLC Method to synthesize bulk iron nitride
WO2017182361A1 (en) * 2016-04-18 2017-10-26 Metalvalue Sas Seamless metal tubes

Also Published As

Publication number Publication date
US20080166255A1 (en) 2008-07-10
TW200912010A (en) 2009-03-16

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