SG143166A1 - Ground structure, and heater and chemical vapor deposition apparatus including the same - Google Patents
Ground structure, and heater and chemical vapor deposition apparatus including the sameInfo
- Publication number
- SG143166A1 SG143166A1 SG200717716-5A SG2007177165A SG143166A1 SG 143166 A1 SG143166 A1 SG 143166A1 SG 2007177165 A SG2007177165 A SG 2007177165A SG 143166 A1 SG143166 A1 SG 143166A1
- Authority
- SG
- Singapore
- Prior art keywords
- ground
- heater
- vapor deposition
- chemical vapor
- apparatus including
- Prior art date
Links
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Resistance Heating (AREA)
Abstract
GROUND STRUCTURE, AND HEATER AND CHEMICAL VAPOR DEPOSITION APPARATUS INCLUDING THE SAME A ground structure of a heater includes a ground mount, a ground terminal, a conductive holder and a connection member. The ground terminal is movably inserted into the ground mount. The conductive holder is arranged in the ground mount to holding the ground terminal. The connection member electrically connects the conductive holder to the ground mount. Thus, the conductive holder may closely make contact with the ground terminal so that the ground terminal may not be damaged.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060116542A KR100963481B1 (en) | 2006-11-23 | 2006-11-23 | Ground structure, and heater and chemical vapor deposition apparatus including the same |
Publications (1)
Publication Number | Publication Date |
---|---|
SG143166A1 true SG143166A1 (en) | 2008-06-27 |
Family
ID=39615573
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200717716-5A SG143166A1 (en) | 2006-11-23 | 2007-11-13 | Ground structure, and heater and chemical vapor deposition apparatus including the same |
Country Status (4)
Country | Link |
---|---|
KR (1) | KR100963481B1 (en) |
CN (1) | CN201220961Y (en) |
SG (1) | SG143166A1 (en) |
TW (1) | TWI380353B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100933432B1 (en) * | 2007-10-25 | 2009-12-23 | 주식회사 코미코 | Connection member, grounding structure having same, heater and substrate processing apparatus |
KR101415552B1 (en) * | 2009-12-21 | 2014-07-07 | 주식회사 미코 | Ground structure, and heater and chemical vapor deposition apparatus including the same |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04206685A (en) * | 1990-11-30 | 1992-07-28 | Fujikura Ltd | Grounding structure of enameled printed circuit board and fomration thereof |
JP4249892B2 (en) * | 2000-11-27 | 2009-04-08 | 第一電子工業株式会社 | Electrical round connector |
KR20020080954A (en) * | 2001-04-18 | 2002-10-26 | 주성엔지니어링(주) | Method and apparatus for cold wall Chemical Vapour Deposition |
-
2006
- 2006-11-23 KR KR1020060116542A patent/KR100963481B1/en active IP Right Grant
-
2007
- 2007-11-13 SG SG200717716-5A patent/SG143166A1/en unknown
- 2007-11-21 TW TW096144090A patent/TWI380353B/en active
- 2007-11-22 CN CNU2007201959393U patent/CN201220961Y/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN201220961Y (en) | 2009-04-15 |
KR100963481B1 (en) | 2010-06-17 |
KR20080046898A (en) | 2008-05-28 |
TW200823975A (en) | 2008-06-01 |
TWI380353B (en) | 2012-12-21 |
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