SG143166A1 - Ground structure, and heater and chemical vapor deposition apparatus including the same - Google Patents

Ground structure, and heater and chemical vapor deposition apparatus including the same

Info

Publication number
SG143166A1
SG143166A1 SG200717716-5A SG2007177165A SG143166A1 SG 143166 A1 SG143166 A1 SG 143166A1 SG 2007177165 A SG2007177165 A SG 2007177165A SG 143166 A1 SG143166 A1 SG 143166A1
Authority
SG
Singapore
Prior art keywords
ground
heater
vapor deposition
chemical vapor
apparatus including
Prior art date
Application number
SG200717716-5A
Inventor
Seong-Min Lee
Kang-Ii Heo
Jeong-Duck Choi
Bim-Sul Lee
Original Assignee
Komico Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komico Ltd filed Critical Komico Ltd
Publication of SG143166A1 publication Critical patent/SG143166A1/en

Links

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Resistance Heating (AREA)

Abstract

GROUND STRUCTURE, AND HEATER AND CHEMICAL VAPOR DEPOSITION APPARATUS INCLUDING THE SAME A ground structure of a heater includes a ground mount, a ground terminal, a conductive holder and a connection member. The ground terminal is movably inserted into the ground mount. The conductive holder is arranged in the ground mount to holding the ground terminal. The connection member electrically connects the conductive holder to the ground mount. Thus, the conductive holder may closely make contact with the ground terminal so that the ground terminal may not be damaged.
SG200717716-5A 2006-11-23 2007-11-13 Ground structure, and heater and chemical vapor deposition apparatus including the same SG143166A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060116542A KR100963481B1 (en) 2006-11-23 2006-11-23 Ground structure, and heater and chemical vapor deposition apparatus including the same

Publications (1)

Publication Number Publication Date
SG143166A1 true SG143166A1 (en) 2008-06-27

Family

ID=39615573

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200717716-5A SG143166A1 (en) 2006-11-23 2007-11-13 Ground structure, and heater and chemical vapor deposition apparatus including the same

Country Status (4)

Country Link
KR (1) KR100963481B1 (en)
CN (1) CN201220961Y (en)
SG (1) SG143166A1 (en)
TW (1) TWI380353B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100933432B1 (en) * 2007-10-25 2009-12-23 주식회사 코미코 Connection member, grounding structure having same, heater and substrate processing apparatus
KR101415552B1 (en) * 2009-12-21 2014-07-07 주식회사 미코 Ground structure, and heater and chemical vapor deposition apparatus including the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04206685A (en) * 1990-11-30 1992-07-28 Fujikura Ltd Grounding structure of enameled printed circuit board and fomration thereof
JP4249892B2 (en) * 2000-11-27 2009-04-08 第一電子工業株式会社 Electrical round connector
KR20020080954A (en) * 2001-04-18 2002-10-26 주성엔지니어링(주) Method and apparatus for cold wall Chemical Vapour Deposition

Also Published As

Publication number Publication date
CN201220961Y (en) 2009-04-15
KR100963481B1 (en) 2010-06-17
KR20080046898A (en) 2008-05-28
TW200823975A (en) 2008-06-01
TWI380353B (en) 2012-12-21

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