SG138597A1 - An improved cpl mask and a method and program product for generating the same - Google Patents

An improved cpl mask and a method and program product for generating the same

Info

Publication number
SG138597A1
SG138597A1 SG200705081-8A SG2007050818A SG138597A1 SG 138597 A1 SG138597 A1 SG 138597A1 SG 2007050818 A SG2007050818 A SG 2007050818A SG 138597 A1 SG138597 A1 SG 138597A1
Authority
SG
Singapore
Prior art keywords
generating
improved
same
program product
cpl mask
Prior art date
Application number
SG200705081-8A
Other languages
English (en)
Inventor
Douglas Van Den Broeke
Wampler Kurt E
Jang Fung Chen
Original Assignee
Asml Masktools Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Masktools Bv filed Critical Asml Masktools Bv
Publication of SG138597A1 publication Critical patent/SG138597A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/34—Phase-edge PSM, e.g. chromeless PSM; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
SG200705081-8A 2006-07-06 2007-07-06 An improved cpl mask and a method and program product for generating the same SG138597A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US81854406P 2006-07-06 2006-07-06

Publications (1)

Publication Number Publication Date
SG138597A1 true SG138597A1 (en) 2008-01-28

Family

ID=38461841

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200705081-8A SG138597A1 (en) 2006-07-06 2007-07-06 An improved cpl mask and a method and program product for generating the same

Country Status (7)

Country Link
US (1) US7998355B2 (fr)
EP (1) EP1876494A1 (fr)
JP (1) JP4607151B2 (fr)
KR (1) KR100875232B1 (fr)
CN (1) CN101122736A (fr)
SG (1) SG138597A1 (fr)
TW (1) TW200809394A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101644889B (zh) * 2009-06-24 2012-12-12 上海宏力半导体制造有限公司 用于提高焦深的光刻散射条及其制造方法
US9153399B2 (en) 2013-11-15 2015-10-06 Eaton Corporation ARC baffling device

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5446521A (en) * 1993-06-30 1995-08-29 Intel Corporation Phase-shifted opaquing ring
EP0674223B1 (fr) * 1994-02-14 1997-05-02 International Business Machines Corporation Masque à décalage de phase atténuant et procédé de fabrication
US5465859A (en) * 1994-04-28 1995-11-14 International Business Machines Corporation Dual phase and hybrid phase shifting mask fabrication using a surface etch monitoring technique
KR0170686B1 (ko) * 1995-09-13 1999-03-20 김광호 하프톤 위상반전마스크의 제조방법
WO1997033205A1 (fr) 1996-03-06 1997-09-12 Philips Electronics N.V. Systeme d'interferometre differentiel et dispositif lithographique a balayage par etapes pourvu d'un tel systeme
WO1998028665A1 (fr) 1996-12-24 1998-07-02 Koninklijke Philips Electronics N.V. Dispositif de positionnement bidimensionnellement equilibre a deux porte-objets, et dispositif lithographique comportant ledit dispositif
US5935736A (en) * 1997-10-24 1999-08-10 Taiwan Semiconductors Manufacturing Company Ltd. Mask and method to eliminate side-lobe effects in attenuated phase shifting masks
KR100355228B1 (ko) * 2000-01-18 2002-10-11 삼성전자 주식회사 하프톤 위상반전 마스크 및 그 제조방법
JP2002156741A (ja) * 2000-11-16 2002-05-31 Nec Corp マスクのデバイスパターンの補正方法
US6387787B1 (en) * 2001-03-02 2002-05-14 Motorola, Inc. Lithographic template and method of formation and use
US6635393B2 (en) 2001-03-23 2003-10-21 Numerical Technologies, Inc. Blank for alternating PSM photomask with charge dissipation layer
US6841310B2 (en) * 2002-02-05 2005-01-11 Micron Technology, Inc. Radiation patterning tools, and methods of forming radiation patterning tools
TWI274969B (en) * 2002-09-11 2007-03-01 Asml Masktools Bv Method and computer program product of generating masks and mask generated thereby, device manufacturing method and device manufactured thereby, and method of printing pattern
US7033947B2 (en) * 2003-03-11 2006-04-25 Taiwan Seminconductor Manufacturing Co Ltd Dual trench alternating phase shift mask fabrication
US6933084B2 (en) * 2003-03-18 2005-08-23 Photronics, Inc. Alternating aperture phase shift photomask having light absorption layer
KR100508093B1 (ko) * 2003-06-05 2005-08-17 삼성전자주식회사 위상 반전 마스크 및 그 제조방법
JP3746497B2 (ja) 2003-06-24 2006-02-15 松下電器産業株式会社 フォトマスク
US20060099519A1 (en) * 2004-11-10 2006-05-11 Moriarty Michael H Method of depositing a material providing a specified attenuation and phase shift

Also Published As

Publication number Publication date
CN101122736A (zh) 2008-02-13
JP2008015534A (ja) 2008-01-24
JP4607151B2 (ja) 2011-01-05
US20080067143A1 (en) 2008-03-20
EP1876494A1 (fr) 2008-01-09
US7998355B2 (en) 2011-08-16
TW200809394A (en) 2008-02-16
KR20080005138A (ko) 2008-01-10
KR100875232B1 (ko) 2008-12-19

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