SG127780A1 - A material for use in a mems device, a method of making the material and a mems device including thematerial - Google Patents

A material for use in a mems device, a method of making the material and a mems device including thematerial

Info

Publication number
SG127780A1
SG127780A1 SG200504055A SG200504055A SG127780A1 SG 127780 A1 SG127780 A1 SG 127780A1 SG 200504055 A SG200504055 A SG 200504055A SG 200504055 A SG200504055 A SG 200504055A SG 127780 A1 SG127780 A1 SG 127780A1
Authority
SG
Singapore
Prior art keywords
mems device
thematerial
making
device including
mems
Prior art date
Application number
SG200504055A
Inventor
Ng Wei Beng
Akio Takada
Kanzo Okada
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to SG200504055A priority Critical patent/SG127780A1/en
Priority to JP2006155650A priority patent/JP4715641B2/en
Publication of SG127780A1 publication Critical patent/SG127780A1/en

Links

SG200504055A 2005-06-03 2005-06-24 A material for use in a mems device, a method of making the material and a mems device including thematerial SG127780A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG200504055A SG127780A1 (en) 2005-06-03 2005-06-24 A material for use in a mems device, a method of making the material and a mems device including thematerial
JP2006155650A JP4715641B2 (en) 2005-06-03 2006-06-05 Material for MEMS device, method for manufacturing the material, and MEMS device including the material

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG200503561 2005-06-03
SG200504055A SG127780A1 (en) 2005-06-03 2005-06-24 A material for use in a mems device, a method of making the material and a mems device including thematerial

Publications (1)

Publication Number Publication Date
SG127780A1 true SG127780A1 (en) 2006-12-29

Family

ID=37756319

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200504055A SG127780A1 (en) 2005-06-03 2005-06-24 A material for use in a mems device, a method of making the material and a mems device including thematerial

Country Status (2)

Country Link
JP (1) JP4715641B2 (en)
SG (1) SG127780A1 (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010031549A1 (en) * 1999-11-23 2001-10-18 Crawford Ankur Mohan Magnetic layer processing
JP2002043155A (en) * 2000-07-04 2002-02-08 Tonrin Hekiren Manufacturing method of micro inductance, and structure of the micro inductance
US20020117727A1 (en) * 2001-02-26 2002-08-29 Motorola, Inc. Magnetoelectronics element having a stressed over-layer configured for alteration of the switching energy barrier
US20030107137A1 (en) * 2001-09-24 2003-06-12 Stierman Roger J. Micromechanical device contact terminals free of particle generation
WO2003107401A1 (en) * 2002-06-13 2003-12-24 Memscap Micro-component comprising a planar inductance and method for production of such a micro-component
FR2842018A3 (en) * 2002-07-02 2004-01-09 Memscap Micro-component includes inductive element of inductance or transformer type, incorporating magnetic core formed by pile of successive strongly magnetic and electrical insulating layers
US20040129953A1 (en) * 2002-02-21 2004-07-08 Hirokazu Tamura Mems devices and methods of manufacture
US20050062575A1 (en) * 1999-11-23 2005-03-24 Gardner Donald S. Integrated transformer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6154028A (en) * 1984-08-24 1986-03-18 Waseda Daigaku Magnetic recording medium and its production
JPS61177218A (en) * 1985-02-01 1986-08-08 Hitachi Ltd Multi-plunger type transfer molding machine
JP2004014705A (en) * 2002-06-05 2004-01-15 Alps Electric Co Ltd Giant magnetoresistive effect element and its fabricating method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010031549A1 (en) * 1999-11-23 2001-10-18 Crawford Ankur Mohan Magnetic layer processing
US20050062575A1 (en) * 1999-11-23 2005-03-24 Gardner Donald S. Integrated transformer
JP2002043155A (en) * 2000-07-04 2002-02-08 Tonrin Hekiren Manufacturing method of micro inductance, and structure of the micro inductance
US20020117727A1 (en) * 2001-02-26 2002-08-29 Motorola, Inc. Magnetoelectronics element having a stressed over-layer configured for alteration of the switching energy barrier
US20030107137A1 (en) * 2001-09-24 2003-06-12 Stierman Roger J. Micromechanical device contact terminals free of particle generation
US20040129953A1 (en) * 2002-02-21 2004-07-08 Hirokazu Tamura Mems devices and methods of manufacture
WO2003107401A1 (en) * 2002-06-13 2003-12-24 Memscap Micro-component comprising a planar inductance and method for production of such a micro-component
FR2842018A3 (en) * 2002-07-02 2004-01-09 Memscap Micro-component includes inductive element of inductance or transformer type, incorporating magnetic core formed by pile of successive strongly magnetic and electrical insulating layers

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ELECTRODEPOSITED CO-NI-RE-W-P THICK ARRAY OF VERTICAL MAGNETIC ANISOTROPY. *

Also Published As

Publication number Publication date
JP2007019477A (en) 2007-01-25
JP4715641B2 (en) 2011-07-06

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