JPS61177218A - Multi-plunger type transfer molding machine - Google Patents

Multi-plunger type transfer molding machine

Info

Publication number
JPS61177218A
JPS61177218A JP1657085A JP1657085A JPS61177218A JP S61177218 A JPS61177218 A JP S61177218A JP 1657085 A JP1657085 A JP 1657085A JP 1657085 A JP1657085 A JP 1657085A JP S61177218 A JPS61177218 A JP S61177218A
Authority
JP
Japan
Prior art keywords
plunger
tablet
molding machine
resin
transfer molding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1657085A
Other languages
Japanese (ja)
Inventor
Yukio Otake
大竹 幸雄
Makoto Shimizu
信 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1657085A priority Critical patent/JPS61177218A/en
Publication of JPS61177218A publication Critical patent/JPS61177218A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/02Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
    • B29C45/021Plunger drives; Pressure equalizing means for a plurality of transfer plungers

Abstract

PURPOSE:To contrive to prevent defective phenomena such as the generation of unloaded portions and voids due to undersupply, the generation of flashes due to oversupply of material or the like from occurring by a method wherein a stroke, which is proper and necessary for molding a tablet in each pot is given and, in addition, the pouring time of resin is made possible to be controlled at proper period of time. CONSTITUTION:In order to reduce the scattering in heights of tablet 17 at each plunger 12, firstly, the plunger is lowered (or raised) to the face of an un-compacted tablet through a cylinder 4 and a spring 22 under the control of pressure by a pressure reducing valve so as to touch with the face of the un-compacted tablet softly. Secondly, the position of the plunger is fixed to a movable frame 1 by means of a ball screw shaft 20 and an electromagnetic brake 23. Thirdly, a plurality of plungers are simultaneously lowered (or raised) at proper speed by proper stroke by means of a motorized servomotor and a worm jack 9. In addition, molding is done by controlling the feeding speed and amount of resin.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は半導体などの電子部品のレジン封止に用いるト
ランスファ成形機に係り、特に、多プランジャ型におけ
る成形歩留りの向上を志向した1jランスファ成形機に
関する。
[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a transfer molding machine used for resin sealing of electronic parts such as semiconductors, and particularly to a 1J transfer molding machine aimed at improving molding yield in a multi-plunger mold. Regarding.

〔発明の背景〕[Background of the invention]

機械設計第27巻第12号(1,983年11月号)の
P87〜89に記載のようにプランジャ(マルチプラン
ジャとも云う)型成形は従来のトランスファ成形法にお
ける金型中央に設けら些たビックポット、および、それ
に連なるランナを廃し、金型内の各ギャビテイに対応し
た複数に設けられたスモールポットより直接キャで、テ
ィにレジンを加圧注入する方式であり、この方式によっ
て、従来、50チ前後とされたレジンの使用効率を80
チと高めることが出来る。又、従、来のブレヒート工程
から、インゲートに費やすロードタイムをゼロにし、加
えてl/ジンの少量1更用によって、ゲル化タイムやキ
ユアリングタイムが短縮される等の特長がある。しかし
、多プランジャ成形法は各キャピテイに応じて設けられ
た複数ポットのため、ポット内に供給されたレジンの計
量バラツキなどで加圧注入力が変化する。このため成形
品に未充填部やボイド等が発生し不良品となる欠点があ
った。
As described in Machine Design Vol. 27, No. 12 (November 1,983 issue), pages 87 to 89, plunger (also called multi-plunger) molding is a small part of the mold that is installed in the center of the mold in the conventional transfer molding method. This method eliminates the big pot and the runners connected to it, and injects resin under pressure directly into the tee from multiple small pots that correspond to each gap in the mold. The usage efficiency of resin, which was supposed to be around 50 inches, has been increased to 80
It can be greatly increased. In addition, compared to the conventional breheating process, the load time spent on the ingate can be reduced to zero, and in addition, gelation time and curing time can be shortened by using a small amount of 1/gin. However, since the multi-plunger molding method uses multiple pots provided for each cavity, the pressure injection force changes due to variations in the amount of resin supplied into the pots. This has the disadvantage that unfilled parts, voids, etc. occur in the molded product, resulting in a defective product.

このため、各グランジャの押込圧を一定とするために、
N2ガス等を用いたシリンダにより加圧注入方式を採用
しているものもあ、るが5、金型の温度のムラf僅かな
目詰りでも注入時間が変化し、所定内の時間でキャビテ
ィに充填することが出来ず未充填部やボイド発生の現象
がある。
Therefore, in order to keep the pushing pressure of each granger constant,
Some models use a pressurized injection method using a cylinder using N2 gas, etc. However, even if the temperature of the mold is uneven, even the slightest clogging will cause the injection time to change, making it impossible to fill the cavity within a specified time. Filling is not possible, resulting in unfilled areas and voids.

〔発明の目的〕[Purpose of the invention]

本発明の目的はタブレットのバラツキによる不良品発生
率を最少とすべく複数個あるポット内に充填されたタブ
レット高さのバラツキにも拘う−r、常に各ボットのタ
ブレットに成形に必要な適正ストロークを与えて、しか
も注入時間を適正時間に制御可能として高歩留りのトラ
ンスファ成形機を提供することにある。
The purpose of the present invention is to minimize the incidence of defective products due to variations in tablets, regardless of variations in the height of tablets filled in multiple pots. To provide a high-yield transfer molding machine that can give a stroke and control injection time to an appropriate time.

〔発明の概要〕[Summary of the invention]

本発明の要点はタブレット高さがプランジャごとのバラ
ツキ対しシリンダ、およびスプリングによりプランジャ
をタブレット面まで減圧弁で圧力制御して下降(又は上
昇)してソフトタッチさせ、しかる後プランジャをポー
ルスクリュ2、を磁ブレーキによシ可動フレームに位#
固定し、電動サーボモータ、ウオームジヤツキにより適
正速度、適正ストロークまで複数プランジャを同時下降
(又は上昇)させ、レジンの送給速度、量を制御し成形
することにある。
The key point of the present invention is that the tablet height varies from plunger to plunger, and the plunger is lowered (or raised) to the tablet surface by pressure control with a pressure reducing valve using a cylinder and spring to make a soft touch, and then the plunger is moved to the pole screw 2. Place the magnetic brake on the movable frame #
The object is to fix the plunger and simultaneously lower (or raise) multiple plungers to an appropriate speed and stroke using an electric servo motor and a worm jack to control the feeding speed and amount of resin for molding.

〔発明の実施例〕[Embodiments of the invention]

本発明の実施例を図を用いて説明する。第1図は多プラ
ンジャ型のトランスファ成形機を示す。
Embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a multi-plunger type transfer molding machine.

上金型lは上金型台3に強固に固定され、上金型台3は
ガイドロッド5に固定されている。一方、下金型台2は
下金型台4に強固に固定され、昇降用シリンダ8によっ
てガイドロッド5に案内され昇降する構造で、上回動フ
レーム6はガイドロッド5に案内され、ウオームジヤツ
キ9の昇降に序って又昇降する構造である。ウオームジ
ヤツキ9は電動機11及びカップリング11を介して昇
降する、図中■−■矢視断面を第2図に示す。
The upper mold l is firmly fixed to an upper mold stand 3, and the upper mold stand 3 is fixed to a guide rod 5. On the other hand, the lower mold stand 2 is firmly fixed to the lower mold stand 4, and is guided by a guide rod 5 by an elevating cylinder 8 to move up and down. The structure is such that it goes up and down again as it goes up and down. The worm jack 9 is raised and lowered via the electric motor 11 and the coupling 11, and a cross-section taken along the line ■-■ in the figure is shown in FIG.

プランジャ12はピストン13に固定され、ピストン1
3の昇降に序って昇降するシリンダ14は上回動フレー
ム6に固定しである。ピストン113は又スラストベア
リング23を介して、ボー□・ルづフリユ軸20に対し
て軸方向荷重を伝達する。
The plunger 12 is fixed to the piston 13, and the piston 1
The cylinder 14, which is raised and lowered in sequence with the raising and lowering of the cylinder 3, is fixed to the upper moving frame 6. The piston 113 also transmits an axial load to the ball shaft 20 via the thrust bearing 23.

」−二ルスクリー軸20はナツト19と噛合い廻転シナ
がら昇降動作をする。ポールスクリュ軸20の一端はス
プライン形状をし、電磁ブレーキ23に嵌合いトルク伝
達が出来て、しかも、上・下方向は摺動自在となってい
る。又、ポールスクリュ軸20の一端にはスラストベア
リング21.23が装着され、更に、スラストベアリン
グ21゜23間にはスプリング22が介在し、ポールス
クリュ軸20を常に下方に押し下げようとする後目をし
ている。切替弁25を切替え減圧弁を介してシリンダ1
4のBボートにエアーを送給することによって、ピスト
ン13は上昇し、スプリング220力に抗してポールス
クリュ軸20を押し上げる。上金型1内には加熱用ボッ
)15が設けられる、(通常多プランジャ形ではlO〜
30程度アシ)このボット15にはタブレット1’7が
挿入装置(図示していない)により押入され、加熱後プ
ランジャ12によp圧送され、キャビティ18内で成形
される。なお、7は上フレーム、lOはカップリング、
16はロッド。次に、本発明の動1、衿を第1図ないし
第4図を用いて説明する。11図の下金型台4及び下金
型2が下降状態でリードフレーム(図示していない)が
下金型に装填され、後に下金型台4及び下金型2がシリ
ンダ8によシ上昇し、上金型と完全に圧着される。一方
、上金型1にはタブレット17が挿入装置(図示してい
ない)によりボット15に挿填され加熱が開始される、
この時点より上回動フレーム6は第3図に示すように、
高速下降し、タブレット17の上面よシ2〜3M位置で
停止(位置はあらかじめ設定して置く)、その後、シリ
ンダ14内のエアー圧をBボートよシ減圧弁24を介し
、切替弁25によシ犬気側に切替えることによシ、プラ
ンジャ112、ピストン13、ボールスクIJ−1−軸
20がスプリング22の力で下降し、タブレット17の
上面にソフトタッチして停止する各プランジャーの停止
位置はタプレツ)17によって異った位置で停止ここで
プランジャー12が個々後に下降させたのは全体的(上
回動フレーム6により)に下降させるときに対しポール
スクリュ軸20等の回転エネルギがタブレット17にタ
ッチすることで吸収され正確に停止する。全体的な下降
時は回転エネルギによりタブレット17間に隙間が生じ
正確に停止出来ないためでおる。尚、このとき電磁ブレ
ーキ20は開放状態であってポールスクリュ軸20はス
ラストベアリング21I、23に支承されて廻動する。
''-The double screw shaft 20 engages with the nut 19 and moves up and down as it rotates. One end of the pole screw shaft 20 has a spline shape and can fit into the electromagnetic brake 23 to transmit torque, and is also slidable in the upward and downward directions. Further, a thrust bearing 21.23 is attached to one end of the pole screw shaft 20, and a spring 22 is interposed between the thrust bearings 21 and 23 to prevent the back eye from constantly pushing down the pole screw shaft 20. are doing. The switching valve 25 is switched to the cylinder 1 via the pressure reducing valve.
By supplying air to the B boat No. 4, the piston 13 rises and pushes up the pole screw shaft 20 against the force of the spring 220. A heating bottle 15 is provided in the upper mold 1 (normally 10 to 10 in multi-plunger type).
A tablet 1'7 (approximately 30 mm) is inserted into the bot 15 by an insertion device (not shown), heated, and then pressure-fed by the plunger 12 and molded in the cavity 18. In addition, 7 is the upper frame, lO is the coupling,
16 is a rod. Next, the motion 1 and the collar of the present invention will be explained using FIGS. 1 to 4. A lead frame (not shown) is loaded into the lower mold with the lower mold stand 4 and the lower mold 2 in the lowered state shown in FIG. It rises and is completely crimped with the upper mold. On the other hand, the tablet 17 is inserted into the bot 15 in the upper mold 1 by an insertion device (not shown), and heating is started.
From this point on, the moving frame 6 is as shown in FIG.
It descends at high speed and stops at a position of 2 to 3M above the top surface of the tablet 17 (the position is set in advance), and then the air pressure in the cylinder 14 is transferred to the B boat via the pressure reducing valve 24 and the switching valve 25. By switching to the positive side, the plunger 112, piston 13, and ball screw IJ-1 shaft 20 are lowered by the force of the spring 22, and the stop position of each plunger is reached by soft touching the top surface of the tablet 17. The reason why the plunger 12 is individually lowered is because the plunger 12 is lowered at different positions by the upper moving frame 6, whereas the rotational energy of the pole screw shaft 20 is lowered by the tablet. By touching 17, it will be absorbed and stop accurately. This is because during the entire descent, a gap is created between the tablets 17 due to the rotational energy, making it impossible to stop them accurately. At this time, the electromagnetic brake 20 is in an open state, and the pole screw shaft 20 is supported by the thrust bearings 21I and 23 and rotates.

しかる後、タブレット17が充分加熱される、更に加熱
完了後電磁ブレーキ23は閉1      の状態とな
シ、ポールスクリュ軸20とナツト119の関係より上
回動フレーム6に対し昇降不可状態となる。
Thereafter, the tablet 17 is sufficiently heated.Furthermore, after the heating is completed, the electromagnetic brake 23 is in the closed 1 state, and due to the relationship between the pole screw shaft 20 and the nut 119, it becomes impossible to move up and down with respect to the upper moving frame 6.

即ち上回動フレーム6とプランジャ12の関係位置は固
定される。ここで、ポールスクリュ軸20、ナツト19
及び電磁ブレーキ23を用いたのは、直接プランジャー
12に負荷する荷電に対し、ポールスクリュ軸20の傾
斜角による回転力を電磁ブレーキ23で保持することで
大きな荷重にも対抗出来るためである。その後、上回動
フレーム6は電動機11により、カップリング10を介
し、ウオームジヤツキ9のロッド16を押し下゛、ケプ
ランジャ12、ポールスクリュ19、ピスト′ン13と
一体となって所定蚤低速下降する。
That is, the relative position between the upper movable frame 6 and the plunger 12 is fixed. Here, the pole screw shaft 20, the nut 19
The reason why the electromagnetic brake 23 is used is that the electric charge directly applied to the plunger 12 can be counteracted by a large load by holding the rotational force due to the inclination angle of the pole screw shaft 20 with the electromagnetic brake 23. Thereafter, the upper moving frame 6 is pushed down by the electric motor 11 through the coupling 10 to the rod 16 of the worm jack 9, and is lowered together with the Keplunger 12, the pole screw 19, and the piston 13 at a predetermined low speed. .

尚、この下降速度及び下降量はレジンの種類及び封止相
手によって微妙に変る。従って最も重要なもので不良品
の発生率を左右する最大要因である。本発明では第4図
に示すように、レジンの送給速度及び送給量を正確に制
御するため、従来の油圧式プランジャ方式では不可能で
おった微少な調整をなし得るように第5図に示す速度お
よび位置設定器26、デジタル制御装置27、ドライブ
装置28を用いて電動機11を制御することにより速度
および位置が精度良く制御が可能で、この方式によれば
、送給速度(プランジャ速度)をa。
Note that the speed and amount of this descent slightly vary depending on the type of resin and the sealing partner. Therefore, it is the most important factor and the biggest factor that affects the incidence of defective products. In the present invention, as shown in Fig. 4, in order to accurately control the feeding speed and amount of resin, as shown in Fig. 5, fine adjustments that were impossible with the conventional hydraulic plunger method can be made. By controlling the electric motor 11 using the speed and position setting device 26, digital control device 27, and drive device 28 shown in FIG. ) to a.

a’、、a“と任意に調整です、シかも、送給量(プラ
ンジャストローク)を同様に変え得ることによって、過
不足のない良好な成形が可能となる。
It is possible to arbitrarily adjust a', a', etc., but by changing the feed amount (plunger stroke) in the same way, good molding with no excess or deficiency is possible.

又、更にレジン硬化時は電動サーボモータのトルクを制
御し、一定低圧で保圧することも又必要である。レジン
硬化終了後、下金型2は下降する、一方、上回動フレー
ム6は更に下降しボット15−′昇、再度下降してボッ
ト15内のカスを完全に取除く、この後、上回動フレー
ム6は電動サーボモータ11によシ高速上昇、シリンダ
4内に再度エヤーヲ送給してプランジャ12、ピストン
13、ポールスクリュ軸20を上昇し、次サイクルまで
待機する。
Further, when curing the resin, it is also necessary to control the torque of the electric servo motor and maintain the pressure at a constant low pressure. After the resin has hardened, the lower mold 2 is lowered, while the upper movable frame 6 is further lowered to raise the bot 15-', and then lowered again to completely remove the debris inside the bot 15. The moving frame 6 is raised at high speed by the electric servo motor 11, and air is again fed into the cylinder 4 to raise the plunger 12, piston 13, and pole screw shaft 20, and waits until the next cycle.

尚、この動作中“に、電磁ブレーキが開閉動作をするこ
とは云うまでもない。
It goes without saying that the electromagnetic brake opens and closes during this operation.

又、シリンダ14のもう一つの作用はポット(al I5よりレジンを圧送する際、ボッ)15とプランジャ
12との調心性を持たせることである。
Another function of the cylinder 14 is to provide alignment between the pot 15 and the plunger 12 when the resin is pumped from the al I5.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、未充填部やボイド発生、又、過剰によ
るパリ発生等の不良現象がほぼ階無となり信頼性(高成
形歩留り)の高い及びレジン歩留りの良い多プランジャ
型成形機が可能となる。
According to the present invention, defective phenomena such as unfilled areas, voids, and fringing due to excess are virtually eliminated, making it possible to create a multi-plunger molding machine with high reliability (high molding yield) and good resin yield. Become.

【図面の簡単な説明】[Brief explanation of the drawing]

gt図は本発明の一実施例の多プランジャ形トランスフ
ァ成形機の正面図、第2図は第1図の■−II矢視断面
図、第3図はトランスファ成形機の動作説明図、第4図
はプランジャストローク及びプランジャによる圧送圧力
の関係図、第5図は電動機用制御装置のブロック線図で
ある。 1・・・上金型、2・・・下金型、3・・・上金型台、
4・・・下金型台、6・・・上回動フレーム、12・・
・プランジャ、13・・・ピストン、17・・・タブレ
ット 20−・・ポールスクリュ軸、22・・・スプリ
ング、24・・・減圧弁、25・・・切換弁。
gt diagram is a front view of a multi-plunger type transfer molding machine according to an embodiment of the present invention, FIG. The figure is a relationship between the plunger stroke and the pumping pressure by the plunger, and FIG. 5 is a block diagram of the electric motor control device. 1... Upper mold, 2... Lower mold, 3... Upper mold stand,
4...Lower mold stand, 6...Upper moving frame, 12...
- Plunger, 13... Piston, 17... Tablet 20-... Pole screw shaft, 22... Spring, 24... Pressure reducing valve, 25... Switching valve.

Claims (1)

【特許請求の範囲】 1、複数のプランジャを下降又は上昇させて、レジンを
金型内に注入する多プランジャ型トランスファ成形機に
おいて、 それぞれの前記プランジャが異なるタブレット高さ位置
までにソフトタッチさせるための、シリンダ、減圧装置
、ピストン、ボールスクリュー軸の上、下動を補助する
スプリング、ソフトタッチ後可動フレームとの位置固定
のための前記ボールスクリュー軸、ナットおよび電磁ブ
レーキを設けたことを特徴とする多プランジャ型トラン
スファ成形機。 2、前記複数プランジャを同時に上、下動させるウォー
ムジャッキ、可動フレームおよびこれ等を駆動する電動
サーボモータを設けレジンの送給速度、送給量を適正値
に制御することを特徴とする特許請求の範囲第1項記載
の多プランジャ型トランスファ成形機。
[Claims] 1. In a multi-plunger type transfer molding machine that injects resin into a mold by lowering or raising a plurality of plungers, each of the plungers can soft touch the tablet to a different height position. A cylinder, a pressure reducing device, a piston, a spring for assisting the upward and downward movement of the ball screw shaft, the ball screw shaft for fixing the position with the movable frame after a soft touch, a nut, and an electromagnetic brake are provided. Multi-plunger type transfer molding machine. 2. A patent claim characterized in that a worm jack that simultaneously moves the plurality of plungers up and down, a movable frame, and an electric servo motor that drives these are provided to control the resin feeding speed and feeding amount to appropriate values. A multi-plunger transfer molding machine according to item 1.
JP1657085A 1985-02-01 1985-02-01 Multi-plunger type transfer molding machine Pending JPS61177218A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1657085A JPS61177218A (en) 1985-02-01 1985-02-01 Multi-plunger type transfer molding machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1657085A JPS61177218A (en) 1985-02-01 1985-02-01 Multi-plunger type transfer molding machine

Publications (1)

Publication Number Publication Date
JPS61177218A true JPS61177218A (en) 1986-08-08

Family

ID=11919945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1657085A Pending JPS61177218A (en) 1985-02-01 1985-02-01 Multi-plunger type transfer molding machine

Country Status (1)

Country Link
JP (1) JPS61177218A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141217A (en) * 1988-11-21 1990-05-30 T & K Internatl Kenkyusho:Kk Method and apparatus for resin sealing mold of electronic parts
NL9100339A (en) * 1991-02-26 1992-09-16 Boschman Tech Bv DEVICE FOR ENCLOSING ELECTRONIC COMPONENTS.
US5413471A (en) * 1992-05-12 1995-05-09 Mitsubishi Denki Kabushiki Kaisha Resin-sealing apparatus including a gas spring
JP2007019477A (en) * 2005-06-03 2007-01-25 Sony Corp Material for mems device, method of manufacturing same, and mems device that includes same
JP2012086376A (en) * 2010-10-15 2012-05-10 Sodick Plastech Co Ltd Method and mechanism for control of plunger in transfer molding machine
CN107984676A (en) * 2016-10-27 2018-05-04 浙江工商职业技术学院 A kind of injection mold with inserts positioning

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141217A (en) * 1988-11-21 1990-05-30 T & K Internatl Kenkyusho:Kk Method and apparatus for resin sealing mold of electronic parts
NL9100339A (en) * 1991-02-26 1992-09-16 Boschman Tech Bv DEVICE FOR ENCLOSING ELECTRONIC COMPONENTS.
US5158780A (en) * 1991-02-26 1992-10-27 Boschman Technologies B.V. Device for encapsulating electronic components
US5413471A (en) * 1992-05-12 1995-05-09 Mitsubishi Denki Kabushiki Kaisha Resin-sealing apparatus including a gas spring
US5700001A (en) * 1992-05-12 1997-12-23 Mitsubishi Denki Kabushiki Kaisha Method of resin sealing an object with apparatus including a gas spring
JP2007019477A (en) * 2005-06-03 2007-01-25 Sony Corp Material for mems device, method of manufacturing same, and mems device that includes same
JP4715641B2 (en) * 2005-06-03 2011-07-06 ソニー株式会社 Material for MEMS device, method for manufacturing the material, and MEMS device including the material
JP2012086376A (en) * 2010-10-15 2012-05-10 Sodick Plastech Co Ltd Method and mechanism for control of plunger in transfer molding machine
CN107984676A (en) * 2016-10-27 2018-05-04 浙江工商职业技术学院 A kind of injection mold with inserts positioning
CN107984676B (en) * 2016-10-27 2019-06-07 浙江工商职业技术学院 A kind of injection mold with inserts positioning

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