SG126724A1 - Polishing pad for transparent window - Google Patents

Polishing pad for transparent window

Info

Publication number
SG126724A1
SG126724A1 SG200303773A SG200303773A SG126724A1 SG 126724 A1 SG126724 A1 SG 126724A1 SG 200303773 A SG200303773 A SG 200303773A SG 200303773 A SG200303773 A SG 200303773A SG 126724 A1 SG126724 A1 SG 126724A1
Authority
SG
Singapore
Prior art keywords
polishing pad
aperture
transparent window
polishing
layer
Prior art date
Application number
SG200303773A
Inventor
Manoocher Birang
Allan Gleason
William L Guthrie
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG126724A1 publication Critical patent/SG126724A1/en

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A polishing pad (18) for a chemical mechanical polishing apparatus and a method for making the same. The polishing pad (18) has an opaque layer having a polishing surface (22), a bottom surface (20), and an aperture therethrough; and a solid transparent window (630) secured in the aperture by an adhesive. The polishing pad (18) has a second layer adjacent to the bottom suftace (20) of the opaque layer (22), said second layer including an aperture aligned with the aperture in the opaque layer (22). The top surface (606) of the window (630) is substantially coplanar with the polishing surface.
SG200303773A 1996-08-16 1997-08-04 Polishing pad for transparent window SG126724A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86993096A 1996-08-16 1996-08-16

Publications (1)

Publication Number Publication Date
SG126724A1 true SG126724A1 (en) 2006-11-29

Family

ID=38288500

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200303773A SG126724A1 (en) 1996-08-16 1997-08-04 Polishing pad for transparent window

Country Status (1)

Country Link
SG (1) SG126724A1 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0663265A1 (en) * 1993-12-22 1995-07-19 International Business Machines Corporation In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0663265A1 (en) * 1993-12-22 1995-07-19 International Business Machines Corporation In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing

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