SG126724A1 - Polishing pad for transparent window - Google Patents
Polishing pad for transparent windowInfo
- Publication number
- SG126724A1 SG126724A1 SG200303773A SG200303773A SG126724A1 SG 126724 A1 SG126724 A1 SG 126724A1 SG 200303773 A SG200303773 A SG 200303773A SG 200303773 A SG200303773 A SG 200303773A SG 126724 A1 SG126724 A1 SG 126724A1
- Authority
- SG
- Singapore
- Prior art keywords
- polishing pad
- aperture
- transparent window
- polishing
- layer
- Prior art date
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A polishing pad (18) for a chemical mechanical polishing apparatus and a method for making the same. The polishing pad (18) has an opaque layer having a polishing surface (22), a bottom surface (20), and an aperture therethrough; and a solid transparent window (630) secured in the aperture by an adhesive. The polishing pad (18) has a second layer adjacent to the bottom suftace (20) of the opaque layer (22), said second layer including an aperture aligned with the aperture in the opaque layer (22). The top surface (606) of the window (630) is substantially coplanar with the polishing surface.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US86993096A | 1996-08-16 | 1996-08-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG126724A1 true SG126724A1 (en) | 2006-11-29 |
Family
ID=38288500
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200303773A SG126724A1 (en) | 1996-08-16 | 1997-08-04 | Polishing pad for transparent window |
Country Status (1)
Country | Link |
---|---|
SG (1) | SG126724A1 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0663265A1 (en) * | 1993-12-22 | 1995-07-19 | International Business Machines Corporation | In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing |
-
1997
- 1997-08-04 SG SG200303773A patent/SG126724A1/en unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0663265A1 (en) * | 1993-12-22 | 1995-07-19 | International Business Machines Corporation | In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
AU2131783A (en) | Dewatering and imprinting felt | |
GB2235333B (en) | Thin film photovoltaic panel and method | |
IL114053A0 (en) | Self-contained imaging assembly and method for forming images therein | |
AU556576B2 (en) | Coating transparent substrate | |
GR3024543T3 (en) | Transparent optically variable device | |
AU5608190A (en) | Homogeneous amperometric immunoassay | |
AU1590183A (en) | Fibre felt | |
HK64994A (en) | Watch glass and method for manufacturing such a glass | |
EP0434013A3 (en) | Epoxy resin-impregnated glass cloth sheet having adhesive layer | |
EP0440824A4 (en) | Hologram calendar | |
AU2462595A (en) | Surface mount and flip chip technology | |
DE3572065D1 (en) | Stretched surface recording disk substrate | |
GB2013401A (en) | Backlighting flexible switch | |
EP0166112A3 (en) | Semiconductor device with bonding pads surrounded by source and/or drain regions | |
JPS6417455A (en) | Semiconductor device | |
GB8529386D0 (en) | Applying surface layer to wall | |
GB8910650D0 (en) | Panel | |
AU7116287A (en) | Layered light receiving member for electrophotography comprising buffer layer | |
AU7033787A (en) | Enzyme immunoassay device | |
RO112599B1 (en) | Document provided with coated safe printing structure and manufacturing process | |
SG126724A1 (en) | Polishing pad for transparent window | |
AU567814B2 (en) | Colour developer composition and record material carrying the composition | |
IT8519133A0 (en) | PROCEDURE AND DEVICE FOR BONDING SUBSTRATES. | |
AU572959B2 (en) | Excluder device for telephones in parallel | |
DE3468668D1 (en) | Method of providing a transparent layer on a substrate |