SG125112A1 - Apparatus for holding flat substrate - Google Patents

Apparatus for holding flat substrate

Info

Publication number
SG125112A1
SG125112A1 SG200402065A SG200402065A SG125112A1 SG 125112 A1 SG125112 A1 SG 125112A1 SG 200402065 A SG200402065 A SG 200402065A SG 200402065 A SG200402065 A SG 200402065A SG 125112 A1 SG125112 A1 SG 125112A1
Authority
SG
Singapore
Prior art keywords
flat substrate
holding
magnetic plates
holding plate
plate
Prior art date
Application number
SG200402065A
Inventor
Kwang Ho Jeong
Yeon Jin Yi
Seong Mun Kim
Original Assignee
Kwang Ho Jeong
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kwang Ho Jeong filed Critical Kwang Ho Jeong
Priority to SG200402065A priority Critical patent/SG125112A1/en
Publication of SG125112A1 publication Critical patent/SG125112A1/en

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Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

An object of the present invention is to provide a flat substrate holding apparatus, capable of efficiently holding a flat substrate, such as a glass substrate, when producing a flat panel display, such as a liquid crystal display, a Plasma Display Panel, or an organic light emitting display, in addition to firmly holding the flat substrate even when the flat substrate is transported from a processing stage to another processing stage. The apparatus holds a flat substrate placed on an upper surface of a base which moves vertically, and includes a plurality of magnetic plates, a holding plate, and a separation plate. The magnetic plates are uniformly provided on an upper surface of the flat substrate. The holding plate is movably provided above the magnetic plates, and includes a plurality of permanent magnets provided on a lower surface of the holding plate to correspond to the magnetic plates, and a plurality of through holes provided throughout the holding plate. The separation plate is provided above the holding plate, with a plurality of actuating pins being provided on a lower surface of the separation plate to be inserted into the corresponding through holes, thus coming into contact with the upper surface of the flat substrate.
SG200402065A 2004-04-15 2004-04-15 Apparatus for holding flat substrate SG125112A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200402065A SG125112A1 (en) 2004-04-15 2004-04-15 Apparatus for holding flat substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200402065A SG125112A1 (en) 2004-04-15 2004-04-15 Apparatus for holding flat substrate

Publications (1)

Publication Number Publication Date
SG125112A1 true SG125112A1 (en) 2006-09-29

Family

ID=38116967

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200402065A SG125112A1 (en) 2004-04-15 2004-04-15 Apparatus for holding flat substrate

Country Status (1)

Country Link
SG (1) SG125112A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112830256A (en) * 2020-12-31 2021-05-25 合肥工业大学 Elastic pressure stabilizer for sheet air-float supporting system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005286114A (en) * 2004-03-30 2005-10-13 Koko Tei Planar substrate holder
JP2006000930A (en) * 2004-06-15 2006-01-05 Shin Etsu Polymer Co Ltd Component holder

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005286114A (en) * 2004-03-30 2005-10-13 Koko Tei Planar substrate holder
JP2006000930A (en) * 2004-06-15 2006-01-05 Shin Etsu Polymer Co Ltd Component holder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112830256A (en) * 2020-12-31 2021-05-25 合肥工业大学 Elastic pressure stabilizer for sheet air-float supporting system
CN112830256B (en) * 2020-12-31 2023-07-28 合肥工业大学 Elastic pressure stabilizing device of sheet air bearing system

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