SG125112A1 - Apparatus for holding flat substrate - Google Patents
Apparatus for holding flat substrateInfo
- Publication number
- SG125112A1 SG125112A1 SG200402065A SG200402065A SG125112A1 SG 125112 A1 SG125112 A1 SG 125112A1 SG 200402065 A SG200402065 A SG 200402065A SG 200402065 A SG200402065 A SG 200402065A SG 125112 A1 SG125112 A1 SG 125112A1
- Authority
- SG
- Singapore
- Prior art keywords
- flat substrate
- holding
- magnetic plates
- holding plate
- plate
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
An object of the present invention is to provide a flat substrate holding apparatus, capable of efficiently holding a flat substrate, such as a glass substrate, when producing a flat panel display, such as a liquid crystal display, a Plasma Display Panel, or an organic light emitting display, in addition to firmly holding the flat substrate even when the flat substrate is transported from a processing stage to another processing stage. The apparatus holds a flat substrate placed on an upper surface of a base which moves vertically, and includes a plurality of magnetic plates, a holding plate, and a separation plate. The magnetic plates are uniformly provided on an upper surface of the flat substrate. The holding plate is movably provided above the magnetic plates, and includes a plurality of permanent magnets provided on a lower surface of the holding plate to correspond to the magnetic plates, and a plurality of through holes provided throughout the holding plate. The separation plate is provided above the holding plate, with a plurality of actuating pins being provided on a lower surface of the separation plate to be inserted into the corresponding through holes, thus coming into contact with the upper surface of the flat substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200402065A SG125112A1 (en) | 2004-04-15 | 2004-04-15 | Apparatus for holding flat substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200402065A SG125112A1 (en) | 2004-04-15 | 2004-04-15 | Apparatus for holding flat substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
SG125112A1 true SG125112A1 (en) | 2006-09-29 |
Family
ID=38116967
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200402065A SG125112A1 (en) | 2004-04-15 | 2004-04-15 | Apparatus for holding flat substrate |
Country Status (1)
Country | Link |
---|---|
SG (1) | SG125112A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112830256A (en) * | 2020-12-31 | 2021-05-25 | 合肥工业大学 | Elastic pressure stabilizer for sheet air-float supporting system |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005286114A (en) * | 2004-03-30 | 2005-10-13 | Koko Tei | Planar substrate holder |
JP2006000930A (en) * | 2004-06-15 | 2006-01-05 | Shin Etsu Polymer Co Ltd | Component holder |
-
2004
- 2004-04-15 SG SG200402065A patent/SG125112A1/en unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005286114A (en) * | 2004-03-30 | 2005-10-13 | Koko Tei | Planar substrate holder |
JP2006000930A (en) * | 2004-06-15 | 2006-01-05 | Shin Etsu Polymer Co Ltd | Component holder |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112830256A (en) * | 2020-12-31 | 2021-05-25 | 合肥工业大学 | Elastic pressure stabilizer for sheet air-float supporting system |
CN112830256B (en) * | 2020-12-31 | 2023-07-28 | 合肥工业大学 | Elastic pressure stabilizing device of sheet air bearing system |
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