SG117389A1 - Substrate cleaning system - Google Patents

Substrate cleaning system

Info

Publication number
SG117389A1
SG117389A1 SG200103256A SG200103256A SG117389A1 SG 117389 A1 SG117389 A1 SG 117389A1 SG 200103256 A SG200103256 A SG 200103256A SG 200103256 A SG200103256 A SG 200103256A SG 117389 A1 SG117389 A1 SG 117389A1
Authority
SG
Singapore
Prior art keywords
cleaning system
substrate cleaning
substrate
cleaning
Prior art date
Application number
SG200103256A
Inventor
Ohkura Ryoichi
Ono Yuji
Yamaguchi Hiroshi
Takaishi Miyuki
Kamikochi Hideo
Original Assignee
S E S Company Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S E S Company Ltd filed Critical S E S Company Ltd
Priority to SG200103256A priority Critical patent/SG117389A1/en
Publication of SG117389A1 publication Critical patent/SG117389A1/en

Links

SG200103256A 2001-06-01 2001-06-01 Substrate cleaning system SG117389A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200103256A SG117389A1 (en) 2001-06-01 2001-06-01 Substrate cleaning system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200103256A SG117389A1 (en) 2001-06-01 2001-06-01 Substrate cleaning system

Publications (1)

Publication Number Publication Date
SG117389A1 true SG117389A1 (en) 2005-12-29

Family

ID=35668167

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200103256A SG117389A1 (en) 2001-06-01 2001-06-01 Substrate cleaning system

Country Status (1)

Country Link
SG (1) SG117389A1 (en)

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