SG11202113134QA - Imaging system and method of manufacturing a metalens array - Google Patents

Imaging system and method of manufacturing a metalens array

Info

Publication number
SG11202113134QA
SG11202113134QA SG11202113134QA SG11202113134QA SG11202113134QA SG 11202113134Q A SG11202113134Q A SG 11202113134QA SG 11202113134Q A SG11202113134Q A SG 11202113134QA SG 11202113134Q A SG11202113134Q A SG 11202113134QA SG 11202113134Q A SG11202113134Q A SG 11202113134QA
Authority
SG
Singapore
Prior art keywords
manufacturing
imaging system
metalens array
metalens
array
Prior art date
Application number
SG11202113134QA
Inventor
Jinxin Fu
Tapashree Roy
Ludovic Godet
Wayne Mcmillan
Robert J Visser
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG11202113134QA publication Critical patent/SG11202113134QA/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B27/0172—Head mounted characterised by optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
    • G02B3/0068—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between arranged in a single integral body or plate, e.g. laminates or hybrid structures with other optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • G02B2027/0132—Head-up displays characterised by optical features comprising binocular systems
    • G02B2027/0134—Head-up displays characterised by optical features comprising binocular systems of stereoscopic type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B2027/0178—Eyeglass type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30—Collimators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
SG11202113134QA 2019-06-04 2020-05-19 Imaging system and method of manufacturing a metalens array SG11202113134QA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IN201941022140 2019-06-04
US16/537,326 US12050327B2 (en) 2019-06-04 2019-08-09 Imaging system and method of manufacturing a metalens array
PCT/US2020/033604 WO2020247172A1 (en) 2019-06-04 2020-05-19 Imaging system and method of manufacturing a metalens array

Publications (1)

Publication Number Publication Date
SG11202113134QA true SG11202113134QA (en) 2021-12-30

Family

ID=73652587

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202113134QA SG11202113134QA (en) 2019-06-04 2020-05-19 Imaging system and method of manufacturing a metalens array

Country Status (7)

Country Link
US (1) US12050327B2 (en)
EP (1) EP3980838A4 (en)
JP (1) JP7450642B2 (en)
KR (1) KR20220002754A (en)
CN (1) CN114207482B (en)
SG (1) SG11202113134QA (en)
WO (1) WO2020247172A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024010520A1 (en) * 2022-07-08 2024-01-11 Agency For Science, Technology And Research Optical system, method of forming the same, method of direct laser writing

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Also Published As

Publication number Publication date
WO2020247172A1 (en) 2020-12-10
KR20220002754A (en) 2022-01-06
US20200393599A1 (en) 2020-12-17
JP2022536079A (en) 2022-08-12
EP3980838A1 (en) 2022-04-13
EP3980838A4 (en) 2023-06-28
CN114207482B (en) 2024-02-09
CN114207482A (en) 2022-03-18
JP7450642B2 (en) 2024-03-15
US12050327B2 (en) 2024-07-30

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