SG11202109145TA - Doped quartz glass component for use in a plasma-assisted manufacturing process and method of producing the component - Google Patents
Doped quartz glass component for use in a plasma-assisted manufacturing process and method of producing the componentInfo
- Publication number
- SG11202109145TA SG11202109145TA SG11202109145TA SG11202109145TA SG11202109145TA SG 11202109145T A SG11202109145T A SG 11202109145TA SG 11202109145T A SG11202109145T A SG 11202109145TA SG 11202109145T A SG11202109145T A SG 11202109145TA SG 11202109145T A SG11202109145T A SG 11202109145TA
- Authority
- SG
- Singapore
- Prior art keywords
- component
- plasma
- producing
- manufacturing process
- quartz glass
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
- C03B19/066—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction for the production of quartz or fused silica articles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/32—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with aluminium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
- C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/08—Doped silica-based glasses containing boron or halide
- C03C2201/12—Doped silica-based glasses containing boron or halide containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/30—Doped silica-based glasses containing metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/30—Doped silica-based glasses containing metals
- C03C2201/32—Doped silica-based glasses containing metals containing aluminium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/30—Doped silica-based glasses containing metals
- C03C2201/34—Doped silica-based glasses containing metals containing rare earth metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/30—Doped silica-based glasses containing metals
- C03C2201/40—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/30—Doped silica-based glasses containing metals
- C03C2201/40—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
- C03C2201/42—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn containing titanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/20—Wet processes, e.g. sol-gel process
- C03C2203/22—Wet processes, e.g. sol-gel process using colloidal silica sols
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/20—Wet processes, e.g. sol-gel process
- C03C2203/30—Additives
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Dispersion Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Glass Compositions (AREA)
- Drying Of Semiconductors (AREA)
- Glass Melting And Manufacturing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19162613.4A EP3708547A1 (en) | 2019-03-13 | 2019-03-13 | Component consisting of doped quartz glass for use in a plasma enhanced production process, and method for producing said component |
| PCT/EP2020/055116 WO2020182479A1 (en) | 2019-03-13 | 2020-02-27 | Doped fused silica component for use in a plasma-assisted manufacturing process and method for producing the component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11202109145TA true SG11202109145TA (en) | 2021-09-29 |
Family
ID=65812078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11202109145TA SG11202109145TA (en) | 2019-03-13 | 2020-02-27 | Doped quartz glass component for use in a plasma-assisted manufacturing process and method of producing the component |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20220153626A1 (en) |
| EP (2) | EP3708547A1 (en) |
| JP (1) | JP7502323B2 (en) |
| KR (1) | KR20220002868A (en) |
| CN (1) | CN113508095A (en) |
| SG (1) | SG11202109145TA (en) |
| TW (1) | TW202100476A (en) |
| WO (1) | WO2020182479A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102022133501A1 (en) | 2022-12-15 | 2024-06-20 | Qsil Gmbh Quarzschmelze Ilmenau | Process for producing a MAS glass with high etching homogeneity |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6887576B2 (en) | 2000-08-23 | 2005-05-03 | Herseus Quarzglas GmbH & Co. KG | Quartz glass body having improved resistance against plasma corrosion, and method for production thereof |
| JP4744003B2 (en) | 2001-06-01 | 2011-08-10 | 東ソー株式会社 | Quartz glass having uniform dispersibility of zirconium, method for producing the same, member and apparatus using the same |
| US7365037B2 (en) | 2004-09-30 | 2008-04-29 | Shin-Etsu Quartz Products Co., Ltd. | Quartz glass having excellent resistance against plasma corrosion and method for producing the same |
| DE102005017739B4 (en) | 2005-04-15 | 2009-11-05 | Heraeus Quarzglas Gmbh & Co. Kg | Quartz glass holder for the processing of semiconductor wafers and method for the production of the holder |
| DE102012012524B3 (en) * | 2012-06-26 | 2013-07-18 | Heraeus Quarzglas Gmbh & Co. Kg | Process for producing a doped SiO 2 slip and use of the SiO 2 slip |
| DE102013204815A1 (en) * | 2013-03-19 | 2014-09-25 | Heraeus Quarzglas Gmbh & Co. Kg | Fluorination of doped quartz glass |
| EP3263533B1 (en) | 2016-06-28 | 2019-05-08 | Heraeus Quarzglas GmbH & Co. KG | Rare earth metal doped quartz glass and method for producing the same |
| EP3381870B1 (en) * | 2017-03-30 | 2020-12-23 | Heraeus Quarzglas GmbH & Co. KG | Method for producing a component made of rare earth doped quartz glass |
-
2019
- 2019-03-13 EP EP19162613.4A patent/EP3708547A1/en not_active Withdrawn
-
2020
- 2020-02-27 CN CN202080018357.6A patent/CN113508095A/en active Pending
- 2020-02-27 JP JP2021554772A patent/JP7502323B2/en active Active
- 2020-02-27 KR KR1020217029309A patent/KR20220002868A/en unknown
- 2020-02-27 US US17/438,698 patent/US20220153626A1/en active Pending
- 2020-02-27 SG SG11202109145TA patent/SG11202109145TA/en unknown
- 2020-02-27 WO PCT/EP2020/055116 patent/WO2020182479A1/en unknown
- 2020-02-27 EP EP20706303.3A patent/EP3938324A1/en active Pending
- 2020-03-11 TW TW109107926A patent/TW202100476A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP2022524452A (en) | 2022-05-02 |
| EP3708547A1 (en) | 2020-09-16 |
| KR20220002868A (en) | 2022-01-07 |
| EP3938324A1 (en) | 2022-01-19 |
| CN113508095A (en) | 2021-10-15 |
| WO2020182479A1 (en) | 2020-09-17 |
| TW202100476A (en) | 2021-01-01 |
| JP7502323B2 (en) | 2024-06-18 |
| US20220153626A1 (en) | 2022-05-19 |
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