SG11202100159XA - Robotic arm assembly equipped with elbow hard stop - Google Patents

Robotic arm assembly equipped with elbow hard stop

Info

Publication number
SG11202100159XA
SG11202100159XA SG11202100159XA SG11202100159XA SG11202100159XA SG 11202100159X A SG11202100159X A SG 11202100159XA SG 11202100159X A SG11202100159X A SG 11202100159XA SG 11202100159X A SG11202100159X A SG 11202100159XA SG 11202100159X A SG11202100159X A SG 11202100159XA
Authority
SG
Singapore
Prior art keywords
arm assembly
robotic arm
hard stop
assembly equipped
elbow
Prior art date
Application number
SG11202100159XA
Inventor
Daniel Alaniz
Thomas Walton
Michael Dailey
Original Assignee
Fabworx Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fabworx Solutions Inc filed Critical Fabworx Solutions Inc
Publication of SG11202100159XA publication Critical patent/SG11202100159XA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/02Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041Cylindrical coordinate type
    • B25J9/042Cylindrical coordinate type comprising an articulated arm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00Manipulators not otherwise provided for
    • B25J11/0095Manipulators transporting wafers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/10Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B25J9/101Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means using limit-switches, -stops
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/10Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B66HOISTING; LIFTING; HAULING
    • B66FHOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F17/00Safety devices, e.g. for limiting or indicating lifting force
    • B66F17/003Safety devices, e.g. for limiting or indicating lifting force for fork-lift trucks
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05GCONTROL DEVICES OR SYSTEMS INSOFAR AS CHARACTERISED BY MECHANICAL FEATURES ONLY
    • G05G5/00Means for preventing, limiting or returning the movements of parts of a control mechanism, e.g. locking controlling member
    • G05G5/04Stops for limiting movement of members, e.g. adjustable stop

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Transmission Devices (AREA)
SG11202100159XA 2018-06-27 2019-06-27 Robotic arm assembly equipped with elbow hard stop SG11202100159XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862690854P 2018-06-27 2018-06-27
PCT/US2019/039357 WO2020006155A1 (en) 2018-06-27 2019-06-27 Robotic arm assembly equipped with elbow hard stop

Publications (1)

Publication Number Publication Date
SG11202100159XA true SG11202100159XA (en) 2021-02-25

Family

ID=68987318

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202100159XA SG11202100159XA (en) 2018-06-27 2019-06-27 Robotic arm assembly equipped with elbow hard stop

Country Status (6)

Country Link
US (1) US20210260751A1 (en)
JP (1) JP2021536142A (en)
KR (1) KR20210069029A (en)
SG (1) SG11202100159XA (en)
TW (1) TW202012128A (en)
WO (1) WO2020006155A1 (en)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5180276A (en) * 1991-04-18 1993-01-19 Brooks Automation, Inc. Articulated arm transfer device
DE69931057T2 (en) * 1998-07-22 2006-11-23 Tokyo Electron Ltd. TRANSFER ARM
US6601468B2 (en) * 2000-10-24 2003-08-05 Innovative Robotic Solutions Drive system for multiple axis robot arm
EP2512758B1 (en) * 2009-12-14 2017-09-13 HDT Expeditionary Systems, Inc. One motor finger mechanism
US20110154929A1 (en) * 2009-12-30 2011-06-30 United Microelectronics Corp. Wafer transfer apparatus and shielding mechanism
JP5525399B2 (en) * 2010-09-16 2014-06-18 東京エレクトロン株式会社 Transport device, substrate processing system, and attitude control mechanism
JP2015163414A (en) * 2014-02-28 2015-09-10 ファナック株式会社 Robot equipped with fastening device that regulate relative rotation movement of two member and fastening device
JP6581831B2 (en) * 2015-07-28 2019-09-25 東京エレクトロン株式会社 Holding section posture maintenance mechanism

Also Published As

Publication number Publication date
WO2020006155A1 (en) 2020-01-02
JP2021536142A (en) 2021-12-23
KR20210069029A (en) 2021-06-10
US20210260751A1 (en) 2021-08-26
TW202012128A (en) 2020-04-01

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