SG11202009222SA - Quartz glass crucible and method for producing the same - Google Patents

Quartz glass crucible and method for producing the same

Info

Publication number
SG11202009222SA
SG11202009222SA SG11202009222SA SG11202009222SA SG11202009222SA SG 11202009222S A SG11202009222S A SG 11202009222SA SG 11202009222S A SG11202009222S A SG 11202009222SA SG 11202009222S A SG11202009222S A SG 11202009222SA SG 11202009222S A SG11202009222S A SG 11202009222SA
Authority
SG
Singapore
Prior art keywords
producing
same
quartz glass
glass crucible
crucible
Prior art date
Application number
SG11202009222SA
Inventor
Yuji Baba
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Publication of SG11202009222SA publication Critical patent/SG11202009222SA/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/09Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10Crucibles or containers for supporting the melt
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002Crucibles or containers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates
SG11202009222SA 2018-04-06 2019-02-19 Quartz glass crucible and method for producing the same SG11202009222SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018073766A JP7141844B2 (en) 2018-04-06 2018-04-06 Manufacturing method of quartz glass crucible
PCT/JP2019/005945 WO2019193851A1 (en) 2018-04-06 2019-02-19 Quartz glass crucible and method of manufacturing same

Publications (1)

Publication Number Publication Date
SG11202009222SA true SG11202009222SA (en) 2020-10-29

Family

ID=68100677

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202009222SA SG11202009222SA (en) 2018-04-06 2019-02-19 Quartz glass crucible and method for producing the same

Country Status (8)

Country Link
US (1) US11629429B2 (en)
EP (1) EP3778996A4 (en)
JP (1) JP7141844B2 (en)
KR (1) KR20200140815A (en)
CN (1) CN111936678B (en)
SG (1) SG11202009222SA (en)
TW (1) TWI795534B (en)
WO (1) WO2019193851A1 (en)

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729871B2 (en) 1987-12-03 1995-04-05 信越半導体 株式会社 Quartz crucible for pulling single crystals
US4935046A (en) 1987-12-03 1990-06-19 Shin-Etsu Handotai Company, Limited Manufacture of a quartz glass vessel for the growth of single crystal semiconductor
JP2714860B2 (en) * 1989-07-28 1998-02-16 東芝セラミックス株式会社 Quartz glass crucible for pulling semiconductor nest crystal
DE19962449C2 (en) * 1999-12-22 2003-09-25 Heraeus Quarzglas Quartz glass crucibles and process for its production
JP4166241B2 (en) * 2003-05-01 2008-10-15 信越石英株式会社 Silica glass crucible for pulling silicon single crystal and method for producing the same
TWI234981B (en) * 2004-03-19 2005-06-21 Asustek Comp Inc Cover with guiding function and electrical apparatus
US7716948B2 (en) 2006-12-18 2010-05-18 Heraeus Shin-Etsu America, Inc. Crucible having a doped upper wall portion and method for making the same
DE102008026890B3 (en) * 2008-06-05 2009-06-04 Heraeus Quarzglas Gmbh & Co. Kg Method and device for producing a quartz glass crucible
JP5069663B2 (en) * 2008-10-31 2012-11-07 ジャパンスーパークォーツ株式会社 Quartz glass crucible with multilayer structure
JP5036735B2 (en) * 2009-01-05 2012-09-26 ジャパンスーパークォーツ株式会社 Silica glass crucible for pulling silicon single crystal and manufacturing method thereof
JP4987029B2 (en) * 2009-04-02 2012-07-25 ジャパンスーパークォーツ株式会社 Silica glass crucible for pulling silicon single crystals
JP5472971B2 (en) * 2009-05-29 2014-04-16 コバレントマテリアル株式会社 Silica glass crucible
EP2476786B1 (en) * 2009-09-10 2014-02-19 Japan Super Quartz Corporation Silica glass crucible for pulling silicon single crystal and method for producing same
JP5334315B2 (en) * 2009-09-30 2013-11-06 コバレントマテリアル株式会社 Silica glass crucible for silicon single crystal pulling
DE102010008162B4 (en) * 2010-02-16 2017-03-16 Heraeus Quarzglas Gmbh & Co. Kg Method for the production of quartz glass for a quartz glass crucible
JP5473878B2 (en) * 2010-12-02 2014-04-16 株式会社Sumco Method for producing quartz glass crucible for pulling silicon single crystal
KR101497385B1 (en) * 2012-05-15 2015-03-03 신에쯔 세끼에이 가부시키가이샤 Silica vessel for drawing up monocrystalline silicon and method for producing same
EP3088572B1 (en) * 2013-12-28 2019-05-15 SUMCO Corporation Quartz glass crucible and manufacturing method therefor
KR20170000548A (en) * 2015-06-24 2017-01-03 (주) 보람케메탈 Mold and Vacuum System for Preparation of Pore-Free Quartz Crucibles
JP6759020B2 (en) * 2016-09-08 2020-09-23 グローバルウェーハズ・ジャパン株式会社 Silicon single crystal manufacturing method and quartz crucible for silicon single crystal manufacturing after modification treatment
SG11201811126SA (en) * 2016-09-23 2019-01-30 Sumco Corp Quartz glass crucible, manufacturing method thereof, and manufacturing method of silicon single crystal using quartz glass crucible

Also Published As

Publication number Publication date
TW201943663A (en) 2019-11-16
EP3778996A4 (en) 2021-12-15
WO2019193851A1 (en) 2019-10-10
US20210108329A1 (en) 2021-04-15
JP7141844B2 (en) 2022-09-26
KR20200140815A (en) 2020-12-16
JP2019182697A (en) 2019-10-24
CN111936678A (en) 2020-11-13
US11629429B2 (en) 2023-04-18
EP3778996A1 (en) 2021-02-17
TWI795534B (en) 2023-03-11
CN111936678B (en) 2023-03-31

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