SG11202005133WA - Bridging front opening unified pod (foup) - Google Patents

Bridging front opening unified pod (foup)

Info

Publication number
SG11202005133WA
SG11202005133WA SG11202005133WA SG11202005133WA SG11202005133WA SG 11202005133W A SG11202005133W A SG 11202005133WA SG 11202005133W A SG11202005133W A SG 11202005133WA SG 11202005133W A SG11202005133W A SG 11202005133WA SG 11202005133W A SG11202005133W A SG 11202005133WA
Authority
SG
Singapore
Prior art keywords
foup
front opening
opening unified
unified pod
bridging front
Prior art date
Application number
SG11202005133WA
Inventor
Karrthik Parathithasan
Fang Jie Lim
Sriskantharajah Thirunavukarasu
Eng Sheng Peh
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG11202005133WA publication Critical patent/SG11202005133WA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67184—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Handcart (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • External Artificial Organs (AREA)
  • Telephone Function (AREA)
SG11202005133WA 2018-02-06 2019-02-04 Bridging front opening unified pod (foup) SG11202005133WA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862626762P 2018-02-06 2018-02-06
US15/956,481 US10504762B2 (en) 2018-02-06 2018-04-18 Bridging front opening unified pod (FOUP)
PCT/US2019/016468 WO2019156918A1 (en) 2018-02-06 2019-02-04 Bridging front opening unified pod (foup)

Publications (1)

Publication Number Publication Date
SG11202005133WA true SG11202005133WA (en) 2020-08-28

Family

ID=67477001

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202005133WA SG11202005133WA (en) 2018-02-06 2019-02-04 Bridging front opening unified pod (foup)

Country Status (7)

Country Link
US (1) US10504762B2 (en)
KR (1) KR102435852B1 (en)
CN (1) CN111557042A (en)
PH (1) PH12020550855A1 (en)
SG (1) SG11202005133WA (en)
TW (1) TWI816745B (en)
WO (1) WO2019156918A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210296149A1 (en) * 2020-03-23 2021-09-23 Applied Materials, Inc. Enclosure system shelf
USD954769S1 (en) * 2020-06-02 2022-06-14 Applied Materials, Inc. Enclosure system shelf
KR102649714B1 (en) * 2020-10-27 2024-03-21 세메스 주식회사 Apparatus for treating substrate and method for transffering substrate
US20220344185A1 (en) * 2021-04-22 2022-10-27 Taiwan Semiconductor Manufacturing Company, Ltd. Calibration pod for robotic wafer carrier handling and calibration performed using same

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0135049B1 (en) 1994-05-31 1998-04-20 양승택 Wafer cassette for semiconductor fabrication
US20050188923A1 (en) * 1997-08-11 2005-09-01 Cook Robert C. Substrate carrier for parallel wafer processing reactor
US6419438B1 (en) * 2000-11-28 2002-07-16 Asyst Technologies, Inc. FIMS interface without alignment pins
US20020187024A1 (en) 2001-06-12 2002-12-12 Applied Materials, Inc. Apparatus for storing and moving a carrier
WO2003021642A2 (en) 2001-08-31 2003-03-13 Applied Materials, Inc. Method and apparatus for processing a wafer
US6955197B2 (en) 2002-08-31 2005-10-18 Applied Materials, Inc. Substrate carrier having door latching and substrate clamping mechanisms
US6781205B1 (en) * 2002-10-11 2004-08-24 Ion Systems, Inc. Electrostatic charge measurement on semiconductor wafers
US6899145B2 (en) * 2003-03-20 2005-05-31 Asm America, Inc. Front opening unified pod
US7891937B2 (en) 2003-06-02 2011-02-22 Texas Instruments Incorporated Adjustable width cassette for wafer film frames
US7207766B2 (en) * 2003-10-20 2007-04-24 Applied Materials, Inc. Load lock chamber for large area substrate processing system
EP1705972A4 (en) 2004-04-28 2010-05-19 Ibiden Co Ltd Multilayer printed wiring board
JP4509669B2 (en) * 2004-06-29 2010-07-21 東京エレクトロン株式会社 Loading mechanism and method for carrying out object to be processed
US7409263B2 (en) 2004-07-14 2008-08-05 Applied Materials, Inc. Methods and apparatus for repositioning support for a substrate carrier
JP2007123673A (en) * 2005-10-31 2007-05-17 Asyst Shinko Inc Vibration-proof mechanism for article storage container
TW200822269A (en) * 2006-07-10 2008-05-16 Asyst Technologies Variable lot size load port
WO2008008739A2 (en) * 2006-07-10 2008-01-17 Asyst Technologies, Inc. Variable lot size load port
US20080216077A1 (en) 2007-03-02 2008-09-04 Applied Materials, Inc. Software sequencer for integrated substrate processing system
JP5532796B2 (en) * 2009-09-29 2014-06-25 凸版印刷株式会社 Glass substrate storage tray
JP5541726B2 (en) 2010-11-08 2014-07-09 信越ポリマー株式会社 Substrate storage container
JP2014513442A (en) * 2011-05-03 2014-05-29 インテグリス・インコーポレーテッド Wafer container with particle shield
TWI431712B (en) * 2011-09-20 2014-03-21 Gudeng Prec Ind Co Ltd Large-sized front opening unified wafer pod
TWI473752B (en) * 2011-12-13 2015-02-21 Gudeng Prec Ind Co Ltd Latch structure of a large-sized front opening unified wafer pod
JP2014007344A (en) * 2012-06-26 2014-01-16 Disco Abrasive Syst Ltd Housing cassette
US9385017B2 (en) 2012-08-06 2016-07-05 Nordson Corporation Apparatus and methods for handling workpieces of different sizes
KR20140092548A (en) * 2013-01-16 2014-07-24 삼성전자주식회사 Apparatus for keeping wafers
JP6148025B2 (en) * 2013-02-04 2017-06-14 株式会社Ｓｃｒｅｅｎホールディングス Delivery position teaching method, delivery position teaching apparatus, and substrate processing apparatus
KR102223033B1 (en) * 2014-04-29 2021-03-04 삼성전자주식회사 wafer storage container
US20150332950A1 (en) 2014-05-16 2015-11-19 Applied Materials, Inc. On-end effector magnetic wafer carrier alignment
US9412619B2 (en) 2014-08-12 2016-08-09 Applied Materials, Inc. Method of outgassing a mask material deposited over a workpiece in a process tool
US10347516B2 (en) * 2014-11-11 2019-07-09 Applied Materials, Inc. Substrate transfer chamber
US10566226B2 (en) * 2014-11-11 2020-02-18 Applied Materials, Inc. Multi-cassette carrying case
US9881820B2 (en) * 2015-10-22 2018-01-30 Lam Research Corporation Front opening ring pod
US10535541B2 (en) 2015-12-29 2020-01-14 Taiwan Semiconductor Manufacturing Co., Ltd. Adaptive inset for wafer cassette system

Also Published As

Publication number Publication date
KR102435852B1 (en) 2022-08-24
CN111557042A (en) 2020-08-18
WO2019156918A1 (en) 2019-08-15
PH12020550855A1 (en) 2021-05-17
KR20200108091A (en) 2020-09-16
US10504762B2 (en) 2019-12-10
US20190244845A1 (en) 2019-08-08
TW201937641A (en) 2019-09-16
TWI816745B (en) 2023-10-01

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