SG11202001758XA - Linear module and operating method thereof - Google Patents

Linear module and operating method thereof

Info

Publication number
SG11202001758XA
SG11202001758XA SG11202001758XA SG11202001758XA SG11202001758XA SG 11202001758X A SG11202001758X A SG 11202001758XA SG 11202001758X A SG11202001758X A SG 11202001758XA SG 11202001758X A SG11202001758X A SG 11202001758XA SG 11202001758X A SG11202001758X A SG 11202001758XA
Authority
SG
Singapore
Prior art keywords
operating method
linear module
linear
module
operating
Prior art date
Application number
SG11202001758XA
Inventor
Gang Wang
Junpeng Chen
Dongliang Huang
Original Assignee
Shanghai Micro Electronics Equipment Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Group Co Ltd filed Critical Shanghai Micro Electronics Equipment Group Co Ltd
Publication of SG11202001758XA publication Critical patent/SG11202001758XA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/02—Gearboxes; Mounting gearing therein
    • F16H57/029—Gearboxes; Mounting gearing therein characterised by means for sealing the gearboxes, e.g. to improve airtightness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
    • F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
    • F16H19/06—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/2015—Means specially adapted for stopping actuators in the end position; Position sensing means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H25/2418—Screw seals, wipers, scrapers or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/02—Gearboxes; Mounting gearing therein
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/02—Gearboxes; Mounting gearing therein
    • F16H57/031—Gearboxes; Mounting gearing therein characterised by covers or lids for gearboxes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3284—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings characterised by their structure; Selection of materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2031—Actuator casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/204—Axial sliding means, i.e. for rotary support and axial guiding of nut or screw shaft

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Transmission Devices (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Pulleys (AREA)
SG11202001758XA 2017-08-31 2018-08-30 Linear module and operating method thereof SG11202001758XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710776008.0A CN109424709B (en) 2017-08-31 2017-08-31 Linear module and working method thereof
PCT/CN2018/103135 WO2019042338A1 (en) 2017-08-31 2018-08-30 Linear module and operating method thereof

Publications (1)

Publication Number Publication Date
SG11202001758XA true SG11202001758XA (en) 2020-03-30

Family

ID=65504829

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202001758XA SG11202001758XA (en) 2017-08-31 2018-08-30 Linear module and operating method thereof

Country Status (7)

Country Link
US (1) US11326685B2 (en)
JP (1) JP6986139B2 (en)
KR (1) KR102386019B1 (en)
CN (1) CN109424709B (en)
SG (1) SG11202001758XA (en)
TW (1) TWI681136B (en)
WO (1) WO2019042338A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112664560B (en) * 2021-01-04 2024-04-02 航天信息股份有限公司 Dustproof sealing structure
CN114396466A (en) * 2022-01-19 2022-04-26 南京陇博智能科技有限公司 Dustproof device of transmission mechanism in groove-shaped structure
CN117537051A (en) * 2023-10-23 2024-02-09 广东亚盈铝业有限公司 Closed straight line module

Family Cites Families (24)

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US3730007A (en) * 1969-12-30 1973-05-01 Honeywell Inc Rolamite
US4545290A (en) * 1983-12-23 1985-10-08 Tol-O-Matic, Inc. Pressure cylinder
FR2659889B1 (en) * 1990-03-22 1995-05-12 Coron Jean Paul SEALING DEVICE FOR A LINEAR GUIDE MODULE FOR THE TRANSLATION AND HANDLING OF ALL PARTS AND ACCESSORIES.
JPH05106703A (en) 1991-10-16 1993-04-27 I N R Kenkyusho:Kk Friction drive feeding device
FR2684034B1 (en) * 1991-11-26 1996-03-29 Coron Jean Paul LINEAR GUIDE MODULE FOR THE TRANSLATION AND HANDLING OF ALL PARTS AND ACCESSORIES.
US5601177A (en) * 1994-06-17 1997-02-11 Royal Vendors, Inc. Tamper-resistant vending machine
US5590850A (en) * 1995-06-05 1997-01-07 Hughes Missile Systems Company Blended missile autopilot
US6857780B2 (en) * 2002-11-15 2005-02-22 Phd, Inc. Rodless slide assembly
CN101802455B (en) * 2007-09-13 2012-07-04 Thk株式会社 Linear actuator with dustproof mechanism
DE112008002487T5 (en) * 2007-09-14 2010-08-19 Thk Co., Ltd. Sealed linear actuator unit
JP5465017B2 (en) 2009-06-19 2014-04-09 黒田精工株式会社 Linear motion device
JP4769899B2 (en) * 2010-01-15 2011-09-07 Ｔｈｋ株式会社 Linear actuator with dustproof mechanism
JP5683981B2 (en) 2011-02-01 2015-03-11 ヤマハ発動機株式会社 robot
JP5763966B2 (en) * 2011-05-12 2015-08-12 日本トムソン株式会社 Actuator for clean environment
KR200471406Y1 (en) 2013-09-12 2014-02-21 서동희 axis support
CN204035563U (en) * 2014-03-20 2014-12-24 上海航天设备制造总厂 Metal molten 3 D-printing high rigidity power spreading device and paving powder system thereof
CN104518602B (en) * 2015-01-22 2017-07-14 温州纳米克自动化科技有限公司 Sealed electric cylinder
CN204872552U (en) * 2015-03-12 2015-12-16 天津海特传动机械有限公司 Novel linear module HTBS series
CN205036807U (en) * 2015-03-12 2016-02-17 天津海特传动机械有限公司 Novel linear module
CN105082126B (en) * 2015-09-02 2016-07-13 浙江斯凯瑞机器人股份有限公司 The totally-enclosed right angle coordinate manipulator of high-speed silent
CN204913892U (en) * 2015-09-02 2015-12-30 浙江斯凯瑞机器人股份有限公司 Totally closed rectangular coordinate manipulator
CN206092696U (en) * 2016-08-28 2017-04-12 江门市天功自动化科技有限公司 Sealed integral sharp module
CN206326440U (en) * 2016-12-01 2017-07-14 东莞市汉翔机械设备有限公司 A kind of complete close dust-proof flat structure of slide unit cylinder
CN109915484B (en) * 2017-12-13 2020-08-14 上银科技股份有限公司 Linear module

Also Published As

Publication number Publication date
CN109424709B (en) 2022-02-15
JP2020531768A (en) 2020-11-05
US11326685B2 (en) 2022-05-10
WO2019042338A1 (en) 2019-03-07
CN109424709A (en) 2019-03-05
TWI681136B (en) 2020-01-01
KR20200038995A (en) 2020-04-14
KR102386019B1 (en) 2022-04-14
JP6986139B2 (en) 2021-12-22
US20200347926A1 (en) 2020-11-05
TW201912976A (en) 2019-04-01

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