SG11202000813VA - Alumina sintered body, method for manufacturing the same, and part for semiconductor manufacturing apparatus - Google Patents
Alumina sintered body, method for manufacturing the same, and part for semiconductor manufacturing apparatusInfo
- Publication number
- SG11202000813VA SG11202000813VA SG11202000813VA SG11202000813VA SG11202000813VA SG 11202000813V A SG11202000813V A SG 11202000813VA SG 11202000813V A SG11202000813V A SG 11202000813VA SG 11202000813V A SG11202000813V A SG 11202000813VA SG 11202000813V A SG11202000813V A SG 11202000813VA
- Authority
- SG
- Singapore
- Prior art keywords
- same
- sintered body
- alumina sintered
- manufacturing
- manufacturing apparatus
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
- C04B35/117—Composites
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62695—Granulation or pelletising
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3239—Vanadium oxides, vanadates or oxide forming salts thereof, e.g. magnesium vanadate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
- C04B2235/3255—Niobates or tantalates, e.g. silver niobate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/76—Crystal structural characteristics, e.g. symmetry
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/95—Products characterised by their size, e.g. microceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9669—Resistance against chemicals, e.g. against molten glass or molten salts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017148815 | 2017-08-01 | ||
PCT/JP2018/028547 WO2019026871A1 (en) | 2017-08-01 | 2018-07-31 | Alumina sintered compact, method of manufacturing same, and component for semiconductor manufacturing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202000813VA true SG11202000813VA (en) | 2020-02-27 |
Family
ID=65233876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202000813VA SG11202000813VA (en) | 2017-08-01 | 2018-07-31 | Alumina sintered body, method for manufacturing the same, and part for semiconductor manufacturing apparatus |
Country Status (8)
Country | Link |
---|---|
US (1) | US11306029B2 (en) |
EP (1) | EP3659990A4 (en) |
JP (1) | JP6943963B2 (en) |
KR (1) | KR102370459B1 (en) |
CN (1) | CN111164060B (en) |
SG (1) | SG11202000813VA (en) |
TW (2) | TWI778471B (en) |
WO (1) | WO2019026871A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102320333B1 (en) | 2021-05-25 | 2021-11-03 | (주)케이디엠씨 | Manufacturing Method for Middle or Large-sized Ceramic Parts of Plasma Enhanced Chemical Vapor Deposition Equipment and Middle or Large-sized Ceramic Parts |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3029488B2 (en) | 1991-05-16 | 2000-04-04 | 東芝セラミックス株式会社 | Plasma discharge member |
JP3559303B2 (en) | 1994-02-28 | 2004-09-02 | 京セラ株式会社 | Ceramic guide member |
JP3036367B2 (en) | 1994-08-19 | 2000-04-24 | 住友金属工業株式会社 | Alumina porcelain composition |
JP3102318B2 (en) | 1995-10-06 | 2000-10-23 | 住友金属工業株式会社 | Manufacturing method of microwave introduction window made of alumina |
JP2001072462A (en) | 1999-06-29 | 2001-03-21 | Hitachi Metals Ltd | Alumina ceramic composition |
JP2003112963A (en) * | 2001-09-28 | 2003-04-18 | Ngk Spark Plug Co Ltd | Alumina sintered compact, and production method therefor |
US20070298245A1 (en) * | 2006-06-23 | 2007-12-27 | Denso Corporation | Alumina composite sintered body, evaluation method thereof and spark plug |
JP5361141B2 (en) | 2007-04-24 | 2013-12-04 | 京セラ株式会社 | Plasma processing apparatus member and plasma processing apparatus using the same |
JP5657776B2 (en) | 2011-03-11 | 2015-01-21 | サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド | Refractory, glass overflow molding block, and method for producing glass body |
JP5775544B2 (en) | 2013-05-09 | 2015-09-09 | 日本特殊陶業株式会社 | Spark plug insulator and spark plug |
JP2015125896A (en) | 2013-12-26 | 2015-07-06 | 京セラ株式会社 | Alumina sintered compact and electrostatic deflector including the same |
JP6352686B2 (en) | 2014-01-30 | 2018-07-04 | 京セラ株式会社 | Alumina sintered body, semiconductor manufacturing apparatus member, and liquid crystal panel manufacturing apparatus member |
JP6649959B2 (en) * | 2015-09-30 | 2020-02-19 | 日本碍子株式会社 | Manufacturing method of transparent alumina sintered body |
JP6877586B2 (en) * | 2017-12-27 | 2021-05-26 | 昭和電工株式会社 | Precursor of alumina sintered body, manufacturing method of alumina sintered body, manufacturing method of abrasive grains and alumina sintered body |
-
2018
- 2018-07-31 WO PCT/JP2018/028547 patent/WO2019026871A1/en unknown
- 2018-07-31 SG SG11202000813VA patent/SG11202000813VA/en unknown
- 2018-07-31 KR KR1020207005946A patent/KR102370459B1/en active IP Right Grant
- 2018-07-31 EP EP18841080.7A patent/EP3659990A4/en active Pending
- 2018-07-31 CN CN201880050146.3A patent/CN111164060B/en active Active
- 2018-07-31 US US16/635,937 patent/US11306029B2/en active Active
- 2018-07-31 JP JP2019534517A patent/JP6943963B2/en active Active
- 2018-08-01 TW TW109144073A patent/TWI778471B/en active
- 2018-08-01 TW TW107126636A patent/TWI715857B/en active
Also Published As
Publication number | Publication date |
---|---|
JP6943963B2 (en) | 2021-10-06 |
US11306029B2 (en) | 2022-04-19 |
TWI715857B (en) | 2021-01-11 |
WO2019026871A1 (en) | 2019-02-07 |
KR20200052876A (en) | 2020-05-15 |
CN111164060A (en) | 2020-05-15 |
TW202114966A (en) | 2021-04-16 |
CN111164060B (en) | 2022-07-19 |
TWI778471B (en) | 2022-09-21 |
US20200239368A1 (en) | 2020-07-30 |
EP3659990A1 (en) | 2020-06-03 |
EP3659990A4 (en) | 2021-04-14 |
JPWO2019026871A1 (en) | 2020-08-06 |
KR102370459B1 (en) | 2022-03-04 |
TW201910291A (en) | 2019-03-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP3422393A4 (en) | Semiconductor device, and manufacturing method for same | |
PT3339023T (en) | Laminate, method for manufacturing the laminate, semiconductor device, and method for manufacturing the semiconductor device | |
SG10201608814YA (en) | Semiconductor device and method for manufacturing the semiconductor device | |
SG11201610089QA (en) | Silicon nitride powder, silicon nitride sintered body and circuit substrate, and production method for said silicon nitride powder | |
TWI562282B (en) | Integrated circuit structure and method for manufacturing the same | |
EP3412642A4 (en) | Method for producing ceramic sintered body, and method and device for producing ceramic molded body | |
GB2573215B (en) | Semiconductor manufacturing method and semiconductor manufacturing device | |
PL3462081T3 (en) | Optical body, method for manufacturing optical body, and light-emitting apparatus | |
SG10201608558XA (en) | Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding device | |
EP3389082A4 (en) | Method for manufacturing silicon carbide semiconductor device, method for manufacturing semiconductor base body, silicon carbide semiconductor device, and apparatus for manufacturing silicon carbide semiconductor device | |
EP3613718A4 (en) | Sintered body, board, circuit board, and method for manufacturing sintered body | |
EP3541752A4 (en) | Nanocrystalline alpha alumina (&-ai203) and method for making the same | |
GB202018847D0 (en) | Nozzel, drying device, and method for producing can body | |
GB2552312B (en) | Ceramic objects and methods for manufacturing the same | |
EP3425258A4 (en) | Structure body, and method for manufacturing structure body | |
EP3702091A4 (en) | Machining device, and moving body manufacturing method | |
TWI562336B (en) | Semiconductor structure and method for manufacturing the same | |
GB2567619B (en) | Pneumatic device and method for manufacturing the same | |
EP3715867A4 (en) | Semiconductor component, assembled body, and method for manufacturing semiconductor component | |
PL3484782T3 (en) | Shelf-ready package and method for manufacturing the same | |
GB201719387D0 (en) | Semiconductor device, and method for manufacturing same | |
SG11202000813VA (en) | Alumina sintered body, method for manufacturing the same, and part for semiconductor manufacturing apparatus | |
EP3683167A4 (en) | Bag body, and manufacturing method and manufacturing device for bag body | |
EP3663020A4 (en) | Method for manufacturing sintered component, and sintered component | |
EP3471136A4 (en) | Semiconductor device, and method for manufacturing same |