SG11201705526RA - Horizontal coupling to silicon waveguides - Google Patents

Horizontal coupling to silicon waveguides

Info

Publication number
SG11201705526RA
SG11201705526RA SG11201705526RA SG11201705526RA SG11201705526RA SG 11201705526R A SG11201705526R A SG 11201705526RA SG 11201705526R A SG11201705526R A SG 11201705526RA SG 11201705526R A SG11201705526R A SG 11201705526RA SG 11201705526R A SG11201705526R A SG 11201705526RA
Authority
SG
Singapore
Prior art keywords
horizontal coupling
silicon waveguides
waveguides
silicon
coupling
Prior art date
Application number
SG11201705526RA
Other languages
English (en)
Inventor
Long Chen
Original Assignee
Acacia Communications Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Acacia Communications Inc filed Critical Acacia Communications Inc
Publication of SG11201705526RA publication Critical patent/SG11201705526RA/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/14—Mode converters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12152—Mode converter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
SG11201705526RA 2015-01-08 2016-01-08 Horizontal coupling to silicon waveguides SG11201705526RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562101046P 2015-01-08 2015-01-08
PCT/US2016/012657 WO2016112296A1 (fr) 2015-01-08 2016-01-08 Couplage horizontal à des guides d'ondes en silicium

Publications (1)

Publication Number Publication Date
SG11201705526RA true SG11201705526RA (en) 2017-08-30

Family

ID=55221556

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201705526RA SG11201705526RA (en) 2015-01-08 2016-01-08 Horizontal coupling to silicon waveguides

Country Status (5)

Country Link
US (2) US10031292B2 (fr)
CN (1) CN107111064B (fr)
DE (1) DE112016000309T5 (fr)
SG (1) SG11201705526RA (fr)
WO (1) WO2016112296A1 (fr)

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US10031292B2 (en) * 2015-01-08 2018-07-24 Acacia Communications, Inc. Horizontal coupling to silicon waveguides
US10571633B1 (en) 2016-12-23 2020-02-25 Acacia Communications, Inc. Suspended cantilever waveguide
US10416381B1 (en) 2016-12-23 2019-09-17 Acacia Communications, Inc. Spot-size-converter design for facet optical coupling
US10746923B2 (en) 2018-06-27 2020-08-18 Taiwan Semiconductor Manufacturing Company, Ltd. Photonic semiconductor device and method
US11067750B2 (en) * 2019-01-28 2021-07-20 Cisco Technology, Inc. Silicon photonics platform with integrated oxide trench edge coupler structure
US11262500B2 (en) * 2019-12-02 2022-03-01 Renesas Electronics Corporation Semiconductor device and including an optical waveguide and method of manufacturing the same
US11906777B2 (en) * 2020-02-21 2024-02-20 Intel Corporation Integrated photonic transceiver
US11556020B1 (en) 2020-07-29 2023-01-17 Acacia Communications, Inc. Integrated wavelength selector
US11552710B2 (en) 2020-08-17 2023-01-10 Acacia Communications, Inc. Resistivity engineered substrate for RF common-mode suppression
US11860421B2 (en) * 2020-11-13 2024-01-02 Taiwan Semiconductor Manufacturing Co., Ltd. Multi-tip optical coupling devices
US11860414B2 (en) * 2020-12-30 2024-01-02 Globalfoundries U.S. Inc. Edge couplers including a grooved membrane
GB2613019A (en) * 2021-11-22 2023-05-24 Ligentec Sa Optical coupler

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US6293688B1 (en) * 1999-11-12 2001-09-25 Sparkolor Corporation Tapered optical waveguide coupler
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Also Published As

Publication number Publication date
WO2016112296A1 (fr) 2016-07-14
US10031292B2 (en) 2018-07-24
US10295750B2 (en) 2019-05-21
CN107111064A (zh) 2017-08-29
CN107111064B (zh) 2020-09-22
US20160202421A1 (en) 2016-07-14
US20180341065A1 (en) 2018-11-29
DE112016000309T5 (de) 2017-09-28

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