SG11201705485RA - Device for the extraction of electrical charge carriers from a charge carrier generation space and method for operating such a device - Google Patents

Device for the extraction of electrical charge carriers from a charge carrier generation space and method for operating such a device

Info

Publication number
SG11201705485RA
SG11201705485RA SG11201705485RA SG11201705485RA SG11201705485RA SG 11201705485R A SG11201705485R A SG 11201705485RA SG 11201705485R A SG11201705485R A SG 11201705485RA SG 11201705485R A SG11201705485R A SG 11201705485RA SG 11201705485R A SG11201705485R A SG 11201705485RA
Authority
SG
Singapore
Prior art keywords
extraction
operating
carrier generation
generation space
charge carriers
Prior art date
Application number
SG11201705485RA
Inventor
Joachim Mai
Alfonz Luca
Margit Sarstedt
Original Assignee
Meyer Burger (Germany) Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meyer Burger (Germany) Ag filed Critical Meyer Burger (Germany) Ag
Publication of SG11201705485RA publication Critical patent/SG11201705485RA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H01J27/024—Extraction optics, e.g. grids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/065—Source emittance characteristics
    • H01J2237/0653—Intensity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/065—Source emittance characteristics
    • H01J2237/0656—Density
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/083—Beam forming
SG11201705485RA 2015-01-09 2016-01-06 Device for the extraction of electrical charge carriers from a charge carrier generation space and method for operating such a device SG11201705485RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP15150613.6A EP3043370A1 (en) 2015-01-09 2015-01-09 Device for the extraction of charged particles from a generation region and a method for operating such a device
PCT/EP2016/050121 WO2016110505A2 (en) 2015-01-09 2016-01-06 Device for the extraction of electrical charge carriers from a charge carrier generation space and method for operating such a device

Publications (1)

Publication Number Publication Date
SG11201705485RA true SG11201705485RA (en) 2017-08-30

Family

ID=52292798

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201705485RA SG11201705485RA (en) 2015-01-09 2016-01-06 Device for the extraction of electrical charge carriers from a charge carrier generation space and method for operating such a device

Country Status (7)

Country Link
US (1) US20180294135A1 (en)
EP (1) EP3043370A1 (en)
JP (1) JP2018501626A (en)
KR (1) KR101949921B1 (en)
CN (1) CN107112177B (en)
SG (1) SG11201705485RA (en)
WO (1) WO2016110505A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3309815B1 (en) * 2016-10-12 2019-03-20 Meyer Burger (Germany) AG Plasma treatment device with two microwave plasma sources coupled together and method for operating such a plasma treatment device
JP7029633B2 (en) * 2018-02-09 2022-03-04 日新イオン機器株式会社 Ion source, ion implanter

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55122342A (en) * 1979-03-16 1980-09-20 Hitachi Ltd Lead-out electrode structure of ion source
US4523971A (en) 1984-06-28 1985-06-18 International Business Machines Corporation Programmable ion beam patterning system
JPS61225737A (en) * 1985-03-29 1986-10-07 Hitachi Ltd Ion source electrode
US4758304A (en) 1987-03-20 1988-07-19 Mcneil John R Method and apparatus for ion etching and deposition
JPH04101326A (en) * 1990-08-20 1992-04-02 Toshiba Corp Ion source
JP3585512B2 (en) * 1993-09-14 2004-11-04 株式会社東芝 Microwave plasma generator
DE102004002508B4 (en) 2004-01-17 2009-04-02 Leibniz-Institut für Oberflächenmodifizierung e.V. Arrangement for controlling and regulating the ion beam profile of Breitenstrahlquellen by clocked beamlet control
JP4048254B2 (en) * 2004-09-30 2008-02-20 株式会社昭和真空 Ion gun and frequency adjustment device for piezoelectric element using the same
JP2008305666A (en) * 2007-06-07 2008-12-18 Nissin Ion Equipment Co Ltd Ion implanting device
JP6015623B2 (en) * 2013-10-21 2016-10-26 株式会社島津製作所 Ion mobility spectrometer

Also Published As

Publication number Publication date
EP3043370A1 (en) 2016-07-13
KR20170104558A (en) 2017-09-15
WO2016110505A3 (en) 2016-09-15
KR101949921B1 (en) 2019-02-19
CN107112177B (en) 2019-03-12
JP2018501626A (en) 2018-01-18
US20180294135A1 (en) 2018-10-11
WO2016110505A2 (en) 2016-07-14
CN107112177A (en) 2017-08-29

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