SG11201701748WA - Mems having micromechanical piezoelectric actuators for realizing high forces and deflections - Google Patents
Mems having micromechanical piezoelectric actuators for realizing high forces and deflectionsInfo
- Publication number
- SG11201701748WA SG11201701748WA SG11201701748WA SG11201701748WA SG11201701748WA SG 11201701748W A SG11201701748W A SG 11201701748WA SG 11201701748W A SG11201701748W A SG 11201701748WA SG 11201701748W A SG11201701748W A SG 11201701748WA SG 11201701748W A SG11201701748W A SG 11201701748WA
- Authority
- SG
- Singapore
- Prior art keywords
- deflections
- mems
- piezoelectric actuators
- realizing high
- high forces
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R29/00—Monitoring arrangements; Testing arrangements
- H04R29/001—Monitoring arrangements; Testing arrangements for loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R3/00—Circuits for transducers, loudspeakers or microphones
- H04R3/002—Damping circuit arrangements for transducers, e.g. motional feedback circuits
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Micromachines (AREA)
- Circuit For Audible Band Transducer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014217798.7A DE102014217798A1 (en) | 2014-09-05 | 2014-09-05 | Micromechanical piezoelectric actuators for realizing high forces and deflections |
| PCT/EP2015/070124 WO2016034665A1 (en) | 2014-09-05 | 2015-09-03 | Mems having micromechanical piezoelectric actuators for realizing high forces and deflections |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201701748WA true SG11201701748WA (en) | 2017-04-27 |
Family
ID=54064328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201701748WA SG11201701748WA (en) | 2014-09-05 | 2015-09-03 | Mems having micromechanical piezoelectric actuators for realizing high forces and deflections |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US10349182B2 (en) |
| EP (1) | EP3100467B1 (en) |
| KR (1) | KR102033228B1 (en) |
| CN (1) | CN107005769B (en) |
| AU (1) | AU2015310896B9 (en) |
| CA (1) | CA2960072C (en) |
| DE (1) | DE102014217798A1 (en) |
| SG (1) | SG11201701748WA (en) |
| TW (1) | TWI595738B (en) |
| WO (1) | WO2016034665A1 (en) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3192770B1 (en) * | 2016-01-12 | 2019-07-17 | TRUMPF Schweiz AG | Device for two-dimensional deflection of a laser beam |
| DE102016121587B4 (en) * | 2016-11-10 | 2023-06-01 | Pi Ceramic Gmbh | Piezoelectric drive, especially for use in humid environments |
| DE102017200111B3 (en) * | 2017-01-05 | 2018-03-15 | Robert Bosch Gmbh | Micromechanical sound transducer arrangement and corresponding production method |
| DE102017209470B3 (en) * | 2017-06-06 | 2018-11-22 | Robert Bosch Gmbh | Micromechanical device and method for generating mechanical vibrations |
| DE102017125117A1 (en) * | 2017-10-26 | 2019-05-02 | USound GmbH | Transducer array |
| US11594574B2 (en) * | 2018-02-16 | 2023-02-28 | International Business Machines Corporation | Piezo-junction device |
| IT201800004758A1 (en) * | 2018-04-20 | 2019-10-20 | PIEZOELECTRIC MEMS ACOUSTIC TRANSDUCER AND RELATED MANUFACTURING PROCEDURE | |
| EP3790838B1 (en) * | 2018-06-26 | 2024-07-10 | Huawei Technologies Co., Ltd. | 2 degree-of-freedom actuator and mems device |
| TWI707586B (en) * | 2018-08-14 | 2020-10-11 | 美律實業股份有限公司 | Mems speaker |
| TWI684367B (en) * | 2018-09-14 | 2020-02-01 | 美律實業股份有限公司 | Speaker and microelectromechanical actuator thereof |
| DE102019201744B4 (en) | 2018-12-04 | 2020-06-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | MEMS SOUND CONVERTER |
| IT201900001017A1 (en) * | 2019-01-23 | 2020-07-23 | St Microelectronics Srl | MICROELECTROMECHANICAL ELECTROACOUSTIC TRANSDUCER WITH PIEZOELECTRIC ACTUATION AND RELATED MANUFACTURING PROCEDURE |
| DE102019205735B3 (en) * | 2019-04-18 | 2020-08-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Micromechanical sound transducer |
| IT201900007317A1 (en) * | 2019-05-27 | 2020-11-27 | St Microelectronics Srl | MICROELECTROMECHANICAL PIEZOELECTRIC ACOUSTIC TRANSDUCER WITH IMPROVED CHARACTERISTICS AND RELATED MANUFACTURING PROCESS |
| US10805751B1 (en) * | 2019-09-08 | 2020-10-13 | xMEMS Labs, Inc. | Sound producing device |
| DE102019218769A1 (en) * | 2019-12-03 | 2020-11-19 | Robert Bosch Gmbh | Micromechanical component for an actuator and / or sensor device |
| US11057716B1 (en) * | 2019-12-27 | 2021-07-06 | xMEMS Labs, Inc. | Sound producing device |
| US11395073B2 (en) | 2020-04-18 | 2022-07-19 | xMEMS Labs, Inc. | Sound producing package structure and method for packaging sound producing package structure |
| US11252511B2 (en) | 2019-12-27 | 2022-02-15 | xMEMS Labs, Inc. | Package structure and methods of manufacturing sound producing chip, forming package structure and forming sound producing apparatus |
| WO2021134665A1 (en) * | 2019-12-31 | 2021-07-08 | 瑞声声学科技(深圳)有限公司 | Mems speaker and manufacturing method therefor |
| CN111180573B (en) * | 2020-01-07 | 2022-01-18 | 中国科学院声学研究所 | Preparation method of cross-shaped plate-shaped MEMS piezoelectric directional sensing chip |
| IT202000015073A1 (en) | 2020-06-23 | 2021-12-23 | St Microelectronics Srl | MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER |
| US11972749B2 (en) | 2020-07-11 | 2024-04-30 | xMEMS Labs, Inc. | Wearable sound device |
| US11399228B2 (en) | 2020-07-11 | 2022-07-26 | xMEMS Labs, Inc. | Acoustic transducer, wearable sound device and manufacturing method of acoustic transducer |
| US12028673B2 (en) | 2020-07-11 | 2024-07-02 | xMEMS Labs, Inc. | Driving circuit and wearable sound device thereof |
| US11884535B2 (en) | 2020-07-11 | 2024-01-30 | xMEMS Labs, Inc. | Device, package structure and manufacturing method of device |
| US12022253B2 (en) * | 2020-07-11 | 2024-06-25 | xMEMS Labs, Inc. | Venting device |
| US11323797B2 (en) * | 2020-07-11 | 2022-05-03 | xMEMS Labs, Inc. | Acoustic transducer, wearable sound device and manufacturing method of acoustic transducer |
| CN112187095B (en) * | 2020-09-25 | 2021-11-02 | 长安大学 | Bidirectional telescopic actuator based on inverse flexoelectric effect and actuating method |
| KR20220091082A (en) * | 2020-12-23 | 2022-06-30 | 엘지디스플레이 주식회사 | Sound generating module and vehicle comprising the same |
| FR3120176B1 (en) * | 2021-02-23 | 2023-11-03 | Commissariat Energie Atomique | MEMS loudspeaker and process for microfabrication of such a loudspeaker |
| DE102021201784A1 (en) | 2021-02-25 | 2022-08-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | MEMS transducer array |
| DE102021203360A1 (en) | 2021-04-01 | 2022-10-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | MEMS SOUND TRANSDUCER |
| CN113132875A (en) * | 2021-04-25 | 2021-07-16 | 广州蜂鸟传感科技有限公司 | Self-calibration micromechanical loudspeaker |
| US11711653B2 (en) * | 2021-05-11 | 2023-07-25 | xMEMS Labs, Inc. | Sound producing cell and manufacturing method thereof |
| KR20230018953A (en) * | 2021-07-30 | 2023-02-07 | 엘지디스플레이 주식회사 | Vibration apparatus and apparatus comprising the same |
| CN116233710A (en) * | 2021-12-03 | 2023-06-06 | 悠声股份有限公司 | MEMS audio transducer with damping layer made of adhesive |
| US11930321B1 (en) * | 2022-05-17 | 2024-03-12 | Vibrant Microsystems Inc. | Integrated MEMS micro-speaker device and method |
| DE102022134733A1 (en) | 2022-12-23 | 2024-07-04 | USound GmbH | MEMS device with a connecting element |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59139799A (en) * | 1983-01-31 | 1984-08-10 | Sony Corp | Flat speaker |
| ATE393319T1 (en) * | 1998-09-03 | 2008-05-15 | Ge Novasensor Inc | PROPORTIONAL MICROMECHANICAL DEVICE |
| JP3552601B2 (en) * | 1998-11-16 | 2004-08-11 | 日本ビクター株式会社 | Optical deflector and display device using the same |
| DE60230673D1 (en) * | 2001-07-05 | 2009-02-12 | Ibm | MICROSYSTEMS SWITCH |
| US7089069B2 (en) | 2001-08-17 | 2006-08-08 | Carnegie Mellon University | Method and apparatus for reconstruction of soundwaves from digital signals |
| US7003125B2 (en) | 2001-09-12 | 2006-02-21 | Seung-Hwan Yi | Micromachined piezoelectric microspeaker and fabricating method thereof |
| US7116855B2 (en) * | 2004-06-30 | 2006-10-03 | Xerox Corporation | Optical shuttle system and method used in an optical switch |
| DE102005043429A1 (en) * | 2005-05-19 | 2006-11-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for vibration decoupling |
| JP4692739B2 (en) * | 2005-06-14 | 2011-06-01 | ソニー株式会社 | Movable element, and module and electronic device incorporating the movable element |
| EP2846557B1 (en) | 2007-11-21 | 2019-04-10 | Audio Pixels Ltd. | Improved speaker apparatus |
| JP5391600B2 (en) * | 2008-07-16 | 2014-01-15 | 船井電機株式会社 | Vibration mirror element |
| KR101562339B1 (en) | 2008-09-25 | 2015-10-22 | 삼성전자 주식회사 | Piezoelectric microspeaker and its fabrication method |
| JP5347473B2 (en) * | 2008-12-15 | 2013-11-20 | 船井電機株式会社 | Vibration mirror element |
| KR101561663B1 (en) * | 2009-08-31 | 2015-10-21 | 삼성전자주식회사 | Piezoelectric micro speaker having piston diaphragm and method of manufacturing the same |
| FR2955443B1 (en) | 2010-01-19 | 2012-03-23 | Univ Maine | ELECTRODYNAMIC SPEAKER STRUCTURE WITH MEMS TECHNOLOGY |
| FR2990320B1 (en) | 2012-05-07 | 2014-06-06 | Commissariat Energie Atomique | DIGITAL SPEAKER WITH IMPROVED PERFORMANCE |
| FR3000354B1 (en) * | 2012-12-20 | 2015-01-30 | Commissariat Energie Atomique | MEMBRANE DEVICE WITH CONTROLLED DISPLACEMENT |
| DE102013209234B4 (en) * | 2013-05-17 | 2018-04-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device with a vibratable suspended optical element |
-
2014
- 2014-09-05 DE DE102014217798.7A patent/DE102014217798A1/en not_active Ceased
-
2015
- 2015-09-03 WO PCT/EP2015/070124 patent/WO2016034665A1/en active Application Filing
- 2015-09-03 AU AU2015310896A patent/AU2015310896B9/en active Active
- 2015-09-03 SG SG11201701748WA patent/SG11201701748WA/en unknown
- 2015-09-03 KR KR1020177009059A patent/KR102033228B1/en active IP Right Grant
- 2015-09-03 CN CN201580060521.9A patent/CN107005769B/en active Active
- 2015-09-03 EP EP15759755.0A patent/EP3100467B1/en active Active
- 2015-09-03 CA CA2960072A patent/CA2960072C/en active Active
- 2015-09-04 TW TW104129364A patent/TWI595738B/en active
-
2017
- 2017-03-03 US US15/448,846 patent/US10349182B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CA2960072C (en) | 2020-07-21 |
| CN107005769A (en) | 2017-08-01 |
| TWI595738B (en) | 2017-08-11 |
| AU2015310896A1 (en) | 2017-04-27 |
| EP3100467B1 (en) | 2019-09-18 |
| US10349182B2 (en) | 2019-07-09 |
| AU2015310896B2 (en) | 2018-12-13 |
| EP3100467A1 (en) | 2016-12-07 |
| KR102033228B1 (en) | 2019-10-16 |
| US20170325030A1 (en) | 2017-11-09 |
| AU2015310896B9 (en) | 2019-04-18 |
| CN107005769B (en) | 2019-12-17 |
| WO2016034665A1 (en) | 2016-03-10 |
| DE102014217798A1 (en) | 2016-03-10 |
| KR20170054432A (en) | 2017-05-17 |
| TW201622335A (en) | 2016-06-16 |
| CA2960072A1 (en) | 2016-03-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| SG11201701748WA (en) | Mems having micromechanical piezoelectric actuators for realizing high forces and deflections | |
| HK1232365A1 (en) | Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom mems | |
| GB2533410B (en) | MEMS devices and processes | |
| GB2529134B (en) | Packaging for MEMS transducers | |
| EP3292078A4 (en) | Microelectromechanical systems (mems) and methods | |
| EP3186189A4 (en) | 3-dof mems piston-tube electrostatic microactuator | |
| GB201710737D0 (en) | Mems transducer package | |
| GB2549877B (en) | Mems transducer package | |
| GB201801387D0 (en) | Interated mems transducers | |
| EP3598147C0 (en) | Mechanical shock resistant mems accelerometer arrangement and associated method | |
| EP3297294A4 (en) | Mems microphone | |
| GB201706641D0 (en) | MEMS Device | |
| EP3153461A4 (en) | Mems device | |
| EP3500397A4 (en) | Sacrificial mechanical link | |
| EP3228584A4 (en) | Method for manufacturing mems torsional electrostatic actuator | |
| GB201706637D0 (en) | MEMS Device | |
| GB201704396D0 (en) | MEMS sensors | |
| EP3397584A4 (en) | Mems actuator structures resistant to shock | |
| GB2550298B (en) | Mems transducer package | |
| EP3161847A4 (en) | Integrated micro-electromechanical switches and a related method thereof | |
| EP3177038A4 (en) | Mems microphone | |
| GB2558008B (en) | MEMS device | |
| GB201420522D0 (en) | Electro-Mechanical actuators | |
| GB201720085D0 (en) | MEMS packaging | |
| GB201700804D0 (en) | Mems device |