SG11201607491UA - Micro-pirani vacuum gauges - Google Patents

Micro-pirani vacuum gauges

Info

Publication number
SG11201607491UA
SG11201607491UA SG11201607491UA SG11201607491UA SG11201607491UA SG 11201607491U A SG11201607491U A SG 11201607491UA SG 11201607491U A SG11201607491U A SG 11201607491UA SG 11201607491U A SG11201607491U A SG 11201607491UA SG 11201607491U A SG11201607491U A SG 11201607491UA
Authority
SG
Singapore
Prior art keywords
micro
vacuum gauges
pirani vacuum
pirani
gauges
Prior art date
Application number
SG11201607491UA
Inventor
Lei Gu
Stephen F Bart
Ole Wenzel
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of SG11201607491UA publication Critical patent/SG11201607491UA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
SG11201607491UA 2014-03-25 2015-02-13 Micro-pirani vacuum gauges SG11201607491UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/224,927 US9335231B2 (en) 2014-03-25 2014-03-25 Micro-Pirani vacuum gauges
PCT/US2015/015810 WO2015148005A2 (en) 2014-03-25 2015-02-13 Micro-pirani vacuum gauges

Publications (1)

Publication Number Publication Date
SG11201607491UA true SG11201607491UA (en) 2016-10-28

Family

ID=52682900

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201607491UA SG11201607491UA (en) 2014-03-25 2015-02-13 Micro-pirani vacuum gauges

Country Status (8)

Country Link
US (1) US9335231B2 (en)
EP (1) EP3123135A2 (en)
JP (1) JP6505743B2 (en)
KR (1) KR20160135731A (en)
CN (1) CN106104245B (en)
SG (1) SG11201607491UA (en)
TW (1) TWI534419B (en)
WO (1) WO2015148005A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9606074B2 (en) 2012-07-30 2017-03-28 Heinz Plöchinger Fluid property sensor with heat loss compensation and operating method thereof
US10436665B2 (en) 2017-06-01 2019-10-08 Heinz Plöchinger Fluid property sensor with heat loss compensation and operating method thereof
FR3067809B1 (en) * 2017-06-15 2021-11-19 Kevin Kornelsen MICRO-FABRICATED VACUUM GAUGE DEVICES WITHOUT CALIBRATION AND PRESSURE MEASUREMENT PROCESS
CN107941416A (en) * 2017-12-29 2018-04-20 李涛 Detect the connection terminal of vacuum
CN108507717A (en) * 2018-03-09 2018-09-07 大连理工大学 A kind of micro vacuum sensor
US10845263B2 (en) 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge
JP6609728B1 (en) * 2018-12-12 2019-11-20 株式会社アルバック Pressure measuring system
CA3170485C (en) 2020-04-08 2023-01-31 Institut National D'optique Heat-loss pressure microsensors
US11428596B2 (en) * 2020-09-16 2022-08-30 Wisenstech Ltd. Vacuum gauge with an extended dynamic measurement range
GB2602040A (en) * 2020-12-16 2022-06-22 Edwards Ltd Thermal conductivity vacuum gauge assembly
US11802806B2 (en) 2021-01-21 2023-10-31 Mks Instruments, Inc. Load-lock gauge
CN113324697A (en) * 2021-04-16 2021-08-31 中国科学院微电子研究所 Miniature Pirani vacuum sensor and manufacturing method thereof

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JP6293588B2 (en) * 2014-06-27 2018-03-14 東京エレクトロン株式会社 Pressure sensor and pressure sensor manufacturing method

Also Published As

Publication number Publication date
EP3123135A2 (en) 2017-02-01
JP2017508976A (en) 2017-03-30
CN106104245B (en) 2019-11-08
US20150276536A1 (en) 2015-10-01
WO2015148005A3 (en) 2015-12-03
JP6505743B2 (en) 2019-04-24
KR20160135731A (en) 2016-11-28
TW201546430A (en) 2015-12-16
TWI534419B (en) 2016-05-21
CN106104245A (en) 2016-11-09
US9335231B2 (en) 2016-05-10
WO2015148005A2 (en) 2015-10-01

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