SG11201605179XA - Micro-electromechanical sound transducer with sound energy-reflecting interlayer - Google Patents
Micro-electromechanical sound transducer with sound energy-reflecting interlayerInfo
- Publication number
- SG11201605179XA SG11201605179XA SG11201605179XA SG11201605179XA SG11201605179XA SG 11201605179X A SG11201605179X A SG 11201605179XA SG 11201605179X A SG11201605179X A SG 11201605179XA SG 11201605179X A SG11201605179X A SG 11201605179XA SG 11201605179X A SG11201605179X A SG 11201605179XA
- Authority
- SG
- Singapore
- Prior art keywords
- sound
- micro
- electromechanical
- energy
- transducer
- Prior art date
Links
- 239000011229 interlayer Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/04—Plane diaphragms
- H04R7/06—Plane diaphragms comprising a plurality of sections or layers
- H04R7/10—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers in contact
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R3/00—Circuits for transducers, loudspeakers or microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2400/00—Loudspeakers
- H04R2400/01—Transducers used as a loudspeaker to generate sound aswell as a microphone to detect sound
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013114826.3A DE102013114826A1 (en) | 2013-12-23 | 2013-12-23 | Microelectromechanical sound transducer with sound energy-reflecting intermediate layer |
| PCT/EP2014/078220 WO2015097035A1 (en) | 2013-12-23 | 2014-12-17 | Micro-electromechanical sound transducer with sound energy-reflecting interlayer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201605179XA true SG11201605179XA (en) | 2016-08-30 |
Family
ID=52232168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201605179XA SG11201605179XA (en) | 2013-12-23 | 2014-12-17 | Micro-electromechanical sound transducer with sound energy-reflecting interlayer |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US10045125B2 (en) |
| EP (1) | EP3087760B1 (en) |
| KR (1) | KR102208617B1 (en) |
| CN (1) | CN106416295B (en) |
| AU (1) | AU2014372721B2 (en) |
| CA (1) | CA2934994A1 (en) |
| DE (1) | DE102013114826A1 (en) |
| MY (1) | MY177541A (en) |
| SG (1) | SG11201605179XA (en) |
| WO (1) | WO2015097035A1 (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102015114242A1 (en) * | 2015-08-27 | 2017-03-02 | USound GmbH | MEMS speaker with position sensor |
| DE102015116640A1 (en) | 2015-10-01 | 2017-04-06 | USound GmbH | MEMS printed circuit board module with integrated piezoelectric structure and sound transducer arrangement |
| DE102015116707A1 (en) * | 2015-10-01 | 2017-04-06 | USound GmbH | Flexible MEMS printed circuit board unit and sound transducer arrangement |
| JP7067891B2 (en) | 2017-10-18 | 2022-05-16 | Ｍｍｉセミコンダクター株式会社 | Transducer |
| EP3676025A4 (en) * | 2017-11-16 | 2021-04-07 | Chirp Microsystems, Inc. | Piezoelectric micromachined ultrasonic transducer with a patterned membrane structure |
| US11256818B2 (en) | 2017-12-28 | 2022-02-22 | Corlina, Inc. | System and method for enabling and verifying the trustworthiness of a hardware system |
| WO2019152521A1 (en) | 2018-01-30 | 2019-08-08 | Corlina, Inc. | User and device onboarding |
| DE102018203812A1 (en) | 2018-03-13 | 2019-09-19 | Christian-Albrechts-Universität Zu Kiel | FERROELECTRIC MATERIAL, MEMS COMPONENT WITH A FERROELECTRIC MATERIAL, MEMS DEVICE WITH A FIRST MEMS COMPONENT, METHOD FOR PRODUCING A MEMS COMPONENT, AND METHOD FOR PRODUCING A CMOS COMPATIBLE MEMS COMPONENT |
| EP3620429A1 (en) * | 2018-09-06 | 2020-03-11 | Infineon Technologies AG | Mems membrane transducer and method for producing same |
| CN112423210A (en) * | 2019-08-21 | 2021-02-26 | 新科实业有限公司 | MEMS transducer, MEMS microphone and method of manufacturing MEMS transducer |
| KR102367922B1 (en) | 2019-11-29 | 2022-02-25 | 국방과학연구소 | Piezoelectric Micro-Electro Mechanical Systems vector hydrophone equipment and Method for manufacturing the same |
| US20230232159A1 (en) | 2022-01-18 | 2023-07-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Top notch slit profile for mems device |
| EP4236367A1 (en) * | 2022-02-28 | 2023-08-30 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Corrugations or weakened areas on anchoring structures of vertical mems transducer membranes |
| WO2023161469A1 (en) | 2022-02-28 | 2023-08-31 | Hahn-Schickard-Gesellschaft Für Angewandte Forschung E. V. | Corrugations or weakened regions on armature structures of vertical mems converter membranes |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4861420A (en) * | 1984-06-04 | 1989-08-29 | Tactile Perceptions, Inc. | Method of making a semiconductor transducer |
| US5650685A (en) * | 1992-01-30 | 1997-07-22 | The United States Of America As Represented By The Secretary Of The Army | Microcircuit package with integrated acoustic isolator |
| WO1997039464A1 (en) * | 1996-04-18 | 1997-10-23 | California Institute Of Technology | Thin film electret microphone |
| DE102005008514B4 (en) * | 2005-02-24 | 2019-05-16 | Tdk Corporation | Microphone membrane and microphone with the microphone membrane |
| DE102005008512B4 (en) * | 2005-02-24 | 2016-06-23 | Epcos Ag | Electrical module with a MEMS microphone |
| DE102005008511B4 (en) | 2005-02-24 | 2019-09-12 | Tdk Corporation | MEMS microphone |
| US20080149832A1 (en) * | 2006-12-20 | 2008-06-26 | Miguel Zorn | Scanning Probe Microscope, Nanomanipulator with Nanospool, Motor, nucleotide cassette and Gaming application |
| JP2009010559A (en) * | 2007-06-27 | 2009-01-15 | Nippon Dempa Kogyo Co Ltd | Piezoelectric component and method of manufacturing the same |
| JP2009260723A (en) * | 2008-04-17 | 2009-11-05 | Asahi Kasei Electronics Co Ltd | Transducer |
| US8847466B2 (en) * | 2008-06-19 | 2014-09-30 | Nxp B.V. | Piezoelectric bimorph switch |
| EP2297976B1 (en) * | 2008-06-30 | 2020-09-30 | The Regents of the University of Michigan | Piezoelectric mems microphone |
| DE102009002986B4 (en) * | 2009-05-11 | 2022-07-14 | Robert Bosch Gmbh | Piezoelectric energy converter with stop and method of manufacture |
| KR101561661B1 (en) | 2009-09-25 | 2015-10-21 | 삼성전자주식회사 | Piezoelectric micro speaker having weight attached to vibrating membrane and method of manufacturing the same |
| JP5385117B2 (en) * | 2009-12-17 | 2014-01-08 | 富士フイルム株式会社 | Method for manufacturing piezoelectric MEMS switch |
| JP2012080165A (en) * | 2010-09-30 | 2012-04-19 | Yamaha Corp | Capacitor microphone array chip |
| US8724832B2 (en) * | 2011-08-30 | 2014-05-13 | Qualcomm Mems Technologies, Inc. | Piezoelectric microphone fabricated on glass |
| US8496842B2 (en) * | 2011-09-12 | 2013-07-30 | Texas Instruments Incorporated | MEMS device fabricated with integrated circuit |
| US9402137B2 (en) | 2011-11-14 | 2016-07-26 | Infineon Technologies Ag | Sound transducer with interdigitated first and second sets of comb fingers |
-
2013
- 2013-12-23 DE DE102013114826.3A patent/DE102013114826A1/en active Pending
-
2014
- 2014-12-17 CA CA2934994A patent/CA2934994A1/en not_active Abandoned
- 2014-12-17 CN CN201480070788.1A patent/CN106416295B/en active Active
- 2014-12-17 MY MYPI2016702313A patent/MY177541A/en unknown
- 2014-12-17 SG SG11201605179XA patent/SG11201605179XA/en unknown
- 2014-12-17 AU AU2014372721A patent/AU2014372721B2/en not_active Ceased
- 2014-12-17 EP EP14820823.4A patent/EP3087760B1/en active Active
- 2014-12-17 US US15/107,371 patent/US10045125B2/en active Active
- 2014-12-17 WO PCT/EP2014/078220 patent/WO2015097035A1/en active Application Filing
- 2014-12-17 KR KR1020167019823A patent/KR102208617B1/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| MY177541A (en) | 2020-09-18 |
| CN106416295A (en) | 2017-02-15 |
| WO2015097035A1 (en) | 2015-07-02 |
| AU2014372721B2 (en) | 2018-11-08 |
| US20170006381A1 (en) | 2017-01-05 |
| KR102208617B1 (en) | 2021-01-28 |
| EP3087760B1 (en) | 2019-03-13 |
| KR20160114068A (en) | 2016-10-04 |
| CN106416295B (en) | 2020-01-03 |
| CA2934994A1 (en) | 2015-07-02 |
| US10045125B2 (en) | 2018-08-07 |
| AU2014372721A1 (en) | 2016-07-28 |
| EP3087760A1 (en) | 2016-11-02 |
| DE102013114826A1 (en) | 2015-06-25 |
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