SG11201601687YA - Process for producing thick nanostructured films obtained from a block copolymer composition - Google Patents
Process for producing thick nanostructured films obtained from a block copolymer compositionInfo
- Publication number
- SG11201601687YA SG11201601687YA SG11201601687YA SG11201601687YA SG11201601687YA SG 11201601687Y A SG11201601687Y A SG 11201601687YA SG 11201601687Y A SG11201601687Y A SG 11201601687YA SG 11201601687Y A SG11201601687Y A SG 11201601687YA SG 11201601687Y A SG11201601687Y A SG 11201601687YA
- Authority
- SG
- Singapore
- Prior art keywords
- block copolymer
- copolymer composition
- films obtained
- producing thick
- nanostructured films
- Prior art date
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0433—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being a reactive gas
- B05D3/0453—After-treatment
- B05D3/046—Curing or evaporating the solvent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
- B05D1/005—Spin coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
- B05D3/0254—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F293/00—Macromolecular compounds obtained by polymerisation on to a macromolecule having groups capable of inducing the formation of new polymer chains bound exclusively at one or both ends of the starting macromolecule
- C08F293/005—Macromolecular compounds obtained by polymerisation on to a macromolecule having groups capable of inducing the formation of new polymer chains bound exclusively at one or both ends of the starting macromolecule using free radical "living" or "controlled" polymerisation, e.g. using a complexing agent
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J3/00—Processes of treating or compounding macromolecular substances
- C08J3/02—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/08—Heat treatment
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L53/00—Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2438/00—Living radical polymerisation
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2438/00—Living radical polymerisation
- C08F2438/02—Stable Free Radical Polymerisation [SFRP]; Nitroxide Mediated Polymerisation [NMP] for, e.g. using 2,2,6,6-tetramethylpiperidine-1-oxyl [TEMPO]
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2353/00—Characterised by the use of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2353/00—Characterised by the use of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Derivatives of such polymers
- C08J2353/02—Characterised by the use of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Derivatives of such polymers of vinyl aromatic monomers and conjugated dienes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
- C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/03—Polymer mixtures characterised by other features containing three or more polymers in a blend
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1358628A FR3010412B1 (en) | 2013-09-09 | 2013-09-09 | PROCESS FOR OBTAINING NANO-STRUCTURE THICK FILMS OBTAINED FROM BLOCK COPOLYMERS |
FR1451492A FR3010414B1 (en) | 2013-09-09 | 2014-02-25 | PROCESS FOR OBTAINING NANO-STRUCTURED THICK FILMS OBTAINED FROM A BLOCK COPOLYMER COMPOSITION |
PCT/EP2014/068957 WO2015032904A1 (en) | 2013-09-09 | 2014-09-05 | Process for producing thick nanostructured films obtained from a block copolymer composition |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201601687YA true SG11201601687YA (en) | 2016-04-28 |
Family
ID=51483348
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201601687YA SG11201601687YA (en) | 2013-09-09 | 2014-09-05 | Process for producing thick nanostructured films obtained from a block copolymer composition |
Country Status (9)
Country | Link |
---|---|
US (2) | US20150073094A1 (en) |
EP (1) | EP2845888A1 (en) |
JP (1) | JP6199263B2 (en) |
KR (1) | KR20150029599A (en) |
CN (1) | CN105518089B (en) |
FR (1) | FR3010414B1 (en) |
SG (1) | SG11201601687YA (en) |
TW (2) | TWI633135B (en) |
WO (1) | WO2015032904A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3800253A3 (en) | 2014-06-12 | 2021-07-28 | Toray Industries, Inc. | Prostate cancer detection kit or device, and detection method |
FR3032714A1 (en) * | 2015-02-18 | 2016-08-19 | Arkema France | METHOD FOR REDUCING THE TIME OF ASSEMBLY OF ORDERED BLOCK COPOLYMER FILMS |
FR3032712A1 (en) * | 2015-02-18 | 2016-08-19 | Arkema France | PROCESS FOR OBTAINING THICK ORDERED FILMS AND HIGH PERIODS COMPRISING A BLOCK COPOLYMER |
FR3032713A1 (en) * | 2015-02-18 | 2016-08-19 | Arkema France | METHOD OF REDUCING DEFECTS IN ORDINATED BLOCK COPOLYMER FILM |
FR3042794B1 (en) * | 2015-10-23 | 2020-03-27 | Arkema France | PROCESS FOR CREATING NANOMETRIC STRUCTURES BY SELF-ASSEMBLY OF DI-BLOCK COPOLYMERS |
JP2018154760A (en) * | 2017-03-17 | 2018-10-04 | 東芝メモリ株式会社 | Pattern formation material and pattern formation method |
FR3075800B1 (en) * | 2017-12-21 | 2020-10-09 | Arkema France | ANTI-STICK COATS FOR TRANSFER PRINTING PROCESSES |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2679237B1 (en) | 1991-07-19 | 1994-07-22 | Atochem | PRIMING SYSTEM FOR THE ANIONIC POLYMERIZATION OF (METH) ACRYLIC MONOMERS. |
FR2735480B1 (en) | 1995-06-15 | 1997-07-18 | Atochem Elf Sa | CONTINUOUS ANIONIC POLYMERIZATION PROCESS OF AT LEAST ONE (METH) ACRYLIC MONOMER FOR THE OBTAINING OF POLYMERS WITH A HIGH SOLID RATE |
CN101375162A (en) * | 2006-01-27 | 2009-02-25 | 阿科玛法国公司 | High optical purity copolymer film |
US8193285B2 (en) * | 2006-05-16 | 2012-06-05 | Nippon Soda Co., Ltd. | Block copolymers |
EP2027208B1 (en) * | 2006-05-25 | 2016-02-10 | Arkema Inc. | Amphiphilic block copolymers |
KR100834729B1 (en) * | 2006-11-30 | 2008-06-09 | 포항공과대학교 산학협력단 | Antireflective nanoporous thin film and manufacturing methods thereof using block copolymer |
US7964107B2 (en) * | 2007-02-08 | 2011-06-21 | Micron Technology, Inc. | Methods using block copolymer self-assembly for sub-lithographic patterning |
JP2008231233A (en) * | 2007-03-20 | 2008-10-02 | Kyoto Univ | Thin polymer film, patterned substrate, patterned medium for magnetic recording and their manufacturing methods |
US7732533B2 (en) * | 2007-08-31 | 2010-06-08 | Micron Technology, Inc. | Zwitterionic block copolymers and methods |
JP5281386B2 (en) * | 2008-12-22 | 2013-09-04 | 株式会社日立製作所 | Polymer thin film, patterned medium, and production method thereof |
FR2974094A1 (en) * | 2011-04-15 | 2012-10-19 | Arkema France | PROCESS FOR PREPARING SURFACES |
FR2974072B1 (en) | 2011-04-15 | 2014-06-13 | Oreal | DEVICE FOR STORING AND DISTRIBUTING PRODUCTS WITH SEVERAL COMPARTMENTS |
JP2014531615A (en) * | 2011-09-06 | 2014-11-27 | コーネル ユニバーシティー | Block copolymer and lithographic patterning using the block copolymer |
US8697810B2 (en) * | 2012-02-10 | 2014-04-15 | Rohm And Haas Electronic Materials Llc | Block copolymer and methods relating thereto |
US8513356B1 (en) * | 2012-02-10 | 2013-08-20 | Dow Global Technologies Llc | Diblock copolymer blend composition |
US8961918B2 (en) * | 2012-02-10 | 2015-02-24 | Rohm And Haas Electronic Materials Llc | Thermal annealing process |
US20130209755A1 (en) * | 2012-02-15 | 2013-08-15 | Phillip Dene Hustad | Self-assembled structures, method of manufacture thereof and articles comprising the same |
US9127113B2 (en) * | 2012-05-16 | 2015-09-08 | Rohm And Haas Electronic Materials Llc | Polystyrene-polyacrylate block copolymers, methods of manufacture thereof and articles comprising the same |
JP5752655B2 (en) * | 2012-09-10 | 2015-07-22 | 株式会社東芝 | Pattern formation method |
JP5640099B2 (en) * | 2013-01-07 | 2014-12-10 | 株式会社日立製作所 | Production method of polymer thin film having fine structure and patterned substrate |
US8859433B2 (en) * | 2013-03-11 | 2014-10-14 | International Business Machines Corporation | DSA grapho-epitaxy process with etch stop material |
-
2014
- 2014-02-25 FR FR1451492A patent/FR3010414B1/en not_active Expired - Fee Related
- 2014-09-05 WO PCT/EP2014/068957 patent/WO2015032904A1/en active Application Filing
- 2014-09-05 EP EP14183748.4A patent/EP2845888A1/en not_active Withdrawn
- 2014-09-05 SG SG11201601687YA patent/SG11201601687YA/en unknown
- 2014-09-05 CN CN201480049607.7A patent/CN105518089B/en not_active Expired - Fee Related
- 2014-09-09 TW TW103131002A patent/TWI633135B/en not_active IP Right Cessation
- 2014-09-09 JP JP2014182834A patent/JP6199263B2/en active Active
- 2014-09-09 TW TW106131044A patent/TW201823321A/en unknown
- 2014-09-09 US US14/481,421 patent/US20150073094A1/en not_active Abandoned
- 2014-09-11 KR KR20140120316A patent/KR20150029599A/en not_active Application Discontinuation
-
2015
- 2015-07-27 US US14/809,722 patent/US20150328661A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP6199263B2 (en) | 2017-09-20 |
FR3010414B1 (en) | 2015-09-25 |
TW201520247A (en) | 2015-06-01 |
JP2015071756A (en) | 2015-04-16 |
CN105518089A (en) | 2016-04-20 |
CN105518089B (en) | 2020-11-10 |
WO2015032904A1 (en) | 2015-03-12 |
US20150328661A1 (en) | 2015-11-19 |
EP2845888A1 (en) | 2015-03-11 |
US20150073094A1 (en) | 2015-03-12 |
FR3010414A1 (en) | 2015-03-13 |
TWI633135B (en) | 2018-08-21 |
TW201823321A (en) | 2018-07-01 |
KR20150029599A (en) | 2015-03-18 |
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