SG11201600873PA - Halbach array and magnetic suspension damper using same - Google Patents

Halbach array and magnetic suspension damper using same

Info

Publication number
SG11201600873PA
SG11201600873PA SG11201600873PA SG11201600873PA SG11201600873PA SG 11201600873P A SG11201600873P A SG 11201600873PA SG 11201600873P A SG11201600873P A SG 11201600873PA SG 11201600873P A SG11201600873P A SG 11201600873PA SG 11201600873P A SG11201600873P A SG 11201600873PA
Authority
SG
Singapore
Prior art keywords
same
magnetic suspension
halbach array
suspension damper
damper
Prior art date
Application number
SG11201600873PA
Other languages
English (en)
Inventor
Liwei Wu
Original Assignee
Shanghai Microelectronics Equi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Microelectronics Equi filed Critical Shanghai Microelectronics Equi
Publication of SG11201600873PA publication Critical patent/SG11201600873PA/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K49/00—Dynamo-electric clutches; Dynamo-electric brakes
    • H02K49/10—Dynamo-electric clutches; Dynamo-electric brakes of the permanent-magnet type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/02—Permanent magnets [PM]
    • H01F7/0205—Magnetic circuits with PM in general
    • H01F7/021—Construction of PM
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/02—Permanent magnets [PM]
    • H01F7/0231—Magnetic circuits with PM for power or force generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/02—Permanent magnets [PM]
    • H01F7/0273—Magnetic circuits with PM for magnetic field generation
    • H01F7/0278—Magnetic circuits with PM for magnetic field generation for generating uniform fields, focusing, deflecting electrically charged particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
SG11201600873PA 2013-08-09 2014-08-06 Halbach array and magnetic suspension damper using same SG11201600873PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310347667.4A CN104343885B (zh) 2013-08-09 2013-08-09 高精密磁悬浮主动减震设备
PCT/CN2014/083777 WO2015018335A1 (fr) 2013-08-09 2014-08-06 Réseau de halbach et amortisseur de suspension magnétique l'utilisant

Publications (1)

Publication Number Publication Date
SG11201600873PA true SG11201600873PA (en) 2016-03-30

Family

ID=52460667

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201600873PA SG11201600873PA (en) 2013-08-09 2014-08-06 Halbach array and magnetic suspension damper using same

Country Status (7)

Country Link
US (1) US10170972B2 (fr)
EP (1) EP3032137B1 (fr)
JP (1) JP6253778B2 (fr)
CN (1) CN104343885B (fr)
SG (1) SG11201600873PA (fr)
TW (1) TW201522807A (fr)
WO (1) WO2015018335A1 (fr)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101707899B1 (ko) * 2015-08-26 2017-02-28 한국생산기술연구원 할바흐 자석 배열을 이용한 잔류 진동 제어 시스템과 이를 이용한 광학 검사 장치 및 후가공 장치
DE102016110667A1 (de) * 2016-06-09 2017-12-14 Eto Magnetic Gmbh Dämpfungsvorrichtung und Verfahren mit einer Dämpfungsvorrichtung
CN107783378B (zh) * 2016-08-30 2019-10-25 上海微电子装备（集团）股份有限公司 一种光刻机垂向微动结构和控制方法
US9942663B1 (en) 2016-12-22 2018-04-10 Apple Inc. Electromagnetic transducer having paired Halbach arrays
CN106953551B (zh) * 2017-05-05 2018-12-11 哈尔滨工业大学 磁悬浮重力补偿器
CN107315425B (zh) * 2017-08-15 2023-12-12 京东方科技集团股份有限公司 质心控制系统以及质心控制方法
CN109581861B (zh) * 2017-09-29 2022-02-15 上海微电子装备（集团）股份有限公司 运动台控制系统、运动台系统与曝光装置
CN108263568B (zh) * 2018-01-23 2019-09-03 金陵科技学院 一种基于调频的自适应磁悬浮减摇装置及减摇控制方法
PL424607A1 (pl) * 2018-02-16 2019-08-26 Politechnika Białostocka Aktywna podpora magnetyczna z magnesami trwałymi w układzie tablic Halbacha
KR101875560B1 (ko) * 2018-05-24 2018-07-06 (주)신호엔지니어링 수배전반용 마그넷 면진장치
CN108732941A (zh) * 2018-05-31 2018-11-02 青岛理工大学 一种多维磁悬浮隔振平台的控制系统及仿真方法
CN109158802B (zh) * 2018-10-16 2021-02-26 宁夏吴忠市好运电焊机有限公司 用于焊接机器人的磁悬浮减震稳定连接器
JP7360175B2 (ja) * 2018-11-26 2023-10-12 Ｏｒｂｒａｙ株式会社 運動ユニット
CN109296685A (zh) * 2018-11-29 2019-02-01 美钻深海能源科技研发（上海）有限公司 水下磁悬减震器
CN109765065B (zh) * 2019-03-04 2020-12-15 西南交通大学 一种立式电动悬浮试验台
JPWO2021005922A1 (fr) * 2019-07-08 2021-01-14
CN110299240A (zh) * 2019-07-09 2019-10-01 北京麦格易来科技有限公司 一种控制磁性材料的磁性的装置
CN110513576B (zh) * 2019-07-11 2021-02-19 南京航空航天大学 一种用于航天的空间六自由度无接触隔振平台
US11830671B2 (en) * 2020-12-03 2023-11-28 Lantha Tech Ltd. Methods for generating directional magnetic fields and magnetic apparatuses thereof
CN113757285B (zh) * 2021-09-08 2022-06-21 重庆大学 负刚度生成机构及准零刚度隔振器
CN113915282B (zh) * 2021-09-27 2022-10-28 华中科技大学 一种紧凑型宽域高线性度磁负刚度机构
CN114151488B (zh) * 2021-11-15 2022-11-22 华中科技大学 一种刚度可调的紧凑型宽域高线性度磁负刚度装置
CN115217890B (zh) * 2022-07-15 2023-10-31 哈尔滨工业大学 大型精密设备气磁隔振与主动阻尼转运装置
CN115217892B (zh) * 2022-07-15 2023-09-08 哈尔滨工业大学 大型精密设备气浮隔振与主动阻尼转运装置
CN115763031B (zh) * 2022-11-02 2023-06-09 哈尔滨工业大学 一种Halbach阵列装码工具

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5285995A (en) * 1992-05-14 1994-02-15 Aura Systems, Inc. Optical table active leveling and vibration cancellation system
JP4242961B2 (ja) * 1998-12-28 2009-03-25 株式会社デルタツーリング 磁気バネ
DE10220008A1 (de) 2002-05-03 2003-11-13 Integrated Dynamics Eng Gmbh Magnetische Federeinrichtung mit negativer Steifheit
EP1372038B1 (fr) * 2002-06-13 2005-11-23 ASML Netherlands B.V. Appareil lithographique et méthode pour la fabrication d'un dispositif
CN1219240C (zh) * 2003-11-13 2005-09-14 上海交通大学 集成电路光刻设备的磁悬浮精密工件台
US7872555B2 (en) * 2004-01-23 2011-01-18 Hitachi Metals, Ltd. Undulator
US20060018075A1 (en) * 2004-07-23 2006-01-26 Data Security, Inc. Permanent magnet bulk degausser
US7541699B2 (en) * 2005-12-27 2009-06-02 Asml Netherlands B.V. Magnet assembly, linear actuator, planar motor and lithographic apparatus
US8009001B1 (en) * 2007-02-26 2011-08-30 The Boeing Company Hyper halbach permanent magnet arrays
US7830046B2 (en) * 2007-03-16 2010-11-09 Nikon Corporation Damper for a stage assembly
US7800471B2 (en) * 2008-04-04 2010-09-21 Cedar Ridge Research, Llc Field emission system and method
US8130436B2 (en) * 2009-02-17 2012-03-06 Prysm, Inc. Flexure actuator
US20110074231A1 (en) * 2009-09-25 2011-03-31 Soderberg Rod F Hybrid and electic vehicles magetic field and electro magnetic field interactice systems
US8264314B2 (en) * 2009-10-20 2012-09-11 Stream Power, Inc. Magnetic arrays with increased magnetic flux
US8405479B1 (en) * 2009-12-22 2013-03-26 The Boeing Company Three-dimensional magnet structure and associated method
DE102010004642B4 (de) 2010-01-13 2012-09-27 Integrated Dynamics Engineering Gmbh Magnetaktor sowie Verfahren zu dessen Montage
JP5567991B2 (ja) * 2010-11-19 2014-08-06 株式会社東芝 動吸振器
CN103226296B (zh) * 2013-04-27 2015-04-15 清华大学 一种带激光干涉仪测量的粗精动叠层工作台

Also Published As

Publication number Publication date
CN104343885B (zh) 2016-08-24
TWI563190B (fr) 2016-12-21
EP3032137A1 (fr) 2016-06-15
WO2015018335A1 (fr) 2015-02-12
JP2016536536A (ja) 2016-11-24
US10170972B2 (en) 2019-01-01
JP6253778B2 (ja) 2017-12-27
US20160197544A1 (en) 2016-07-07
EP3032137B1 (fr) 2019-05-15
EP3032137A4 (fr) 2017-04-12
TW201522807A (zh) 2015-06-16
CN104343885A (zh) 2015-02-11

Similar Documents

Publication Publication Date Title
SG11201600873PA (en) Halbach array and magnetic suspension damper using same
HK1232243A1 (zh) 抗- 抗體及其用途
TWI561407B (en) Suspension structure and driving assembly comprising the same
GB2529785B (en) Magnet Assemblies
HK1224156A1 (zh) 雙側輪組件及其方法
HK1212417A1 (en) Hydraulic shock absorber for suspension system and corresponding improved hydraulic stop
GB201520855D0 (en) Magnetic head and system having offsett arrays
EP2948322A4 (fr) Ensemble d'essieu et de suspension auxiliaire
EP2948693A4 (fr) Ressorts hélicoïdaux présentant des configurations hélicoïdales complexes, ensembles comportant des ressorts hélicoïdaux, et procédés associés
EP3004682C0 (fr) Amortisseur de masse à réglage automatique et système comprenant ce dernier
GB201308054D0 (en) Improvements in damper assemblies
EP2857289A4 (fr) Corps de structure de logement d'amortisseur et procédé de fabrication de corps de structure de logement d'amortisseur
EP2960542A4 (fr) Amortisseur de chocs
SG11201605301TA (en) Magnetic array and magnetic suspension planar motor
HK1231503A1 (zh) 基因突變體及其應用
EP2868946A4 (fr) Dispositif de suspension
EP3015172A4 (fr) Matrice pour séparateur magnétique et séparateur magnétique
GB201304819D0 (en) Suspension system
PL3027932T3 (pl) Hydrauliczny amortyzator zawieszenia
EP2891818A4 (fr) Amortisseur
EP3090192C0 (fr) Amortisseur de vibrations et de bruit
PL3039313T3 (pl) Zespół amortyzatora jednorurowego
EP2955409A4 (fr) Monture de suspension
GB201322773D0 (en) Shock absorber damper
EP2857714A4 (fr) Dispositif de suspension