SG11201510769SA - Tib2 layers and use thereof - Google Patents

Tib2 layers and use thereof

Info

Publication number
SG11201510769SA
SG11201510769SA SG11201510769SA SG11201510769SA SG11201510769SA SG 11201510769S A SG11201510769S A SG 11201510769SA SG 11201510769S A SG11201510769S A SG 11201510769SA SG 11201510769S A SG11201510769S A SG 11201510769SA SG 11201510769S A SG11201510769S A SG 11201510769SA
Authority
SG
Singapore
Prior art keywords
tib2
layers
tib2 layers
Prior art date
Application number
SG11201510769SA
Inventor
Denis Kurapov
Siegfried Krassnitzer
Original Assignee
Oerlikon Surface Solutions Ag Trübbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Trübbach filed Critical Oerlikon Surface Solutions Ag Trübbach
Publication of SG11201510769SA publication Critical patent/SG11201510769SA/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/067Borides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3464Sputtering using more than one target
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/34Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411Constructional aspects of the reactor
    • H01J37/3414Targets
    • H01J37/3426Material
SG11201510769SA 2013-07-03 2014-06-30 Tib2 layers and use thereof SG11201510769SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013011075.0A DE102013011075A1 (en) 2013-07-03 2013-07-03 TiB2 layers and their preparation
PCT/EP2014/001781 WO2015000576A1 (en) 2013-07-03 2014-06-30 Tib2 layers and use thereof

Publications (1)

Publication Number Publication Date
SG11201510769SA true SG11201510769SA (en) 2016-02-26

Family

ID=51063397

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201510769SA SG11201510769SA (en) 2013-07-03 2014-06-30 Tib2 layers and use thereof

Country Status (17)

Country Link
US (1) US10378095B2 (en)
EP (1) EP3017078B1 (en)
JP (1) JP6561048B2 (en)
KR (1) KR102234455B1 (en)
CN (1) CN105492652B (en)
BR (1) BR112015032908B1 (en)
CA (1) CA2916769C (en)
DE (1) DE102013011075A1 (en)
HU (1) HUE053539T2 (en)
IL (1) IL243433B (en)
MX (1) MX2016000044A (en)
MY (1) MY186024A (en)
PH (1) PH12015502841A1 (en)
PL (1) PL3017078T3 (en)
RU (1) RU2016103250A (en)
SG (1) SG11201510769SA (en)
WO (1) WO2015000576A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105755440B (en) * 2016-04-19 2019-04-02 中国科学院宁波材料技术与工程研究所 A kind of hard coat of seawater corrosion resistance and preparation method thereof
CN108251803B (en) * 2016-12-29 2020-06-02 深圳先进技术研究院 TiB2Self-lubricating coating, preparation method thereof and wear-resistant component
CN107740043B (en) * 2017-10-25 2019-08-23 深圳先进技术研究院 Adulterate CaF2TiB2Coating, CaF2And TiB2Composite coating, preparation method and application and cutter
CN109136608B (en) * 2018-08-22 2020-06-09 北京理工大学 Preparation method of TiB whisker reinforced titanium-based composite material with controllable orientation
CN110484881B (en) * 2019-08-15 2021-09-07 广东工业大学 Compact titanium diboride coating and preparation method and application thereof
CN112359395B (en) * 2020-10-15 2021-09-24 安徽工业大学 Preparation method of metal boride coating
CN113981369A (en) * 2021-10-28 2022-01-28 赣州澳克泰工具技术有限公司 Multilayer coating system and method for producing same

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820392A (en) 1987-12-21 1989-04-11 Ford Motor Company Method of increasing useful life of tool steel cutting tools
FR2744461B1 (en) * 1996-02-01 1998-05-22 Tecmachine TITANIUM NITRIDE DOPED BY BORON, SUBSTRATE COATING BASED ON THIS NEW COMPOUND, HAVING HIGH HARDNESS AND ALLOWING VERY GOOD WEAR RESISTANCE, AND PARTS WITH SUCH COATING
US5945214C1 (en) * 1996-08-28 2002-04-23 Premark Rwp Holdings Inc Diboride coated pressing surfaces for abrasion resistant laminate and making pressing surfaces
US6190514B1 (en) * 1997-12-30 2001-02-20 Premark Rwp Holdings, Inc. Method for high scan sputter coating to produce coated, abrasion resistant press plates with reduced built-in thermal stress
US6287711B1 (en) * 1998-07-01 2001-09-11 Front Edge Technology, Inc. Wear-resistant coating and component
US6656045B2 (en) * 2000-01-06 2003-12-02 Melange Computer Services, Inc. Method and system for storing preselected numbers for use in games of bingo
IL144688A0 (en) * 2000-09-01 2002-06-30 Premark Rwp Holdings Inc Polishing of press plates coated with titanium diboride
SE522722C2 (en) 2001-03-28 2004-03-02 Seco Tools Ab Cutting tool coated with titanium diboride
US6815690B2 (en) * 2002-07-23 2004-11-09 Guardian Industries Corp. Ion beam source with coated electrode(s)
CN1730718A (en) * 2005-09-01 2006-02-08 叡邦微波科技股份有限公司 Method for physically splash plating multilayer superhard thin film through magnetic control or unequilibrated type magnetic control
JP5424103B2 (en) * 2008-09-24 2014-02-26 日立金属株式会社 Covering mold for plastic working
EP2425036B8 (en) 2009-04-27 2017-12-20 Evatec AG Reactive sputtering with multiple sputter sources
JP2012139795A (en) 2011-01-05 2012-07-26 Mitsubishi Materials Corp Surface coated cutting tool with hard coating layer exhibiting superior resistance against peeling and chipping in high speed cutting of soft hard-to-cut material
DE102011117177A1 (en) 2011-10-28 2013-05-02 Oerlikon Trading Ag, Trübbach Method for providing sequential power pulses
DE102011018363A1 (en) * 2011-04-20 2012-10-25 Oerlikon Trading Ag, Trübbach Hochleistungszerstäubungsquelle

Also Published As

Publication number Publication date
MY186024A (en) 2021-06-15
RU2016103250A (en) 2017-08-09
CA2916769C (en) 2022-03-08
CA2916769A1 (en) 2015-01-08
CN105492652A (en) 2016-04-13
DE102013011075A1 (en) 2015-01-08
US10378095B2 (en) 2019-08-13
JP2016527392A (en) 2016-09-08
JP6561048B2 (en) 2019-08-14
KR20160029815A (en) 2016-03-15
EP3017078A1 (en) 2016-05-11
MX2016000044A (en) 2016-05-31
WO2015000576A1 (en) 2015-01-08
IL243433B (en) 2019-06-30
US20160186306A1 (en) 2016-06-30
PH12015502841A1 (en) 2018-08-20
BR112015032908B1 (en) 2022-03-15
CN105492652B (en) 2018-09-28
HUE053539T2 (en) 2021-07-28
IL243433A0 (en) 2016-02-29
KR102234455B1 (en) 2021-04-01
EP3017078B1 (en) 2020-12-16
PL3017078T3 (en) 2021-06-28
BR112015032908A2 (en) 2017-07-25

Similar Documents

Publication Publication Date Title
IL274355B (en) Aza-pyridone compounds and uses thereof
HK1223975A1 (en) Nanobubble-containing composition and use thereof
HK1203493A1 (en) Substituted azabicycles and use thereof
GB201317286D0 (en) Composition and Use
EP3023018A4 (en) Glove
GB201305277D0 (en) Novel combination and use
GB201323008D0 (en) Compounds and uses thereof
IL244214B (en) Thienopiperidine derivative and use thereof
IL240248A0 (en) Met-binding agents and uses thereof
SG11201510769SA (en) Tib2 layers and use thereof
HK1203198A1 (en) Substituted phenylimidazopyrazoles and use thereof
GB201307233D0 (en) Compounds and uses thereof
HK1201700A1 (en) Glove
EP3041028A4 (en) Laminate and application thereof
EP2904918A4 (en) Glove
GB201307989D0 (en) Novel combinations and use
GB201301979D0 (en) New composition and use thereof
GB201320992D0 (en) Complex and uses thereof
EP2946016A4 (en) Adenoviruses and their use
GB201309180D0 (en) Compounds and Their Uses
GB201314610D0 (en) Compounds and their uses
GB201306248D0 (en) Compounds and their uses
ZA201601880B (en) Hetero-transglycosylase and uses thereof
GB201322467D0 (en) Composition and use
GB201320161D0 (en) Compounds and their uses