SG11201505841XA - Photonic device structure and method of manufacture - Google Patents
Photonic device structure and method of manufactureInfo
- Publication number
- SG11201505841XA SG11201505841XA SG11201505841XA SG11201505841XA SG11201505841XA SG 11201505841X A SG11201505841X A SG 11201505841XA SG 11201505841X A SG11201505841X A SG 11201505841XA SG 11201505841X A SG11201505841X A SG 11201505841XA SG 11201505841X A SG11201505841X A SG 11201505841XA
- Authority
- SG
- Singapore
- Prior art keywords
- manufacture
- device structure
- photonic device
- photonic
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/776,836 US9005458B2 (en) | 2013-02-26 | 2013-02-26 | Photonic device structure and method of manufacture |
PCT/US2014/016009 WO2014133760A1 (en) | 2013-02-26 | 2014-02-12 | Photonic device structure and method of manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201505841XA true SG11201505841XA (en) | 2015-09-29 |
Family
ID=50179960
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201505841XA SG11201505841XA (en) | 2013-02-26 | 2014-02-12 | Photonic device structure and method of manufacture |
Country Status (8)
Country | Link |
---|---|
US (2) | US9005458B2 (en) |
EP (1) | EP2962139B1 (en) |
JP (1) | JP6244380B2 (en) |
KR (1) | KR101842758B1 (en) |
CN (1) | CN105026966B (en) |
SG (1) | SG11201505841XA (en) |
TW (2) | TWI499817B (en) |
WO (1) | WO2014133760A1 (en) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9372308B1 (en) | 2012-06-17 | 2016-06-21 | Pacific Biosciences Of California, Inc. | Arrays of integrated analytical devices and methods for production |
US9768330B2 (en) * | 2014-08-25 | 2017-09-19 | Micron Technology, Inc. | Method and optoelectronic structure providing polysilicon photonic devices with different optical properties in different regions |
WO2016033207A1 (en) | 2014-08-27 | 2016-03-03 | Pacific Biosciences Of California, Inc. | Arrays of integrated analyitcal devices |
WO2016112296A1 (en) | 2015-01-08 | 2016-07-14 | Acacia Communications, Inc. | Horizontal coupling to silicon waveguides |
CN107615121B (en) | 2015-03-16 | 2021-04-16 | 加利福尼亚太平洋生物科学股份有限公司 | Integrated device and system for free space optical coupling |
US11983790B2 (en) | 2015-05-07 | 2024-05-14 | Pacific Biosciences Of California, Inc. | Multiprocessor pipeline architecture |
AU2016276980B2 (en) | 2015-06-12 | 2021-09-23 | Pacific Biosciences Of California, Inc. | Integrated target waveguide devices and systems for optical coupling |
US10571633B1 (en) | 2016-12-23 | 2020-02-25 | Acacia Communications, Inc. | Suspended cantilever waveguide |
US10416381B1 (en) | 2016-12-23 | 2019-09-17 | Acacia Communications, Inc. | Spot-size-converter design for facet optical coupling |
US20180372872A1 (en) * | 2017-06-23 | 2018-12-27 | Kabushiki Kaisha Toshiba | Photodetector, method of manufacturing photodetector, and lidar apparatus |
US10466514B1 (en) * | 2018-11-06 | 2019-11-05 | Globalfoundries Inc. | Electro-optic modulator with vertically-arranged optical paths |
US11169328B2 (en) * | 2019-09-20 | 2021-11-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photonic structure and method for forming the same |
US11262500B2 (en) * | 2019-12-02 | 2022-03-01 | Renesas Electronics Corporation | Semiconductor device and including an optical waveguide and method of manufacturing the same |
CN111239900B (en) * | 2020-03-18 | 2022-03-29 | 联合微电子中心有限责任公司 | Forming SiO based on wafer bonding2Method for realizing spot-size conversion by waveguide and spot-size converter |
US11409037B2 (en) * | 2020-10-28 | 2022-08-09 | Globalfoundries U.S. Inc. | Enlarged waveguide for photonic integrated circuit without impacting interconnect layers |
US11803009B2 (en) * | 2022-02-25 | 2023-10-31 | Globalfoundries U.S. Inc. | Photonics structures having a locally-thickened dielectric layer |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6734453B2 (en) | 2000-08-08 | 2004-05-11 | Translucent Photonics, Inc. | Devices with optical gain in silicon |
US6712983B2 (en) * | 2001-04-12 | 2004-03-30 | Memsic, Inc. | Method of etching a deep trench in a substrate and method of fabricating on-chip devices and micro-machined structures using the same |
US6695457B2 (en) * | 2001-06-02 | 2004-02-24 | Capella Photonics, Inc. | Bulk silicon mirrors with hinges underneath |
US6983086B2 (en) | 2003-06-19 | 2006-01-03 | Intel Corporation | Thermally isolating optical devices |
JP2005045162A (en) | 2003-07-25 | 2005-02-17 | Mitsubishi Electric Corp | Semiconductor device and method of manufacturing the same |
US8119537B2 (en) | 2004-09-02 | 2012-02-21 | Micron Technology, Inc. | Selective etching of oxides to metal nitrides and metal oxides |
US20060133754A1 (en) | 2004-12-21 | 2006-06-22 | Vipulkumar Patel | Ultra low-loss CMOS compatible silicon waveguides |
US7454102B2 (en) | 2006-04-26 | 2008-11-18 | Honeywell International Inc. | Optical coupling structure |
US7709341B2 (en) | 2006-06-02 | 2010-05-04 | Micron Technology, Inc. | Methods of shaping vertical single crystal silicon walls and resulting structures |
US7625776B2 (en) | 2006-06-02 | 2009-12-01 | Micron Technology, Inc. | Methods of fabricating intermediate semiconductor structures by selectively etching pockets of implanted silicon |
US7628932B2 (en) | 2006-06-02 | 2009-12-08 | Micron Technology, Inc. | Wet etch suitable for creating square cuts in si |
ITMI20070062A1 (en) * | 2007-01-18 | 2008-07-19 | St Microelectronics Srl | PROCESS OF MANUFACTURE OF AN INTEGRATED OPTICAL DEVICE |
US7920770B2 (en) | 2008-05-01 | 2011-04-05 | Massachusetts Institute Of Technology | Reduction of substrate optical leakage in integrated photonic circuits through localized substrate removal |
US8877616B2 (en) | 2008-09-08 | 2014-11-04 | Luxtera, Inc. | Method and system for monolithic integration of photonics and electronics in CMOS processes |
US8791405B2 (en) * | 2009-12-03 | 2014-07-29 | Samsung Electronics Co., Ltd. | Optical waveguide and coupler apparatus and method of manufacturing the same |
US8506829B2 (en) | 2010-02-04 | 2013-08-13 | The United States Of America As Represented By The Secretary Of The Army | Semiconductor hollow-core waveguide using photonic crystal gratings |
US20110249938A1 (en) * | 2010-04-07 | 2011-10-13 | Alcatel-Lucent Usa, Incorporated | Optical grating coupler |
US20110260297A1 (en) * | 2010-04-27 | 2011-10-27 | Shian-Jyh Lin | Through-substrate via and fabrication method thereof |
US20110304412A1 (en) * | 2010-06-10 | 2011-12-15 | Hao Zhang | Acoustic Wave Resonators and Methods of Manufacturing Same |
KR101758141B1 (en) * | 2010-09-17 | 2017-07-14 | 삼성전자주식회사 | Optoelectronic device having vertical slabs |
US8437585B2 (en) | 2010-12-07 | 2013-05-07 | Intel Corporation | Low-cost passive optical waveguide using Si substrate |
CN102570312A (en) * | 2011-12-26 | 2012-07-11 | 南京邮电大学 | Hanging resonance photonic device based on SOI material, and preparation method of same |
CN103091774A (en) * | 2012-11-13 | 2013-05-08 | 东北大学秦皇岛分校 | Floating type lithium niobate optical waveguide |
-
2013
- 2013-02-26 US US13/776,836 patent/US9005458B2/en active Active
-
2014
- 2014-02-12 EP EP14706760.7A patent/EP2962139B1/en active Active
- 2014-02-12 SG SG11201505841XA patent/SG11201505841XA/en unknown
- 2014-02-12 JP JP2015558876A patent/JP6244380B2/en active Active
- 2014-02-12 WO PCT/US2014/016009 patent/WO2014133760A1/en active Application Filing
- 2014-02-12 KR KR1020157023284A patent/KR101842758B1/en active IP Right Grant
- 2014-02-12 CN CN201480010389.6A patent/CN105026966B/en active Active
- 2014-02-21 TW TW103105927A patent/TWI499817B/en active
- 2014-02-21 TW TW104123131A patent/TWI574069B/en active
-
2015
- 2015-03-19 US US14/662,524 patent/US9568674B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2016509262A (en) | 2016-03-24 |
TWI499817B (en) | 2015-09-11 |
JP6244380B2 (en) | 2017-12-06 |
CN105026966B (en) | 2019-10-01 |
CN105026966A (en) | 2015-11-04 |
US9005458B2 (en) | 2015-04-14 |
KR101842758B1 (en) | 2018-03-27 |
US9568674B2 (en) | 2017-02-14 |
KR20150113095A (en) | 2015-10-07 |
EP2962139B1 (en) | 2019-09-25 |
EP2962139A1 (en) | 2016-01-06 |
US20150192737A1 (en) | 2015-07-09 |
WO2014133760A1 (en) | 2014-09-04 |
TW201539073A (en) | 2015-10-16 |
TWI574069B (en) | 2017-03-11 |
TW201443499A (en) | 2014-11-16 |
US20140241682A1 (en) | 2014-08-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2518286B (en) | Security device and method of manufacture | |
SG11201505841XA (en) | Photonic device structure and method of manufacture | |
GB2517079B (en) | Security devices and methods of manufacture | |
GB2535360B (en) | Methods of preparing polyhemiaminals and polyhexahydrotriazines | |
EP2837716A4 (en) | Graphene fiber and preparation method therefor | |
SG11201504442YA (en) | Semiconductor device and method of making semiconductor device | |
IL231340A0 (en) | Methods and apparatus to form ophthalmic devices incorporating photonic elements | |
EP2967833A4 (en) | Aligned fiber and method of use thereof | |
GB201301790D0 (en) | Security devices and methods of manufacture thereof | |
EP2980007A4 (en) | Filler-cleaning method and device | |
EP3588586C0 (en) | Photovoltaic devices and method of making | |
GB201401761D0 (en) | Security devices and methods of manufacture thereof | |
GB2510381B (en) | Security devices and methods of manufacture thereof | |
HK1204506A1 (en) | Semiconductor device and manufacturing method of semiconductor device | |
HRP20160892T1 (en) | Optoelectronic device and method of producing the same | |
EP2988355A4 (en) | Fuel-cell-stack manufacturing method and manufacturing device | |
GB201312669D0 (en) | Microneedles and method of manufacture | |
HK1198783A1 (en) | Method of manufacturing semiconductor device and semiconductor device | |
EP2992556A4 (en) | Photovoltaic devices and method of making | |
HK1224307A1 (en) | Protoxin-ii variants and methods of use -ii | |
EP2995905A4 (en) | X-ray device and manufacturing method of structure | |
EP2973742A4 (en) | Photovoltaic devices and method of making | |
HK1201101A1 (en) | Method of manufacturing semiconductor device and semiconductor device | |
EP2971241A4 (en) | Anisotropic conductor and method of fabrication thereof | |
GB2517285B (en) | Semiconductor devices and methods of manufacture |