SG11201505669TA - Plasma generator - Google Patents

Plasma generator

Info

Publication number
SG11201505669TA
SG11201505669TA SG11201505669TA SG11201505669TA SG11201505669TA SG 11201505669T A SG11201505669T A SG 11201505669TA SG 11201505669T A SG11201505669T A SG 11201505669TA SG 11201505669T A SG11201505669T A SG 11201505669TA SG 11201505669T A SG11201505669T A SG 11201505669TA
Authority
SG
Singapore
Prior art keywords
plasma generator
plasma
generator
Prior art date
Application number
SG11201505669TA
Inventor
Satomi KOYAMA
Li Lou
Yoshiaki Tatsumi
Original Assignee
Creative Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Creative Tech Corp filed Critical Creative Tech Corp
Publication of SG11201505669TA publication Critical patent/SG11201505669TA/en

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348Dielectric barrier discharge
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2439Surface discharges, e.g. air flow control
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2441Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes characterised by the physical-chemical properties of the dielectric, e.g. porous dielectric
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32Processing objects by plasma generation
    • H01J2237/33Processing objects by plasma generation characterised by the type of processing
    • H01J2237/335Cleaning
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00Applications of plasma devices
    • H05H2245/30Medical applications
    • H05H2245/36Sterilisation of objects, liquids, volumes or surfaces
SG11201505669TA 2013-02-04 2014-01-09 Plasma generator SG11201505669TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013019918 2013-02-04
PCT/JP2014/050262 WO2014119349A1 (en) 2013-02-04 2014-01-09 Plasma generator

Publications (1)

Publication Number Publication Date
SG11201505669TA true SG11201505669TA (en) 2015-09-29

Family

ID=51262064

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201505669TA SG11201505669TA (en) 2013-02-04 2014-01-09 Plasma generator

Country Status (9)

Country Link
US (1) US9536709B2 (en)
EP (1) EP2953431B1 (en)
JP (1) JP6277493B2 (en)
KR (1) KR102094056B1 (en)
CN (1) CN104938038B (en)
HK (1) HK1210566A1 (en)
SG (1) SG11201505669TA (en)
TW (1) TW201436649A (en)
WO (1) WO2014119349A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2529173B (en) * 2014-08-12 2016-08-24 Novaerus Patents Ltd Flexible electrode assembly for plasma generation and air ducting system including the electrode assembly
SG11201700657SA (en) * 2014-08-18 2017-03-30 Creative Tech Corp Dust collection device
KR101657895B1 (en) * 2015-05-14 2016-09-19 광운대학교 산학협력단 Plasma Pad
US10034363B2 (en) * 2015-05-15 2018-07-24 University Of Florida Research Foundation, Inc. Nitrophobic surface for extreme thrust gain
JP6739019B2 (en) * 2015-05-21 2020-08-12 株式会社クリエイティブテクノロジー Sterilization case
ES2751458T3 (en) * 2015-05-27 2020-03-31 Creative Tech Corp Sterilization foil
EP3118884A1 (en) * 2015-07-15 2017-01-18 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Electrode assembly for a dielectric barrier discharge plasma source and method of manufacturing such an electrode assembly
EP3407684B8 (en) * 2016-01-18 2021-01-20 Toshiba Mitsubishi-Electric Industrial Systems Corporation Activated gas generation device and film-formation treatment device
KR101795944B1 (en) 2016-07-05 2017-11-08 광운대학교 산학협력단 Plasma Pad
US11786745B2 (en) 2016-08-02 2023-10-17 Feagle Co., Ltd Plasma treatment apparatus
JP7070911B2 (en) * 2016-08-26 2022-05-18 株式会社クリエイティブテクノロジー Shoes cleaner
DE102016118569A1 (en) * 2016-09-30 2018-04-05 Cinogy Gmbh Electrode arrangement for forming a dielectrically impeded plasma discharge
TWI609834B (en) * 2016-10-24 2018-01-01 龍華科技大學 Sterilization device for hand elevator
NL2017822B1 (en) * 2016-11-18 2018-05-25 Plasmacure B V Non-Thermal Plasma Device with electromagnetic compatibility control
US10262836B2 (en) * 2017-04-28 2019-04-16 Seongsik Chang Energy-efficient plasma processes of generating free charges, ozone, and light
DE102017111902B4 (en) * 2017-05-31 2020-12-31 Cinogy Gmbh Flat support arrangement
CN107949137A (en) * 2017-11-02 2018-04-20 大连民族大学 A kind of self-adapting flexible plasma discharging body device
KR102127038B1 (en) * 2017-11-16 2020-06-25 광운대학교 산학협력단 Wearable Plasma Clothes
US10925144B2 (en) * 2019-06-14 2021-02-16 NanoGuard Technologies, LLC Electrode assembly, dielectric barrier discharge system and use thereof
KR102168275B1 (en) * 2020-06-19 2020-10-21 광운대학교 산학협력단 Wearable Plasma Clothes
DE102021128964B3 (en) * 2021-11-08 2023-03-09 Hochschule für angewandte Wissenschaft und Kunst Hildesheim/Holzminden/Göttingen, Körperschaft des öffentlichen Rechts Process and device for generating plasmas with increased pulse energy by means of dielectrically impeded electrical discharges
FR3139997A1 (en) * 2022-09-28 2024-03-29 Prodea Depolluting Device for treating a gas phase by plasma and associated method

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69929271T2 (en) * 1998-10-26 2006-09-21 Matsushita Electric Works, Ltd., Kadoma Apparatus and method for plasma treatment
JP4763974B2 (en) * 2003-05-27 2011-08-31 パナソニック電工株式会社 Plasma processing apparatus and plasma processing method
WO2004107394A2 (en) * 2003-05-27 2004-12-09 Matsushita Electric Works, Ltd. Plasma processing apparatus, method for producing reaction vessel for plasma generation, and plasma processing method
JP4579522B2 (en) * 2003-09-29 2010-11-10 株式会社イー・スクエア Plasma surface treatment equipment
JP2005243905A (en) * 2004-02-26 2005-09-08 Kansai Tlo Kk Plasma treatment method and apparatus thereof
JP4320637B2 (en) 2004-04-08 2009-08-26 三菱電機株式会社 Ozone generator and ozone generation method
EP1849593A4 (en) * 2005-02-17 2011-01-05 Konica Minolta Holdings Inc Gas-barrier film, process for producing gas-barrier film, resin base with the gas-barrier film for organic electroluminescent element, and organic electroluminescent element
JP2006331664A (en) 2005-05-23 2006-12-07 Sharp Corp Plasma treatment device
DE102005029360B4 (en) * 2005-06-24 2011-11-10 Softal Corona & Plasma Gmbh Two methods for continuous atmospheric pressure Plasma treatment of workpieces, in particular material plates or sheets
JP4798635B2 (en) * 2005-09-16 2011-10-19 国立大学法人東北大学 Plasma generating apparatus and plasma generating method
SK51082006A3 (en) * 2006-12-05 2008-07-07 Fakulta Matematiky, Fyziky A Informatiky Univerzitfakulta Matematiky, Fyziky A Informatiky Univerzity Komensk�Hoy Komensk�Ho Apparatus and treatment method of surface of metals and metalloids, oxides of metals and oxides of metalloids and nitrides of metalloids
US7999173B1 (en) * 2007-03-21 2011-08-16 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Dust removal from solar cells
CN101279101A (en) * 2007-04-02 2008-10-08 张涉 Atmospheric low-temperature plasma deodorizer
WO2009005895A2 (en) * 2007-05-08 2009-01-08 University Of Florida Research Foundation, Inc. Method and apparatus for multibarrier plasma actuated high performance flow control
JP2009064993A (en) 2007-09-07 2009-03-26 Kawai Musical Instr Mfg Co Ltd Processing method for solution layer
JP2011514980A (en) * 2008-02-08 2011-05-12 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Autostereoscopic display device
CN201805613U (en) * 2010-05-31 2011-04-20 中国航空工业空气动力研究院 Flexible belted plasma generator
WO2011156413A2 (en) * 2010-06-07 2011-12-15 University Of Florida Research Foundation, Inc. Dielectric barrier discharge wind tunnel
CN102036460B (en) * 2010-12-10 2013-01-02 西安交通大学 Tabulate plasma generating device
GB201107692D0 (en) 2011-05-09 2011-06-22 Snowball Malcolm R Sterilisation of packed articles

Also Published As

Publication number Publication date
KR20150114474A (en) 2015-10-12
KR102094056B1 (en) 2020-03-26
JPWO2014119349A1 (en) 2017-01-26
US20150371829A1 (en) 2015-12-24
EP2953431B1 (en) 2018-04-18
CN104938038B (en) 2017-06-16
WO2014119349A1 (en) 2014-08-07
HK1210566A1 (en) 2016-04-22
TW201436649A (en) 2014-09-16
CN104938038A (en) 2015-09-23
EP2953431A1 (en) 2015-12-09
EP2953431A4 (en) 2015-12-09
US9536709B2 (en) 2017-01-03
JP6277493B2 (en) 2018-02-14

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