SG11201504566VA - Combined electrochemical and chemical etching processes for generation of porous silicon particulates - Google Patents

Combined electrochemical and chemical etching processes for generation of porous silicon particulates

Info

Publication number
SG11201504566VA
SG11201504566VA SG11201504566VA SG11201504566VA SG11201504566VA SG 11201504566V A SG11201504566V A SG 11201504566VA SG 11201504566V A SG11201504566V A SG 11201504566VA SG 11201504566V A SG11201504566V A SG 11201504566VA SG 11201504566V A SG11201504566V A SG 11201504566VA
Authority
SG
Singapore
Prior art keywords
generation
chemical etching
porous silicon
etching processes
silicon particulates
Prior art date
Application number
SG11201504566VA
Inventor
Sibani L Biswal
Michael S Wong
Madhuri Thakur
Steven L Sinsabaugh
Original Assignee
Univ Rice William M
Lockheed Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Rice William M, Lockheed Corp filed Critical Univ Rice William M
Publication of SG11201504566VA publication Critical patent/SG11201504566VA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/134Electrodes based on metals, Si or alloys
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • C25F3/12Etching of semiconducting materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • H01M10/0525Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139Processes of manufacture
    • H01M4/1395Processes of manufacture of electrodes based on metals, Si or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/36Selection of substances as active materials, active masses, active liquids
    • H01M4/38Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H01M4/386Silicon or alloys based on silicon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/62Selection of inactive substances as ingredients for active masses, e.g. binders, fillers
    • H01M4/621Binders
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/62Selection of inactive substances as ingredients for active masses, e.g. binders, fillers
    • H01M4/621Binders
    • H01M4/622Binders being polymers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/62Selection of inactive substances as ingredients for active masses, e.g. binders, fillers
    • H01M4/624Electric conductive fillers
    • H01M4/626Metals
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/61Micrometer sized, i.e. from 1-100 micrometer
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/16Pore diameter
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M2004/021Physical characteristics, e.g. porosity, surface area
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M2004/026Electrodes composed of, or comprising, active material characterised by the polarity
    • H01M2004/027Negative electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/36Selection of substances as active materials, active masses, active liquids
    • H01M4/362Composites
    • H01M4/366Composites as layered products
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/10Process efficiency
    • Y02P20/133Renewable energy sources, e.g. sunlight

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Silicon Compounds (AREA)
  • Composite Materials (AREA)
  • Weting (AREA)
SG11201504566VA 2013-01-07 2014-01-07 Combined electrochemical and chemical etching processes for generation of porous silicon particulates SG11201504566VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361749636P 2013-01-07 2013-01-07
PCT/US2014/010438 WO2014107704A1 (en) 2013-01-07 2014-01-07 Combined electrochemical and chemical etching processes for generation of porous silicon particulates

Publications (1)

Publication Number Publication Date
SG11201504566VA true SG11201504566VA (en) 2015-07-30

Family

ID=51061193

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201504566VA SG11201504566VA (en) 2013-01-07 2014-01-07 Combined electrochemical and chemical etching processes for generation of porous silicon particulates

Country Status (9)

Country Link
US (2) US20140193711A1 (en)
EP (1) EP2941783A4 (en)
JP (1) JP2016510360A (en)
KR (1) KR20150104590A (en)
CN (1) CN105264654A (en)
BR (1) BR112015016296A2 (en)
SG (1) SG11201504566VA (en)
TW (1) TWI625885B (en)
WO (1) WO2014107704A1 (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2492167C (en) 2011-06-24 2018-12-05 Nexeon Ltd Structured particles
KR20140128379A (en) 2012-01-30 2014-11-05 넥세온 엘티디 Composition of si/c electro active material
GB2499984B (en) 2012-02-28 2014-08-06 Nexeon Ltd Composite particles comprising a removable filler
GB2502625B (en) 2012-06-06 2015-07-29 Nexeon Ltd Method of forming silicon
GB2507535B (en) 2012-11-02 2015-07-15 Nexeon Ltd Multilayer electrode
US20150372294A1 (en) * 2013-01-29 2015-12-24 Sanyo Electric Co., Ltd. Negative electrode active material for nonaqueous electrolyte secondary battery, negative electrode for nonaqueous electrolyte secondary battery using negative electrode active material, and nonaqueous electrolyte secondary battery using negative electrode
KR101567203B1 (en) 2014-04-09 2015-11-09 (주)오렌지파워 Negative electrode material for rechargeable battery and method of fabricating the same
KR101604352B1 (en) 2014-04-22 2016-03-18 (주)오렌지파워 Negative electrode active material and rechargeable battery having the same
GB2529410A (en) * 2014-08-18 2016-02-24 Nexeon Ltd Electroactive materials for metal-ion batteries
GB2529411A (en) * 2014-08-18 2016-02-24 Nexeon Ltd Electroactive materials for metal-ion batteries
US20170317225A1 (en) * 2014-12-10 2017-11-02 Applied Materials, Inc. System and method for all wrap around porous silicon formation
GB2533161C (en) 2014-12-12 2019-07-24 Nexeon Ltd Electrodes for metal-ion batteries
KR101981609B1 (en) 2015-09-24 2019-05-24 주식회사 엘지화학 Negative electrode active material for lithium secondary battery and method of preparing for the same
WO2017112772A1 (en) * 2015-12-21 2017-06-29 William Marsh Rice University Electrochemical etching of multiple silicon materials
WO2017112880A1 (en) * 2015-12-22 2017-06-29 William Marsh Rice University Formation of porous silicon materials with copper-containing pores
CN106544720A (en) * 2016-10-26 2017-03-29 湖南文理学院 A kind of new method for improving porous silicon longitudinal direction physical arrangement uniformity
CN107140641B (en) * 2017-05-09 2019-05-31 武汉科技大学 A method of three-dimensional porous silicon is prepared by raw material of silicate glass
CN107768645B (en) * 2017-11-28 2020-07-14 吉林大学 Porous nitrogen-doped carbon nanosheet composite negative electrode material and preparation method thereof
CN110294454A (en) * 2019-05-22 2019-10-01 江苏大学 The macro hole silicon structure of resistance p-type and its fast preparation method in a kind of high-aspect-ratio
CN110240118A (en) * 2019-05-22 2019-09-17 江苏大学 A kind of higher middle resistance p-type porous silicon film of porosity and its fast preparation method
CN110331427B (en) * 2019-06-10 2021-04-20 江苏大学 Porous silicon-silver nano dendrite structure and preparation method thereof
CN111403694A (en) * 2019-08-22 2020-07-10 杭州师范大学 Preparation method of carbon-coated porous silicon negative electrode material
EP3979392A4 (en) * 2020-08-04 2022-08-03 Ningde Amperex Technology Limited Electronic device, charging method for electrochemical device, terminal and storage medium
CN113638035A (en) * 2021-07-09 2021-11-12 江苏大学 Porous silicon-silver nano dendrite particle, preparation method thereof and SERS detection method

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6203944B1 (en) * 1998-03-26 2001-03-20 3M Innovative Properties Company Electrode for a lithium battery
EP1132952B1 (en) * 2000-03-10 2016-11-23 Imec Method for the formation and lift-off of porous silicon layers
US6964732B2 (en) * 2000-03-09 2005-11-15 Interuniversitair Microelektronica Centrum (Imec) Method and apparatus for continuous formation and lift-off of porous silicon layers
SE0300482D0 (en) * 2003-02-21 2003-02-21 Amersham Biosciences Ab Inorganic beads with hierarchical pore structures
US7618678B2 (en) * 2003-12-19 2009-11-17 Conocophillips Company Carbon-coated silicon particle powders as the anode material for lithium ion batteries and the method of making the same
DE102007014608B4 (en) * 2007-03-23 2017-04-06 Evonik Degussa Gmbh Process for producing a porous semiconductive film
US8920625B2 (en) * 2007-04-27 2014-12-30 Board Of Regents Of The University Of Texas System Electrochemical method of making porous particles using a constant current density
WO2008134637A1 (en) * 2007-04-27 2008-11-06 Board Of Regents Of The University Of Texas System Porous particles and methods of making thereof
JP5251024B2 (en) * 2007-07-26 2013-07-31 ソニー株式会社 Negative electrode for lithium ion secondary battery and lithium ion secondary battery
KR101375328B1 (en) * 2007-07-27 2014-03-19 삼성에스디아이 주식회사 Si/C composite, anode materials and lithium battery using the same
CA2697846A1 (en) * 2007-09-07 2009-03-12 Inorganic Specialists, Inc. Silicon modified nanofiber paper as an anode material for a lithium secondary battery
US20090186267A1 (en) * 2008-01-23 2009-07-23 Tiegs Terry N Porous silicon particulates for lithium batteries
CA2725827A1 (en) * 2008-06-10 2009-12-17 National Research Council Of Canada Controllable synthesis of porous carbon spheres, and electrochemical applications thereof
CN101609771B (en) * 2008-06-20 2010-12-08 清华大学 Method for preparing transmission electron microscope micro-grids
CN102630355A (en) * 2009-11-03 2012-08-08 安维亚系统公司 High capacity anode materials for lithium ion batteries
GB201009519D0 (en) * 2010-06-07 2010-07-21 Nexeon Ltd An additive for lithium ion rechargeable battery cells
WO2012129544A2 (en) * 2011-03-24 2012-09-27 Leyden Energy, Inc. Anodes with porous or mesoporous silicon particles
KR101114492B1 (en) * 2011-04-15 2012-02-24 세진이노테크(주) Negative active material for lithium secondary battery, method for manufacturing the same, and lithium secondary battery including the same
US9340894B2 (en) * 2011-08-19 2016-05-17 William Marsh Rice University Anode battery materials and methods of making the same

Also Published As

Publication number Publication date
TWI625885B (en) 2018-06-01
JP2016510360A (en) 2016-04-07
US9947918B2 (en) 2018-04-17
TW201438326A (en) 2014-10-01
EP2941783A1 (en) 2015-11-11
US20140193711A1 (en) 2014-07-10
WO2014107704A1 (en) 2014-07-10
BR112015016296A2 (en) 2017-07-11
EP2941783A4 (en) 2016-07-13
US20160293935A1 (en) 2016-10-06
KR20150104590A (en) 2015-09-15
CN105264654A (en) 2016-01-20

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