SG11201501475PA - Integrated type gas supplying apparatus - Google Patents

Integrated type gas supplying apparatus

Info

Publication number
SG11201501475PA
SG11201501475PA SG11201501475PA SG11201501475PA SG11201501475PA SG 11201501475P A SG11201501475P A SG 11201501475PA SG 11201501475P A SG11201501475P A SG 11201501475PA SG 11201501475P A SG11201501475P A SG 11201501475PA SG 11201501475P A SG11201501475P A SG 11201501475PA
Authority
SG
Singapore
Prior art keywords
type gas
integrated type
supplying apparatus
gas supplying
integrated
Prior art date
Application number
SG11201501475PA
Inventor
Mutsunori Koyomogi
Takashi Hirose
Michio Yamaji
Takahiro Matsuda
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG11201501475PA publication Critical patent/SG11201501475PA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/044—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0676—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources
    • G05D7/0682—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources using a plurality of flow sources
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure
SG11201501475PA 2012-11-02 2013-10-18 Integrated type gas supplying apparatus SG11201501475PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012243041A JP5616416B2 (en) 2012-11-02 2012-11-02 Integrated gas supply device
PCT/JP2013/006184 WO2014068886A1 (en) 2012-11-02 2013-10-18 Accumulation-type gas supply device

Publications (1)

Publication Number Publication Date
SG11201501475PA true SG11201501475PA (en) 2015-05-28

Family

ID=50626838

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201501475PA SG11201501475PA (en) 2012-11-02 2013-10-18 Integrated type gas supplying apparatus

Country Status (8)

Country Link
US (1) US9471065B2 (en)
JP (1) JP5616416B2 (en)
KR (1) KR101800684B1 (en)
CN (1) CN104737086B (en)
IL (1) IL237344A (en)
SG (1) SG11201501475PA (en)
TW (1) TWI564502B (en)
WO (1) WO2014068886A1 (en)

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US10087959B2 (en) * 2015-11-10 2018-10-02 Stella Maris, Llc Hydraulic manifold control assembly
US10825659B2 (en) 2016-01-07 2020-11-03 Lam Research Corporation Substrate processing chamber including multiple gas injection points and dual injector
US10651015B2 (en) 2016-02-12 2020-05-12 Lam Research Corporation Variable depth edge ring for etch uniformity control
US10699878B2 (en) 2016-02-12 2020-06-30 Lam Research Corporation Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring
US10147588B2 (en) 2016-02-12 2018-12-04 Lam Research Corporation System and method for increasing electron density levels in a plasma of a substrate processing system
US10438833B2 (en) 2016-02-16 2019-10-08 Lam Research Corporation Wafer lift ring system for wafer transfer
CN109074104B (en) * 2016-04-28 2021-07-16 株式会社富士金 Fluid control system and control method of fluid control device
US10410832B2 (en) 2016-08-19 2019-09-10 Lam Research Corporation Control of on-wafer CD uniformity with movable edge ring and gas injection adjustment
US10927459B2 (en) * 2017-10-16 2021-02-23 Asm Ip Holding B.V. Systems and methods for atomic layer deposition
JP7262745B2 (en) * 2018-12-27 2023-04-24 株式会社フジキン mass flow controller
GB2615414A (en) * 2022-12-22 2023-08-09 Anaero Tech Limited Fluid flow control device

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Also Published As

Publication number Publication date
JP5616416B2 (en) 2014-10-29
TWI564502B (en) 2017-01-01
KR20150036740A (en) 2015-04-07
KR101800684B1 (en) 2017-11-23
US20150234390A1 (en) 2015-08-20
IL237344A (en) 2017-12-31
TW201433733A (en) 2014-09-01
CN104737086B (en) 2017-06-30
CN104737086A (en) 2015-06-24
WO2014068886A1 (en) 2014-05-08
US9471065B2 (en) 2016-10-18
JP2014092929A (en) 2014-05-19
IL237344A0 (en) 2015-04-30

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