WO2008023711A1

WO2008023711A1 - Integrated gas panel apparatus

Info

Publication number: WO2008023711A1
Application number: PCT/JP2007/066211
Authority: WO
Inventors: Kazuhiro Oya; Tatsuya Hayashi
Original assignee: Horiba Stec, Co., Ltd.
Priority date: 2006-08-23
Filing date: 2007-08-21
Publication date: 2008-02-28
Also published as: KR101466998B1; CN101506561B; KR20090053822A; US20120227848A1; TWI435991B; US20090320754A1; JP2012229807A; TW200825315A; JPWO2008023711A1; US8820360B2; US8196609B2; CN101506561A; JP5579783B2; JP5037510B2

Abstract

Provided is an integrated gas panel apparatus which has excellent responsiveness, stabilizes gas concentration, and furthermore, can keep a conventional panel shape as it is. A panel body (2) is composed of at least a main channel block body (32) for forming a main channel (R2), and a branch channel block body (31) for forming a branch channel (R1). The branch channel block bodies (31) are arranged on the both right and left sides to face each other by having the main channel block body (32) at the center.

Description

Specification

Integrated gas panel device

Technical field

[0001] The present invention relates to an integrated gas panel device used in a semiconductor manufacturing process or the like.

Background art

[0002] An integrated gas panel device is a device for finally mixing a plurality of types of gases used in semiconductor device manufacturing or the like while controlling their flow rates, and supplying them to a film formation chamber. It was developed to reduce the gas supply control line configured with the previous piping structure. Specifically, as shown in Patent Document 1, an example is configured such that a gas control device such as a valve or a mass flow controller can be attached to a panel body having a substantially face plate shape. Inside the panel body, for example, a plurality of branch flow paths to which the gas control device is attached, and a single main flow path configured such that the branch flow paths are connected and the respective gases flowing therethrough merge. , Is formed.

[0003] Various improvements have recently been made to such an integrated gas panel device. For example, a flexible flow path configuration corresponding to the number of types of gas used can be taken. In addition, there are known ones configured such that the panel body can be assembled by appropriately connecting several types of block bodies.

Patent Document 1: JP-A-10-169881

Disclosure of the invention

Problems to be solved by the invention

[0004] By the way, in this type of conventional apparatus, branch flow paths are arranged in parallel on one side of the main flow path, and the junction part of each branch flow path and the main flow path is the main flow in the order of the branch flow paths. They are arranged at almost equal intervals from the upstream to the downstream of the road.

[0005] However, in such a configuration, for example, when there are a large number of branch flow paths, the main flow path length increases correspondingly, and the arrival time of the gas to the final outlet increases, which adversely affects the response of the fluid circuit system. give. The effect is noticeable when the branch channel is located upstream of the main channel. It is a gas with a small amount of power or gas. As a result, it becomes difficult to sufficiently respond to a process that requires a short time and high-speed response. In addition, due to poor responsiveness, the gas concentration tends to become unstable!

[0006] Particularly in the semiconductor process, shortening the process time by high-speed gas treatment in the manufacturing process (such as shortening the exhaust time until the start-up stability and the purge time at the end) is one of the important factors. Problems due to responsive deterioration are not preferable.

[0007] Further, for example, in the semiconductor manufacturing process, it is required that a plurality of types of finally supplied gases are sufficiently mixed. This is because if the mixed state of the supply gas is uneven, the quality of the device will be deteriorated. On the other hand, conventionally, the pipe length after this integrated gas panel device is increased to promote mixing. Or, a device that adds a gas mixer to the subsequent stage is added.

[0008] However, in such a configuration, although sufficient mixing can be performed, the response is adversely affected by the increase in piping capacity, and as described above, the process requires a short time and high speed response. However, it is difficult to sufficiently respond to the problem. In addition, as the response becomes worse, the rise of gas concentration and stability will be affected. Furthermore, when the gas flow rate from a part of the branch flow paths is small, the arrival time of the gas becomes long, resulting in poor responsiveness and low pressure due to fluctuations in the pressure of the gas flowing through the main flow path. In some cases, the combined flow rate of the flow gas may change or the final gas concentration may become unstable.

[0009] In addition, in this type of conventional apparatus, branch flow paths are arranged in parallel on one side of the main flow path, and the confluence portion of each branch flow path and the main flow path is the arrangement of the branch flow paths. Since the pipes are arranged at almost equal intervals in order from the upstream to the downstream of the main flow path, the final flow of the gas in each branch flow path is the one that merges upstream and the downstream of the main flow path. There is a problem that the time to reach the exit is different. In this case, the arrival time of the gas from the branch channel located at the most upstream side becomes long, and this gas arrival time determines the response of the fluid circuit system.

[0010] Furthermore, since the synchronicity cannot be ensured in the gas arrival time from each branch channel, the gas concentration distribution tends to become unstable in the rising state.

In addition, when there are a large number of branch channels, the length of the main channel increases accordingly, which is also the fluid circulation. It adversely affects the responsiveness of the road system.

[0011] In other words, with the conventional configuration, it is difficult to sufficiently respond to a process that requires a short time and high-speed response, and the gas concentration tends to become unstable. It happens together.

[0012] The present invention has been made in order to solve the problem of force and trouble, and can obtain a remarkably excellent response and can stabilize the gas concentration. Moreover, the conventional panel type shape can be obtained. Its main purpose is to provide an integrated gas panel device that can be maintained as it is, without complicating or enlarging the structure or even being made compact.

Means for solving the problem

[0013] That is, the integrated gas panel device according to the invention of claim 1 is provided with a plurality of branches configured to control a gas flowing therein by providing a gas control device such as a valve or a mass flow controller in the middle. A main flow path, a main flow path where gases from the branch flow paths flow and merge, and a manifold configured to form the branch flow path and the main flow path by assembling a plurality of block bodies. A holding-type panel body, wherein the panel body is disposed so as to face the left and right sides of the main flow path block body that forms the main flow path, and the main flow path block body as a center. And a branch channel block body that forms the branch channel.

[0014] With such a configuration, the branch channel force that has been disposed only on one side of the main channel in the related art is disposed on the left and right of the main channel, so that the length of the main channel can be shortened. As a result, the arrival time of the gas to the final outlet can be shortened, and the responsiveness can be improved. This also contributes to stabilization of the gas concentration. In addition, since the block bodies forming the respective flow paths can be arranged in a plane to form a panel body similar to the conventional one, it is possible to easily replace the conventional apparatus.

[0015] As the most preferable mode for shortening the main flow path, each joining portion of the one branch flow path and the other branch flow path facing each other across the main flow path with respect to the main flow path is in the extending direction of the main flow path. And what is set in almost the same place. The almost same place in the extending direction of the main flow path means that the merged portion is completely matched, and includes the pipe side wall portions facing each other and the orthogonal pipe side wall portions of the main flow path. [0016] In order to further improve the responsiveness and gas concentration stability, the main channel block body is formed with an insertion hole communicating with the main channel inside thereof, and the outlet portion of the branch channel The branch channel block body having a portion inside is provided with a projecting pipe that projects the branch channel outward, and the projecting pipe is inserted into the insertion hole so that the main channel block body is provided. In a state where the branch channel block body is assembled, it is preferable that the tip of the protruding pipe is configured to protrude further inward from the inner surface of the main channel.

[0017] Further, the integrated gas panel device according to the invention of claim 5 is configured such that a gas control device such as a valve or a mass flow controller is provided on the way to control the gas flowing inside. A plurality of branch channels, a main channel into which gas from the branch channels flows, and a panel body configured such that the branch channels and the main channel are formed inside by assembling a plurality of block bodies; Among the block bodies, the main channel block body having the main channel therein is formed with a penetration hole communicating with the main channel therein, and the branch channel A branch pipe having a branch flow passage projecting outward is provided in a branch flow path block body having an outlet portion of the main pipe, and the projecting pipe is inserted into the insertion hole so as to be used for the main flow path. A block body and a branch channel block body were assembled. In state, the tip of the protruding pipe characterized that you have configured to protrude further inward from the inner surface of the main channel.

[0018] In such a case, at the connection portion between the branch flow channel and the main flow channel, the protruding pipe that is the outlet of the branch flow channel protrudes into the main flow channel, and the diameter of the flow channel is narrowed. The gas in the branch channel is strongly drawn into the main channel by the choke effect, and the gas is diffused by the turbulent flow generated behind the protruding pipe. Mixing with the gas in the branch channel is greatly promoted.

[0019] Therefore, compared with the conventional one, the gas mixing in the gas panel device can be sufficiently performed, and the pipe length and the gas mixer capacity to be arranged in the subsequent stage can be reduced. By omitting or omitting, it becomes possible to make the speed response much superior to the conventional one. In addition, this makes it possible to improve gas concentration stability at the time of start-up.

[0020] Further, even if the gas in the branch channel is a small flow rate, it is reliably drawn into the main channel. That is, the ability to perform S, and the fluctuation of the flow rate at the time of the merging of the small flow rate gas occurs, and from this point, the gas concentration stability can be improved.

[0021] Further, since it can be configured basically by simply projecting a protruding pipe of a predetermined length from the branch channel block body, there is little structural complexity, and in the assembled state, this protruding pipe is Since it is hidden inside, it can be maintained in the same shape as the conventional one.

[0022] In order to facilitate gas mixing without difficulty, it is preferable that the end of the protruding pipe is configured to protrude to the vicinity of the center of the main flow path when viewed in cross section.

[0023] Further, the three-dimensionally integrated gas panel device according to the invention of claim 8 is provided with a plurality of gas control devices such as valves and mass flow controllers, which are arranged in the middle to control the gas flowing inside. Branch flow channel, one main flow channel into which gas flows from these branch flow channels and merges, and a branch flow that forms a long panel with one branch flow channel formed inside and the bottom surface as the mounting surface A central block body, and a central block body that holds a plurality of branch flow path block bodies so that their longitudinal directions are parallel to each other by a holding surface formed on a side peripheral surface. Forming intermediate flow channels extending from the merging portion set in the main flow channel toward the branch flow channel of the branch flow channel block body attached to the side peripheral surface of the central block body. That you are trying to form Features.

[0024] If this is the case, the branch channel block bodies that have been developed in a flat shape in the past are arranged three-dimensionally, so the channel length can be reduced, the channel length can be reduced, and responsiveness can be improved. The ability to let S In addition, because of the three-dimensional configuration, the degree of freedom of arrangement of each flow path is increased, and by improving the flow path length and merging site, it is possible to improve the simultaneity of the gas merging timing and consequently the gas concentration stability. be able to.

More specifically, in order to improve responsiveness by shortening the main flow path, it is preferable that the merging portion is set at one position of the main flow path. In particular, since the outlet port is usually attached to the end face of the central block body, the main flow path length can be shortened if the confluence part is set, for example, at the end of the central block body, so that the response can be improved as much as possible.

[0026] In order to improve the synchronism of gas merging timing, each holding surface forms a rotationally symmetric shape about the axis of the central block body, and the merging portion It is preferable that the intermediate flow paths are provided on the axis and are set to have the same length.

[0027] In that case, if the main flow path is provided along the axis, it can contribute to the reduction of the main flow path length as much as possible.

[0028] In order to further improve the simultaneity, the diameter of the intermediate flow path and the flow path diameter in the branch flow path, especially after the mass flow controller, are varied according to the gas flow rate (the smaller the gas flow rate, the smaller the diameter). Just make it smaller).

[0029] As a specific embodiment in consideration of manufacturability, the center block body is preferably a regular polygonal column!

[0030] Specific embodiments in which the effects of the present invention are particularly remarkable and their usefulness are exhibited include those used in semiconductor manufacturing processes.

The invention's effect

[0031] According to the invention according to claim 1 configured as described above, since the main flow path length can be shortened, it is possible to improve the gas concentration stability at the time of responsiveness and rising. Moreover, since the same planar shape as the conventional one can be maintained, the conventional device can be replaced without difficulty.

[0032] According to the invention of claim 5, since the mixing of the gas flowing through the main flow channel with the gas in the branch flow channel is greatly promoted, the length of the pipe to be arranged in the subsequent stage and the gas mixer By reducing or omitting the capacity, it is possible to improve the high-speed response as compared with the conventional one, and also improve the gas concentration stability at the time of start-up. Furthermore, it is basically possible to construct a protruding pipe of a predetermined length from the branch channel block body, so that there is little structural complexity, and in the assembled state, this protruding pipe is inside. Since it is hidden, it can be maintained substantially the same as the conventional one.

[0033] According to the invention of claim 8, as described above, the branch channel block bodies are three-dimensionally arranged, so that compactness and improvement in design freedom can be achieved. As a result, Responsiveness and gas concentration stability can be improved.

Brief Description of Drawings

FIG. 1 is an overall perspective view of an integrated gas panel device according to a first embodiment of the present invention. It is.

FIG. 2 is a fluid circuit diagram of the integrated gas panel device in the same embodiment.

FIG. 3 is a schematic view showing a connection portion in the same embodiment as seen from a plane direction.

FIG. 4 is a schematic view showing a connecting portion of an integrated gas panel device according to a modification of the embodiment, as viewed from the plane direction.

[Fig. 5] Fig. 5 is a longitudinal sectional view of an essential part showing a main flow path of the integrated gas panel device in the same modification.

FIG. 6 is an overall perspective view of an integrated gas panel device according to a second embodiment of the present invention.

FIG. 7 is a fluid circuit diagram of the integrated gas panel device in the same embodiment.

FIG. 8 is a partial cross-sectional view of the main part of the integrated gas panel device in the same embodiment.

FIG. 9 is an exploded perspective view showing a connection portion in the same embodiment.

FIG. 10 is a fragmentary sectional view of an essential part of the integrated gas panel device in the same embodiment.

FIG. 11 is an overall perspective view showing the interior of a three-dimensionally integrated gas panel device according to a third embodiment of the present invention with a part broken away.

FIG. 12 is a fluid circuit diagram of the three-dimensionally integrated gas panel device in the same embodiment.

FIG. 13 is a schematic lateral end view showing a merging site in the same embodiment.

FIG. 14 is a schematic cross-sectional view of a central block body in a modified example of the same embodiment.

BEST MODE FOR CARRYING OUT THE INVENTION

[0035] Hereinafter, some embodiments of the present invention will be described with reference to the drawings. In each embodiment, the corresponding members have the same reference numerals, even if they have the same function, the shapes may be different, or vice versa. .

In the first embodiment, reference is made to FIGS. An integrated gas panel device 1 according to this embodiment constitutes a part of a semiconductor manufacturing system. As shown in FIG. 1, an outline of various gas for film formation is supplied from a gas supply source (not shown). Each is introduced, mixed and used to supply a semiconductor film forming chamber (not shown).

[0037] In view of this, the integrated gas panel device 1 will be described first with reference to FIG. 2, including the fluid circuit structure, including the peripheral circuit.

The integrated gas panel device 1 is provided with a plurality of branch channels R1 arranged in parallel in terms of a circuit, and one main channel R2 to which the outlets of the branch channels R1 are connected.

[0038] Each branch channel R1 is connected to an inlet port PI at the base end thereof, and the gas supply is performed via an external pipe (not shown! /) Connected to the inlet port PI. From the source, several types of gases are fed into each branch channel R1. A gas control device such as a valve V or a mass flow controller MFC is arranged in the middle of each branch flow path R1, and the operation of these controls the flow rate of gas flowing through each branch flow path R1 and switching to the purge gas. Let's do it like a wholesale.

[0039] On the other hand, the main flow path R2 has a single flow path structure as described above, and the connection portion CN with each branch flow path R1 described above is not concentrated at one place, but along the flow. It is provided to fly away. In this embodiment, a gas mixer MIX that stirs and mixes the combined gas is disposed downstream of the integrated gas panel device 1, that is, downstream of the main flow path R2, and further downstream of the gas mixer. A flow rate controller FRC that distributes the gas mixed by MIX to a predetermined flow rate ratio and outputs it to each film forming chamber from the outlet port PO is provided. These gas mixer MIX, flow rate controller FRC, outlet port PO, etc. are not shown in Fig. 1.

[0040] With such a configuration, the gas supplied from each gas supply source is introduced into the main flow path R2 with the flow rate controlled in the branch flow path R1 of the integrated gas panel device 1, and then mixed with the gas. MIX is thoroughly mixed by the mixer MIX and output from each outlet port PO at a predetermined flow rate ratio from the flow rate controller FRC.

In addition to the main flow path R2 and the branch flow path R1, FIG. 2 also shows the purge gas flow path, the inlet port PX, the outlet port PY, and the like. In addition, the member indicated by the symbol MFM Is a verifier to check whether the flow rate indicated by the mass flow controller is correct.

Next, the physical configuration of the integrated gas panel device 1 will be described with reference to FIG.

[0043] The gas panel device 1 includes a panel body 2 having a substantially plate shape in which the main flow path R2 and the branch flow path R1 are formed, and the gas control device V attached to the panel body 2. It is equipped with MFC and additional piping equipment such as inlet port PI.

As shown in FIG. 1, the panel body 2 has a face plate shape configured by connecting a plurality of block bodies in a plane. Various forces are used as this block body. Here, at least the branch channel block body 31 constituting the branch channel R1 and the main channel block body 32 constituting the main channel R2 are used.

[0045] The branch channel block body 31 has a flat rectangular flat plate shape, and there are some types having different internal pipes, such as those for mounting valves and those for mounting mass flow controllers. One branch channel R1 is a force formed by connecting a plurality of such branch channel block bodies 31 in series to form a long plate shape. As described in the circuit configuration, a plurality of branch flow paths R1 are arranged in parallel by arranging the rows of bodies 31 (hereinafter also referred to as branch flow block block rows 5) side by side to form a face plate. Like! /

[0046] The main channel block body 32 has, for example, a single long plate shape, and the main channel R2 extends along the longitudinal direction (stretching direction) thereof. And it is laminated | stacked on the lower surface of the block body 31 for branch flow paths (it is perpendicular to the plane direction of the panel body 2), and is connected. At this time, the extending direction of the main flow path block bodies 32 is orthogonal to the extending direction of the branch flow path block array 5.

In this embodiment, however, a plurality (for example, four on each side) of branch flow block bodies 5 are arranged symmetrically about the main flow path block 32 as a center. As a result, the branch flow path R1 is symmetrically arranged on both the left and right sides of the main flow path R2 with the force S shown in FIG. 3 as a schematic diagram viewed from the plane direction.

[0048] Further, each connecting portion (hereinafter also referred to as a merged portion) CN of the one branch channel R1 and the other branch channel R1 facing each other across the main channel R2 with respect to the main channel R2 is the main stream. Road R2 stretch It is set at the same position in the direction and on opposite sides of the main channel R2. Note that one of the connection portions CN may be a bottom portion of the main flow path and the other may be a side portion or the like for convenience of design such as arrangement of parts as long as they are at the same position in the extending direction of the main flow path R2.

[0049] According to the gas panel device 1 configured as described above, the branch flow channel R1 that has been conventionally disposed only on one side of the main flow channel is disposed on the left and right of the main flow channel R2. The length of the region where each merging portion CN is provided in the main channel R 2 can be reduced to about half of the conventional length. As a result, it is possible to improve the responsiveness because the time to reach the final outlet of the gas can be improved, and at the same time, the stabilization of the gas concentration at the time of rising etc. can be improved with the force S. .

In addition, since the block body is arranged in a plane to form a panel body 2 similar to the conventional one and the planar shape is maintained, for example, it can be easily replaced with an existing apparatus.

[0050] Next, a modification of the present embodiment will be described (in the following modifications, members corresponding to those of the above-described embodiment are denoted by the same reference numerals!).

[0051] For example, as schematically shown in FIG. 4, the left and right branch channels R1 may be connected in a staggered manner to the main channel R2. With such a configuration, each merging portion CN force with respect to the main channel between one branch channel and the other branch channel facing each other is a different place in the extending direction of the main channel R2, compared with the case of the above embodiment. The length of the main flow path R2 becomes slightly longer. However, compared with the conventional case where the branch channel is arranged only on one side of the main channel, the length of the main channel R2 can be remarkably shortened, and almost the same effect as the previous embodiment is expected. it can.

[0052] Further, with such a configuration, as will be described below, when the outlet pipe 311 of the branch flow path R1 is projected into the main flow path R2 by a predetermined length at the junction site CN, the outlet pipe 311 Can be configured without any difficulty in causing the two to interfere with each other.

[0053] An example of the structure of the confluence portion CN will be described in detail here.

In this example, as shown in FIG. 5, an insertion hole 321 is opened on the surface of the main channel block body 32, and the insertion hole 321 is communicated with the internal main channel R2, while the branch channel Branch block 31 having the outlet portion of the branch channel R1 The body 31 (1) is provided with a cylindrical outlet pipe (hereinafter also referred to as a protruding pipe) 311 with the branch flow path Rl protruding from the surface (which may be a separate body! /). /!

[0054] Then, in the state where the protruding pipe 311 is inserted into the insertion hole 321 and the main flow path block body 32 and the branch flow path block body 31 (1) are assembled, the tip of the protruding pipe 311 is The main channel R2 is configured to protrude further inward from the inner side surface R2a (shown in FIG. 5). The projecting dimension is, for example, about the tip force of the projecting pipe 311 and the vicinity of the center of the main flow path R2 in the cross section.

In this assembled state, the main channel block body 32 and the branch channel block body 31 are also provided.

A seal member 6 such as an O-ring is interposed between the opposing planes of (1) to make a close contact in the thrust direction, preventing gas leakage at this connection CN.

[0056] With this configuration, at the connection portion CN between the branch flow path R1 and the main flow path R2, the protruding pipe 311 that is the outlet of the branch flow path R1 protrudes into the main flow path R2 to narrow the diameter of the flow path. As a result, the gas flow rate in the main flow path R2 in this portion increases and the pressure decreases, so that the gas in the branch flow path R1 can be strongly drawn into the main flow path R2. The drawn gas is diffused by turbulent flow or the like generated behind the protruding pipe 311 in the main flow path R2, so that the force S can be more uniformly mixed with the gas flowing through the main flow path R2. Become. In other words, compared to the conventional one, the gas can be sufficiently mixed in the panel body 2 in advance.

[0057] Therefore, the pipe length after the connection portion, which has been set long in order to sufficiently mix the gas in the past, can be shortened, and the capacity of the gas mixer MIX can be reduced. In some cases, this can be omitted. The responsiveness of the fluid circuit system can be further improved as much as the flow path capacity is reduced in this way.

That is, if this configuration is applied to the above-described embodiment, the length at the branch flow path merging point of the main flow path R2 and the subsequent flow path length can be shortened at the same time, thereby improving the responsiveness. Based on this, it will be possible to dramatically improve the gas concentration stability at the time of start-up.

[0059] Further, as described above, even if the gas in the branch channel R1 has a small flow rate, Since the gas can be reliably drawn into R2, the final stability of the mixed gas concentration can be further improved from this point.

[0060] In addition, the structurally different from the conventional one is that the branch channel block body is provided so as to be opposed, and the branch pipe 311 having a predetermined length is projected from the branch channel block body 31. Since it is only a part, it does not cause any structural complication, and in the assembled state, this protruding pipe 311 is hidden inside, so that this joint is made to be externally compatible with the conventional one. be able to.

As another modified example, for example, the inner diameter of each branch channel may be set according to the flow rate of each gas (the smaller the flow rate, the smaller the inner diameter). As a result, the flow rates of each gas become more equal, and the simultaneity of the merging timing of each gas in the main flow path can be improved compared to the conventional one, so that the mixed gas can be supplied in a shorter time regardless of the gas flow rate. Become

Yes

[0062] The block body may be not only a square shape but also a disk shape, for example. However, for a thrust seal structure, it is preferable to have a flat portion at the opposite location.

A second embodiment of the present invention will be described below with reference to FIGS. The integrated gas panel apparatus 1 according to this embodiment constitutes a part of a semiconductor manufacturing system. As shown in FIG. 6, an outline of various gas for film formation is supplied from a gas supply source (not shown). Each is introduced, mixed and used to supply a semiconductor film forming chamber (not shown).

[0064] In view of this, first, the fluid circuit structure of the integrated gas panel device 1 including the peripheral circuit will be described with reference to FIG.

This integrated gas panel device 1 is provided with a plurality of branch channels R1 provided in parallel and one main channel R2 to which the outlets of the branch channels R1 are connected. .

[0066] Each branch channel R1 has an inlet port PI connected to the base end thereof, and the gas supply source (not shown) is connected via an external pipe (not shown) connected to the inlet port PI. Therefore, several kinds of gases are sent to each branch channel R1. Gas control devices such as valve V and mass flow controller MFC are arranged in the middle of each branch channel R1. Through these operations, the flow rate of gas flowing through each branch channel R1 and switching to purge gas can be controlled.

[0067] On the other hand, the main flow path R2 has a single flow path structure as described above, and the connection portion CN with each branch flow path R1 described above is not concentrated at one place, but along the flow. It is provided to fly away. In this embodiment, a gas mixer MIX that stirs and mixes the combined gas is disposed downstream of the integrated gas panel device 1, that is, downstream of the main flow path R2, and further downstream of the gas mixer. A flow rate controller FRC that distributes the gas mixed in MIX to a predetermined flow rate ratio and outputs it to each film forming chamber from the outlet port PO is provided. These gas mixer MIX, flow rate controller FRC, outlet port PO, etc. are not shown in FIG.

[0068] With such a configuration, the gas supplied from each gas supply source is introduced into the main channel R2 after being controlled in flow rate in the branch channel R1 of the integrated gas panel device 1, and then mixed with the gas. MIX is thoroughly mixed by the mixer MIX and output from each outlet port PO at a predetermined flow rate ratio from the flow rate controller FRC.

[0069] In addition to the main flow path R2 and the branch flow path Rl, FIG. 7 also describes the purge gas flow path, the inlet port PX, the outlet port PY, and the like. The member indicated by the symbol MFM is a verifier for checking whether the flow rate indicated by the mass flow controller is correct.

Next, the physical configuration of the integrated gas panel apparatus 1 will be described with reference to FIG.

[0071] The gas panel device 1 includes a panel body 2 having a substantially plate shape in which the main flow path R2 and the branch flow path R1 are formed, and the gas control device attached to the panel body 2. In addition, it is equipped with attached plumbing tools such as inlet port PI.

[0072] As shown in Fig. 6, the panel body 2 has a face plate shape constituted by connecting a plurality of block bodies in a plane. Various forces are used as this block body. Here, at least the branch channel block body 31 constituting the branch channel R1 and the main channel block body 32 constituting the main channel R2 are used.

[0073] The branch channel block body 31 has a flat rectangular flat plate shape and is mounted on a valve. There are some types with different internal pipes, such as those for mounting mass flow controllers. One branch channel R1 is a force formed by connecting a plurality of such branch channel block bodies 31 in series to form a long plate shape. As described in the circuit configuration, a plurality of branch flow paths R1 are formed in parallel by arranging the rows of bodies 31 (hereinafter also referred to as branch flow block block rows 5) side by side to form a face plate. Like! /

[0074] The main flow path block body 32 has, for example, a single long plate shape, and a main flow path R2 is formed inside along the longitudinal direction thereof. Then, they are stacked and connected to the lower surface of the branch channel block body 31 vertically (in a direction perpendicular to the plane direction of the panel body). At this time, the extending direction of the main channel block bodies 32 is orthogonal to the extending direction of the branch channel block bodies 5. As a result, as described above, the outlet of each branch channel R1 is connected to the main channel R2.

Accordingly, in this embodiment, the following configuration is adopted for the connection portion CN between the main channel R2 and the branch channel R1.

That is, as shown in FIG. 8 to FIG. 10, an insertion hole 321 is opened in the upper plane of the main channel block body 32 so that the insertion hole 321 communicates with the internal main channel R2. On the other hand, the branch channel R1 is connected to the most downstream side of the branch channel block body 31, that is, the branch channel block body 31 (1) having the outlet portion of the branch channel R1 from the lower plane. The protruding cylindrical protruding pipe 311 is integrally provided. The outer diameter of the protruding pipe 311 and the inner diameter of the insertion hole 321 are substantially matched.

[0077] Then, when the protruding pipe 311 is inserted into the insertion hole 321 and the main channel block body 32 and the branch channel block body 31 (1) are assembled, the tip of the protruding pipe 311 is The main channel R2 is configured to protrude further inward from the inner side surface R2a (shown in FIG. 10). The projecting dimension is, for example, such that the tip of the projecting pipe 311 reaches the vicinity of the center of the main flow path R 2 in a cross section.

Further, in this assembled state, a sealing member 6 such as an O-ring is interposed between the opposing planes of the main flow path block body 32 and the branch flow path block body 31 (1) so as to be brought into close contact in the thrust direction. This prevents gas leakage at the connection CN. Reference numeral 322 denotes a countersink portion that is provided in the main flow path block body 32 and accommodates the seal member 6. This counterclock The section 322 may be provided in the branch channel block body 31! /.

[0079] According to the present embodiment configured as described above, the protruding pipe 311 that is the outlet of the branch channel R1 projects into the main channel R2 at the connection portion CN between the branch channel R1 and the main channel R2. Since the diameter of the flow path is narrowed, the gas flow rate in the main flow path R2 at this portion increases and the pressure decreases, and the gas in the branch flow path R1 can be strongly drawn into the main flow path R2. The drawn gas is diffused by the turbulent flow generated behind the protruding pipe 311 in the main flow path R2, so that the force S can be more uniformly mixed with the gas flowing through the main flow path R2. . In other words, compared with the conventional one, it is possible to sufficiently mix the gas in the panel body 2 in advance, and the capacity of the gas mixer MIX in the subsequent stage can be reduced or omitted in some cases. It is also possible to do. As a result, the responsiveness can be greatly improved. This also improves the gas concentration stability when starting up.

[0080] Furthermore, even if the gas in the branch flow path R1 has a small flow rate, it can be reliably drawn into the main flow path R2, so that the final concentration stability of the mixed gas can also be improved from this point. Use the force S for further improvement.

[0081] In addition, the structurally different from the conventional one is only the portion that protrudes the protruding pipe 311 having a predetermined length from the branch channel block body 31, so that the structure is hardly complicated. In the assembled state, this protruding pipe 311 is hidden inside, so that it can be made externally compatible with the conventional one.

[0082] In addition, a thrust seal structure in which the seal member 6 is sandwiched between the opposing surfaces of the block bodies 31 (1) and 32 is adopted! /, So that reliable gas leakage at the connection portion CN is achieved. It can be easily prevented.

Note that the present embodiment may be modified. For example, if the outer diameter of the protruding pipe is at least smaller than the inner diameter of the main flow path, the projecting dimension to the main flow path is a balance between the force and gas flow rate that were preferred around the center of the main flow path this time. What is necessary is just to set it as the optimal for mixing.

[0084] Further, the inner diameter of each protruding pipe (preferably the inner diameter of the branch flow channel after the mass flow controller) is set according to the flow rate of each gas (the smaller the flow rate, the smaller the inner diameter). May be. As a result, even with a small flow rate gas, the flow rate can be made equal to that of other gases and the arrival time can be shortened, so that the simultaneity of the merging timing of each gas in the main flow path can be improved. That is, the mixed gas can be supplied in a shorter time regardless of the gas flow rate.

[0085] The protruding pipe is not limited to a cylindrical shape, and may be a polygonal tube, and various other shapes are also conceivable.

In addition, the projecting pipe may be provided separately from the branch channel block body that is simply provided integrally with the branch channel block body and may be assembled.

[0086] The block body may be not only a square shape but also a disk shape, for example. However, for a thrust seal structure, it is preferable to have a flat portion at the opposite location.

[0087] <Third Embodiment>

A third embodiment of the present invention will be described below with reference to FIGS.

The three-dimensionally integrated gas panel device 1 according to this embodiment constitutes a part of a semiconductor manufacturing system. As shown in FIG. 11, the various gases for film formation are not illustrated. Each gas is introduced from a gas supply source, mixed and supplied to a semiconductor deposition chamber (not shown).

[0089] Therefore, the three-dimensionally integrated gas panel apparatus 1 will first be described with reference to FIG. 12, including its peripheral circuit, including its fluid circuit structure.

[0090] The three-dimensionally integrated gas panel device 1 includes a plurality of branch channels R1 arranged in parallel in terms of a circuit, and one main channel R2 to which the outlets of the branch channels R1 are connected. A plurality of intermediate flow paths R3 communicating with the branch flow paths R1 and the main flow path are provided.

[0091] Each branch channel R1 is connected to an inlet port PI at the base end thereof, and the gas supply is performed via an external pipe (not shown! /) Connected to the inlet port PI. From the source, several types of gases are sent to each branch channel R1. A gas control device such as a valve V or a mass flow controller MFC is arranged in the middle of each branch flow path R1, and the operation of these controls the flow rate of gas flowing through each branch flow path R1 and switching to the purge gas. Let's do it like a wholesale.

[0092] The intermediate flow path R3 is continuously connected to the tip (exit) of each branch flow path R1, and connects each branch flow path R1 to the main flow path R2. [0093] As described above, the main flow path R2 has a single flow path structure. In this embodiment, a gas mixer MIX that stirs and mixes the combined gas is disposed downstream of the main flow path R2, that is, downstream of the three-dimensionally integrated gas panel device 1, and further, gas mixing is performed downstream thereof. A flow rate controller FRC that distributes the gas mixed in the mixer MIX to a predetermined flow rate and outputs the gas to each film forming chamber from the outlet port PO is provided. Note that these gas mixer MIX, flow rate controller FRC, outlet port PO, etc. are not shown in FIG.

[0094] With such a configuration, the gas supplied from each gas supply source is flow-controlled in the branch channel R1 of the three-dimensionally integrated gas panel device 1 and then the intermediate channel R3. After that, it is introduced into the main flow path R2, and then thoroughly mixed by the gas mixer MIX, and output from each outlet port PO at a predetermined flow rate ratio from the flow rate ratio controller FRC.

In addition to the main flow path R2 and the branch flow path R1, FIG. 12 also shows the purge gas flow path, the inlet port PX, the outlet port PY, and the like. Also, for the member indicated by the symbol MFM, check whether the flow rate indicated by the mass flow controller MFC is correct! /

Next, the physical configuration of the three-dimensionally integrated gas panel device 1 will be described with reference to FIGS. 11 and 13.

[0097] This three-dimensionally integrated gas panel device 1 includes a branch channel block body 3 having a long flat panel shape in which one branch channel R1 is formed, and a main channel R2 and an intermediate channel R3. A center block body 4 having a regular polygonal column shape (in this case, a regular octagonal column shape) formed with the gas control devices V and MFC attached to the branch channel block body 3 and an inlet port PI, etc. And plumbing fixtures. Here, one branch channel R1 means one of a plurality of branch channels.

The branch channel block body 3 is constituted by a plurality of series-connected block body elements 31 each having a flat rectangular plate shape. There are several types of block body elements 31 with different internal piping, such as those for valves and those for mass flow controllers. Of course, the branch channel block body 3 may not be divided and may be configured as a single sheet.

[0099] As described above, the central block body 4 is a regular octagonal prism having a rotationally symmetric shape about the axis. The bottom surface 3a, which is the mounting surface of each branch channel block body 3, is held facing each side peripheral surface 41, which is a holding surface, respectively.

[0100] A main channel R2 is provided along the axis C at one end of the central block body 4. An outlet port P for connection with an external pipe is attached to the front end (one end on the end side) of the main flow path R2, and protrudes from the end face 4a of the central block body 4. In addition, a merging portion CN is set at the base end (one end opposite to the end) of the main flow path R2, and the central block body 4 is perpendicular to the axis C from the merging portion CN. The intermediate flow path R3 is extended radially toward each side peripheral surface 41 of the. These intermediate flow paths R3 have the same length.

[0101] If this is the case, the flow path length from each branch flow path R1 to the main flow path R2 (the length of the intermediate flow path R3) is equal, and is also provided at one location of the main flow path R2. Since all of the intermediate flow path R3 merges at the merging site CN, the distance from each branch flow path R2 to the final outlet port P becomes equal. As a result, the simultaneity of the arrival times of the gases can be significantly improved.

[0102] Further, since the main flow path R2 is located at the end of the central block body 4 in the vicinity of the outlet port P and the distance thereof is very short, the responsiveness is very excellent. This is an effect that made use of three-dimensional structural characteristics.

[0103] Furthermore, since various members that have been developed in a planar shape are arranged three-dimensionally, compaction is also possible.

[0104] Note that, of course, the present embodiment can be modified.

[0105] For example, in order to further improve the simultaneity, the diameter of the intermediate flow path and the flow path diameter in the branch flow path, particularly after the mass flow controller, are varied according to the gas flow rate (the smaller the gas flow rate, the smaller the diameter). Do it). In addition, it is possible to vary the length of the intermediate flow path according to the gas flow rate (the gas flow rate is small! /, The shorter the length is). In this case, for example, the intermediate block body is left in a rotationally symmetric shape, and the merging portion is deviated from the axis of the intermediate block body, or the intermediate block body itself has an irregular shape. Thus, the length of the intermediate flow path may be varied.

[0106] Further, the center block body is not limited to a single structure, and may be configured by combining a plurality of block body elements. In terms of shape, regular polygons The main point is not limited to the column, but it is only necessary that each holding surface 41 forms a plurality of rotationally symmetric shapes about the axis. An example is shown in FIG.

[0107] In addition, due to manufacturing convenience and shape limitations, there is no need for a single confluence, and it may be provided at a plurality of locations slightly shifted on the main flow path as long as the effect of responsiveness does not substantially become a problem. Good.

Others [0108] The present invention may appropriately combine a part of the configurations described in the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

Claims

The scope of the claims

[1] Gas control devices such as valves and mass flow controllers are provided along the way to control the gas flowing in the interior, and multiple branch flow paths and gas from these branch flow paths flow in. An integrated gas panel device comprising: one main flow path to be merged; and a manifold type panel body configured such that the branch flow path and the main flow path are formed inside by assembling a plurality of block bodies. Ni! /

The branch channel block body forming the branch channel is arranged such that the panel body is opposed to the main channel block body forming the main channel and the main channel block body as a center. And an integrated gas panel device.

[2] In the present invention, each joining portion of the one branch channel and the other branch channel facing each other across the main channel with respect to the main channel is set at substantially the same place in the extending direction of the main channel. Term

The integrated gas panel apparatus according to 1.

[3] The integrated gas panel apparatus according to [1], wherein an outlet pipe of the branch channel protrudes inward from the inner side surface of the main channel by a predetermined length at the merging portion.

4. The integrated gas panel apparatus according to claim 1, wherein the gas is used in a semiconductor manufacturing process.

[5] Gas flow control devices such as valves and mass flow controllers are provided along the way to control the gas flowing inside, and the main flow into which the gas from these branch flow channels flows. In an integrated gas panel device comprising: a path; and a panel body configured such that the branch channel and the main channel are formed inside by assembling a plurality of block bodies,

Of the block bodies, the main flow path block body having the main flow path therein has a penetration hole communicating with the main flow path therein, and the branch flow path has an outlet portion therein. Providing a projecting pipe with the branch channel projecting outwards on the branch channel block body,

In a state where the main flow path block body and the branch flow path block body are assembled by inserting the protruding pipe into the insertion hole, the tip of the protruding pipe further extends from the inner surface of the main flow path. An integrated gas panel device, characterized in that it projects outward.

6. The integrated gas panel device according to claim 5, wherein the tip of the protruding pipe protrudes to the vicinity of the center of the main flow path when viewed in cross section.

7. The integrated gas panel apparatus according to claim 5, wherein the gas is used in a semiconductor manufacturing process.

[8] Gas control devices such as valves and mass flow controllers are provided along the way, and a plurality of branch channels configured to control the gas flowing inside,

One main flow channel where the gas from these branch flow channels flows in and merges,

A branch channel block body having a long panel shape with a bottom surface as a mounting surface, with one branch channel formed therein;

A central block body that holds a plurality of branch flow path block bodies so that their longitudinal directions are parallel to each other on a holding surface formed on a side peripheral surface,

The main flow path is formed in the central block body, and the intermediate flow path extends from the junction portion set in the main flow path toward the branch flow path of the branch flow block body attached to the side peripheral surface of the central block body. A three-dimensionally integrated gas panel device that forms a flow path.

9. The three-dimensionally integrated gas panel device according to claim 8, wherein the confluence portion is set at one place of the main flow path!

[10] Each of the holding surfaces forms a rotationally symmetric shape with respect to the axis of the central block body, the merging portion is provided on the axis, and the intermediate flow paths are set to have the same length. The three-dimensionally integrated gas panel device according to claim 9.

11. The three-dimensionally integrated gas panel device according to claim 8, wherein the main flow path is provided along the axis.

12. The three-dimensionally integrated gas panel device according to claim 8, wherein the central block body has a regular polygonal column shape.

13. The three-dimensionally integrated gas panel device according to claim 8, wherein the gas is used in a semiconductor manufacturing process.