SG11201501064VA - Support device for a plurality of wafers for a vertical oven - Google Patents

Support device for a plurality of wafers for a vertical oven

Info

Publication number
SG11201501064VA
SG11201501064VA SG11201501064VA SG11201501064VA SG11201501064VA SG 11201501064V A SG11201501064V A SG 11201501064VA SG 11201501064V A SG11201501064V A SG 11201501064VA SG 11201501064V A SG11201501064V A SG 11201501064VA SG 11201501064V A SG11201501064V A SG 11201501064VA
Authority
SG
Singapore
Prior art keywords
wafers
support device
vertical oven
oven
vertical
Prior art date
Application number
SG11201501064VA
Inventor
Christophe Gourdel
Alexandre Barthelemy
Original Assignee
Soitec Silicon On Insulator
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec Silicon On Insulator filed Critical Soitec Silicon On Insulator
Publication of SG11201501064VA publication Critical patent/SG11201501064VA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens, or the like for the charge within the furnace
    • F27D5/0037—Supports specially adapted for semi-conductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Furnace Details (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Drying Of Solid Materials (AREA)
SG11201501064VA 2012-09-10 2013-08-20 Support device for a plurality of wafers for a vertical oven SG11201501064VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1202435A FR2995394B1 (en) 2012-09-10 2012-09-10 SUPPORT DEVICE FOR A PLURALITY OF SUBSTRATES FOR A VERTICAL OVEN
PCT/IB2013/001824 WO2014037777A1 (en) 2012-09-10 2013-08-20 Support device for a plurality of wafers for a vertical oven

Publications (1)

Publication Number Publication Date
SG11201501064VA true SG11201501064VA (en) 2015-03-30

Family

ID=47664337

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201501064VA SG11201501064VA (en) 2012-09-10 2013-08-20 Support device for a plurality of wafers for a vertical oven
SG10201701303RA SG10201701303RA (en) 2012-09-10 2013-08-20 Support device for a plurality of wafers for a vertical oven

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201701303RA SG10201701303RA (en) 2012-09-10 2013-08-20 Support device for a plurality of wafers for a vertical oven

Country Status (7)

Country Link
US (1) US9835377B2 (en)
KR (1) KR20150053909A (en)
CN (1) CN104603567B (en)
DE (1) DE112013004408T5 (en)
FR (1) FR2995394B1 (en)
SG (2) SG11201501064VA (en)
WO (1) WO2014037777A1 (en)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4001047A (en) * 1975-05-19 1977-01-04 General Electric Company Temperature gradient zone melting utilizing infrared radiation
JP3280438B2 (en) * 1992-11-30 2002-05-13 東芝セラミックス株式会社 Vertical boat
JP3245246B2 (en) * 1993-01-27 2002-01-07 東京エレクトロン株式会社 Heat treatment equipment
KR20000002833A (en) * 1998-06-23 2000-01-15 윤종용 Semiconductor wafer boat
TWI250604B (en) * 1999-07-29 2006-03-01 Ibm Improved ladder boat for supporting wafers
EP1091391A1 (en) * 1999-10-05 2001-04-11 SICO Produktions- und Handelsges.m.b.H. Wafers holding boat
US6450346B1 (en) * 2000-06-30 2002-09-17 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing
US6488497B1 (en) * 2001-07-12 2002-12-03 Saint-Gobain Ceramics & Plastics, Inc. Wafer boat with arcuate wafer support arms
KR100877129B1 (en) * 2003-03-26 2009-01-07 신에쯔 한도타이 가부시키가이샤 Heat treatment-purpose wafer support tool, and heat treatment device
JP3781014B2 (en) * 2003-03-31 2006-05-31 株式会社Ｓｕｍｃｏ Silicon wafer heat treatment jig and silicon wafer heat treatment method
JP4820755B2 (en) * 2004-08-06 2011-11-24 株式会社日立国際電気 Heat treatment apparatus and substrate manufacturing method
US7033168B1 (en) * 2005-01-24 2006-04-25 Memc Electronic Materials, Inc. Semiconductor wafer boat for a vertical furnace
US7241141B2 (en) * 2005-09-19 2007-07-10 Texas Instruments Incorporated Low contact SiC boat for silicon nitride stress reduction
JP4380689B2 (en) * 2006-11-21 2009-12-09 信越半導体株式会社 Vertical heat treatment boat and semiconductor wafer heat treatment method using the same
US7661544B2 (en) * 2007-02-01 2010-02-16 Tokyo Electron Limited Semiconductor wafer boat for batch processing
JP5654901B2 (en) * 2011-02-28 2015-01-14 東京応化工業株式会社 Support method, high-temperature treatment method using the same, and support jig

Also Published As

Publication number Publication date
CN104603567B (en) 2017-07-04
WO2014037777A1 (en) 2014-03-13
KR20150053909A (en) 2015-05-19
SG10201701303RA (en) 2017-04-27
CN104603567A (en) 2015-05-06
DE112013004408T5 (en) 2015-06-25
FR2995394A1 (en) 2014-03-14
FR2995394B1 (en) 2021-03-12
US20150211800A1 (en) 2015-07-30
US9835377B2 (en) 2017-12-05

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