FR2995394B1 - SUPPORT DEVICE FOR A PLURALITY OF SUBSTRATES FOR A VERTICAL OVEN - Google Patents

SUPPORT DEVICE FOR A PLURALITY OF SUBSTRATES FOR A VERTICAL OVEN Download PDF

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Publication number
FR2995394B1
FR2995394B1 FR1202435A FR1202435A FR2995394B1 FR 2995394 B1 FR2995394 B1 FR 2995394B1 FR 1202435 A FR1202435 A FR 1202435A FR 1202435 A FR1202435 A FR 1202435A FR 2995394 B1 FR2995394 B1 FR 2995394B1
Authority
FR
France
Prior art keywords
central axis
support
support members
substrates
support device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1202435A
Other languages
French (fr)
Other versions
FR2995394A1 (en
Inventor
Christophe Gourdel
Alexandre Barthelemy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1202435A priority Critical patent/FR2995394B1/en
Application filed by Soitec SA filed Critical Soitec SA
Priority to DE112013004408.0T priority patent/DE112013004408T5/en
Priority to KR1020157005869A priority patent/KR20150053909A/en
Priority to PCT/IB2013/001824 priority patent/WO2014037777A1/en
Priority to SG11201501064VA priority patent/SG11201501064VA/en
Priority to US14/425,549 priority patent/US9835377B2/en
Priority to SG10201701303RA priority patent/SG10201701303RA/en
Priority to CN201380046873.XA priority patent/CN104603567B/en
Publication of FR2995394A1 publication Critical patent/FR2995394A1/en
Application granted granted Critical
Publication of FR2995394B1 publication Critical patent/FR2995394B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens, or the like for the charge within the furnace
    • F27D5/0037—Supports specially adapted for semi-conductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Furnace Details (AREA)
  • Drying Of Solid Materials (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)

Abstract

Ce dispositif de support présente un axe central, et comprend : - trois montants (130), (131) et (132) s'étendant sensiblement parallèlement à l'axe central, - une pluralité de séries d'organes de support espacées suivant l'axe central, chaque série d'organes de support comprenant trois organes de support (140), (141) et (142) destinés à supporter un substrat (W) parmi la pluralité de substrats, et s'étendant selon des directions essentiellement longitudinales distinctes et transversales à l'axe central, chaque organe de support (140), (141) et (142) étant monté directement sur un montant distinct, ce dispositif de support étant remarquable en ce que les directions des trois organes de support (140), (141) et (142) de chaque série d'organes de support (135) sont concourantes en un point de l'axe central.This support device has a central axis, and comprises: - three uprights (130), (131) and (132) extending substantially parallel to the central axis, - a plurality of series of support members spaced along l 'central axis, each series of support members comprising three support members (140), (141) and (142) intended to support one substrate (W) among the plurality of substrates, and extending in essentially longitudinal directions distinct and transverse to the central axis, each support member (140), (141) and (142) being mounted directly on a separate upright, this support device being remarkable in that the directions of the three support members (140 ), (141) and (142) of each series of support members (135) are concurrent at a point of the central axis.

FR1202435A 2012-09-10 2012-09-10 SUPPORT DEVICE FOR A PLURALITY OF SUBSTRATES FOR A VERTICAL OVEN Active FR2995394B1 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1202435A FR2995394B1 (en) 2012-09-10 2012-09-10 SUPPORT DEVICE FOR A PLURALITY OF SUBSTRATES FOR A VERTICAL OVEN
KR1020157005869A KR20150053909A (en) 2012-09-10 2013-08-20 Support device for a plurality of wafers for a vertical oven
PCT/IB2013/001824 WO2014037777A1 (en) 2012-09-10 2013-08-20 Support device for a plurality of wafers for a vertical oven
SG11201501064VA SG11201501064VA (en) 2012-09-10 2013-08-20 Support device for a plurality of wafers for a vertical oven
DE112013004408.0T DE112013004408T5 (en) 2012-09-10 2013-08-20 Holding device for a plurality of wafers for a vertical furnace
US14/425,549 US9835377B2 (en) 2012-09-10 2013-08-20 Support device for a plurality of wafers for a vertical oven
SG10201701303RA SG10201701303RA (en) 2012-09-10 2013-08-20 Support device for a plurality of wafers for a vertical oven
CN201380046873.XA CN104603567B (en) 2012-09-10 2013-08-20 For the support equipment of multiple chips of vertical baking oven

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1202435A FR2995394B1 (en) 2012-09-10 2012-09-10 SUPPORT DEVICE FOR A PLURALITY OF SUBSTRATES FOR A VERTICAL OVEN

Publications (2)

Publication Number Publication Date
FR2995394A1 FR2995394A1 (en) 2014-03-14
FR2995394B1 true FR2995394B1 (en) 2021-03-12

Family

ID=47664337

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1202435A Active FR2995394B1 (en) 2012-09-10 2012-09-10 SUPPORT DEVICE FOR A PLURALITY OF SUBSTRATES FOR A VERTICAL OVEN

Country Status (7)

Country Link
US (1) US9835377B2 (en)
KR (1) KR20150053909A (en)
CN (1) CN104603567B (en)
DE (1) DE112013004408T5 (en)
FR (1) FR2995394B1 (en)
SG (2) SG10201701303RA (en)
WO (1) WO2014037777A1 (en)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4001047A (en) * 1975-05-19 1977-01-04 General Electric Company Temperature gradient zone melting utilizing infrared radiation
JP3280438B2 (en) * 1992-11-30 2002-05-13 東芝セラミックス株式会社 Vertical boat
JP3245246B2 (en) * 1993-01-27 2002-01-07 東京エレクトロン株式会社 Heat treatment equipment
KR20000002833A (en) * 1998-06-23 2000-01-15 윤종용 Semiconductor wafer boat
TWI250604B (en) * 1999-07-29 2006-03-01 Ibm Improved ladder boat for supporting wafers
EP1091391A1 (en) 1999-10-05 2001-04-11 SICO Produktions- und Handelsges.m.b.H. Wafers holding boat
US6450346B1 (en) * 2000-06-30 2002-09-17 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing
US6488497B1 (en) * 2001-07-12 2002-12-03 Saint-Gobain Ceramics & Plastics, Inc. Wafer boat with arcuate wafer support arms
US7393207B2 (en) 2003-03-26 2008-07-01 Shin-Etsu Handotai Co., Ltd. Wafer support tool for heat treatment and heat treatment apparatus
JP3781014B2 (en) 2003-03-31 2006-05-31 株式会社Ｓｕｍｃｏ Silicon wafer heat treatment jig and silicon wafer heat treatment method
JP4820755B2 (en) * 2004-08-06 2011-11-24 株式会社日立国際電気 Heat treatment apparatus and substrate manufacturing method
US7033168B1 (en) * 2005-01-24 2006-04-25 Memc Electronic Materials, Inc. Semiconductor wafer boat for a vertical furnace
US7241141B2 (en) * 2005-09-19 2007-07-10 Texas Instruments Incorporated Low contact SiC boat for silicon nitride stress reduction
JP4380689B2 (en) * 2006-11-21 2009-12-09 信越半導体株式会社 Vertical heat treatment boat and semiconductor wafer heat treatment method using the same
US7661544B2 (en) * 2007-02-01 2010-02-16 Tokyo Electron Limited Semiconductor wafer boat for batch processing
JP5654901B2 (en) * 2011-02-28 2015-01-14 東京応化工業株式会社 Support method, high-temperature treatment method using the same, and support jig

Also Published As

Publication number Publication date
WO2014037777A1 (en) 2014-03-13
CN104603567B (en) 2017-07-04
US20150211800A1 (en) 2015-07-30
DE112013004408T5 (en) 2015-06-25
SG10201701303RA (en) 2017-04-27
FR2995394A1 (en) 2014-03-14
SG11201501064VA (en) 2015-03-30
CN104603567A (en) 2015-05-06
US9835377B2 (en) 2017-12-05
KR20150053909A (en) 2015-05-19

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