SG11201407063VA - Coaxial / coaxial treatment module - Google Patents

Coaxial / coaxial treatment module

Info

Publication number
SG11201407063VA
SG11201407063VA SG11201407063VA SG11201407063VA SG11201407063VA SG 11201407063V A SG11201407063V A SG 11201407063VA SG 11201407063V A SG11201407063V A SG 11201407063VA SG 11201407063V A SG11201407063V A SG 11201407063VA SG 11201407063V A SG11201407063V A SG 11201407063VA
Authority
SG
Singapore
Prior art keywords
coaxial
treatment module
module
treatment
coaxial treatment
Prior art date
Application number
SG11201407063VA
Inventor
Earl Vickery
Original Assignee
Highvac Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Highvac Corp filed Critical Highvac Corp
Publication of SG11201407063VA publication Critical patent/SG11201407063VA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/18—Absorbing units; Liquid distributors therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/76—Gas phase processes, e.g. by using aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/79—Injecting reactants
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/10—Oxidants
    • B01D2251/102—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/10—Oxidants
    • B01D2251/11—Air
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2252/00—Absorbents, i.e. solvents and liquid materials for gas absorption
    • B01D2252/10—Inorganic absorbents
    • B01D2252/103—Water
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/553—Compounds comprising hydrogen, e.g. silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
    • F23D2900/00016—Preventing or reducing deposit build-up on burner parts, e.g. from carbon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2217/00—Intercepting solids
    • F23J2217/50—Intercepting solids by cleaning fluids (washers or scrubbers)
SG11201407063VA 2012-04-30 2013-02-21 Coaxial / coaxial treatment module SG11201407063VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/459,682 US9089811B2 (en) 2012-04-30 2012-04-30 Coaxial / coaxial treatment module
PCT/US2013/027001 WO2013165530A1 (en) 2012-04-30 2013-02-21 Coaxial / coaxial treatment module

Publications (1)

Publication Number Publication Date
SG11201407063VA true SG11201407063VA (en) 2014-11-27

Family

ID=49477465

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201407063VA SG11201407063VA (en) 2012-04-30 2013-02-21 Coaxial / coaxial treatment module

Country Status (6)

Country Link
US (1) US9089811B2 (en)
EP (1) EP2844917A4 (en)
JP (1) JP6162793B2 (en)
KR (1) KR20150068337A (en)
SG (1) SG11201407063VA (en)
WO (1) WO2013165530A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA3202964A1 (en) 2011-12-06 2013-06-13 Delta Faucet Company Ozone distribution in a faucet
CN104722164A (en) * 2013-12-20 2015-06-24 陈荣志 Centrifugal water spraying deduster
CN115093008A (en) 2015-12-21 2022-09-23 德尔塔阀门公司 Fluid delivery system comprising a disinfection device
CN107461755A (en) * 2017-08-31 2017-12-12 江苏密斯欧智能科技有限公司 A kind of waste gas burning purifier
GB2608817A (en) * 2021-07-13 2023-01-18 Edwards Ltd Modular abatement apparatus
NL2032864B1 (en) * 2022-08-26 2024-03-05 Levitech B V An exhaust abatement apparatus and a method for abating reactive gasses

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2502674C3 (en) 1975-01-23 1978-06-29 Caloric Gesellschaft Fuer Apparatebau Mbh, 8032 Graefelfing Protective gas system
JPS5634017A (en) * 1979-08-27 1981-04-06 Mitsubishi Heavy Ind Ltd Combustion-disposal device for combustible gas
US4801437A (en) 1985-12-04 1989-01-31 Japan Oxygen Co., Ltd. Process for treating combustible exhaust gases containing silane and the like
DE3706234A1 (en) 1987-02-26 1988-09-08 Sonvico Ag Ing Bureau BURNER FOR BURNING LIQUID OR GASEOUS FUELS
JP2881210B2 (en) * 1989-07-21 1999-04-12 千代田化工建設株式会社 Method and apparatus for treating toxic exhaust gas
US5123836A (en) * 1988-07-29 1992-06-23 Chiyoda Corporation Method for the combustion treatment of toxic gas-containing waste gas
JP2688655B2 (en) * 1988-09-02 1997-12-10 千代田化工建設株式会社 Combustion treatment method and equipment for toxic gas
JPH05337328A (en) * 1992-06-03 1993-12-21 Chiyoda Corp Method for saving water supply to wet-type desulfurization device
DE19501914C1 (en) * 1995-01-23 1996-04-04 Centrotherm Elektrische Anlage Installation for cleaning waste gases by incineration
TW342436B (en) * 1996-08-14 1998-10-11 Nippon Oxygen Co Ltd Combustion type harm removal apparatus (1)
JPH10110926A (en) * 1996-08-14 1998-04-28 Nippon Sanso Kk Combustion type harm removal apparatus
JPH10122539A (en) * 1996-10-18 1998-05-15 Nippon Sanso Kk Discharged gas processing device
US6089859A (en) 1998-06-19 2000-07-18 Hydrogen Burner Technology, Inc. Reduced carbon from under oxidized burner
US20020081240A1 (en) * 1999-04-07 2002-06-27 Dong-Soo Kim Gas scrubber for treating the gas generated during the semiconductor manufacturing process
US6423284B1 (en) * 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
US7160521B2 (en) * 2001-07-11 2007-01-09 Applied Materials, Inc. Treatment of effluent from a substrate processing chamber
JP2005098680A (en) * 2003-08-20 2005-04-14 Japan Pionics Co Ltd Harmful gas cleaning facility
US7569193B2 (en) 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
DE102004047440B4 (en) 2004-09-28 2007-11-08 Centrotherm Clean Solutions Gmbh & Co.Kg Arrangement for the purification of toxic gases from production processes
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
TW200738322A (en) 2005-06-13 2007-10-16 Applied Materials Inc Methods and apparatus for process abatement

Also Published As

Publication number Publication date
JP2015525332A (en) 2015-09-03
WO2013165530A1 (en) 2013-11-07
EP2844917A1 (en) 2015-03-11
EP2844917A4 (en) 2016-01-27
US9089811B2 (en) 2015-07-28
KR20150068337A (en) 2015-06-19
US20130287637A1 (en) 2013-10-31
JP6162793B2 (en) 2017-07-12

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