SG11201405925QA - GASEOUS OZONE (O<sb>3</sb>) TREATMENT FOR SOLAR CELL FABRICATION - Google Patents
GASEOUS OZONE (O<sb>3</sb>) TREATMENT FOR SOLAR CELL FABRICATIONInfo
- Publication number
- SG11201405925QA SG11201405925QA SG11201405925QA SG11201405925QA SG11201405925QA SG 11201405925Q A SG11201405925Q A SG 11201405925QA SG 11201405925Q A SG11201405925Q A SG 11201405925QA SG 11201405925Q A SG11201405925Q A SG 11201405925QA SG 11201405925Q A SG11201405925Q A SG 11201405925QA
- Authority
- SG
- Singapore
- Prior art keywords
- treatment
- solar cell
- cell fabrication
- gaseous ozone
- ozone
- Prior art date
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Photovoltaic Devices (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Cleaning In General (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/429,134 US20130247967A1 (en) | 2012-03-23 | 2012-03-23 | Gaseous ozone (o3) treatment for solar cell fabrication |
| PCT/US2012/070179 WO2013141913A1 (en) | 2012-03-23 | 2012-12-17 | Gaseous ozone (o3) treatment for solar cell fabrication |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201405925QA true SG11201405925QA (en) | 2014-10-30 |
Family
ID=49210625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201405925QA SG11201405925QA (en) | 2012-03-23 | 2012-12-17 | GASEOUS OZONE (O<sb>3</sb>) TREATMENT FOR SOLAR CELL FABRICATION |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US20130247967A1 (en) |
| EP (1) | EP2850663A4 (en) |
| JP (1) | JP6220853B2 (en) |
| KR (1) | KR20140139004A (en) |
| CN (1) | CN104205354B (en) |
| MX (1) | MX2014011370A (en) |
| MY (1) | MY171360A (en) |
| PH (1) | PH12014502089A1 (en) |
| SG (1) | SG11201405925QA (en) |
| TW (1) | TWI578558B (en) |
| WO (1) | WO2013141913A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9837259B2 (en) | 2014-08-29 | 2017-12-05 | Sunpower Corporation | Sequential etching treatment for solar cell fabrication |
| CN107170846A (en) * | 2017-06-02 | 2017-09-15 | 嘉兴尚能光伏材料科技有限公司 | The surface matte preparation method of monocrystaline silicon solar cell |
| CN114664972B (en) * | 2020-12-23 | 2024-04-16 | 比亚迪股份有限公司 | Polishing method of silicon wafer, preparation method of solar cell and solar cell |
| CN115148832A (en) * | 2022-07-14 | 2022-10-04 | 上饶捷泰新能源科技有限公司 | N-TOPCon battery and manufacturing method thereof |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8987039B2 (en) * | 2007-10-12 | 2015-03-24 | Air Products And Chemicals, Inc. | Antireflective coatings for photovoltaic applications |
| JP4986054B2 (en) * | 2007-11-13 | 2012-07-25 | 株式会社明電舎 | Oxide film forming method and apparatus |
| DE102008014166B3 (en) * | 2008-03-14 | 2009-11-26 | Rena Gmbh | Process for producing a silicon surface with a pyramidal texture |
| KR20100125448A (en) * | 2008-03-25 | 2010-11-30 | 어플라이드 머티어리얼스, 인코포레이티드 | Surface cleaning texturing process for crystalline solar cells |
| US8048754B2 (en) * | 2008-09-29 | 2011-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing SOI substrate and method for manufacturing single crystal semiconductor layer |
| TW201027768A (en) * | 2008-10-29 | 2010-07-16 | Ulvac Inc | Manufacturing method of solar battery, etching device and CVD device |
| US8329046B2 (en) * | 2009-02-05 | 2012-12-11 | Asia Union Electronic Chemical Corporation | Methods for damage etch and texturing of silicon single crystal substrates |
| JP2012521075A (en) * | 2009-03-17 | 2012-09-10 | ロート ウント ラウ アーゲー | Substrate processing apparatus and substrate processing method |
| JP5537101B2 (en) * | 2009-09-10 | 2014-07-02 | 株式会社カネカ | Crystalline silicon solar cell |
| MY166305A (en) * | 2009-12-09 | 2018-06-25 | Solexel Inc | High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using thin planar semiconductor absorbers |
| JP2011205058A (en) * | 2009-12-17 | 2011-10-13 | Rohm & Haas Electronic Materials Llc | Improved method of texturing semiconductor substrate |
| US8759231B2 (en) * | 2009-12-29 | 2014-06-24 | Intermolecular, Inc. | Silicon texture formulations with diol additives and methods of using the formulations |
| FR2955707B1 (en) * | 2010-01-27 | 2012-03-23 | Commissariat Energie Atomique | METHOD FOR PRODUCING A PHOTOVOLTAIC CELL WITH SURFACE PREPARATION OF A CRYSTALLINE SILICON SUBSTRATE |
| TWM382585U (en) * | 2010-02-02 | 2010-06-11 | Castec Internat Corp | Solar cell manufacturing equipment |
| US8790957B2 (en) * | 2010-03-04 | 2014-07-29 | Sunpower Corporation | Method of fabricating a back-contact solar cell and device thereof |
| US20130130508A1 (en) * | 2011-09-02 | 2013-05-23 | Air Products And Chemicals, Inc. | Compositions and Methods for Texturing of Silicon Wafers |
-
2012
- 2012-03-23 US US13/429,134 patent/US20130247967A1/en not_active Abandoned
- 2012-12-17 MY MYPI2014002702A patent/MY171360A/en unknown
- 2012-12-17 SG SG11201405925QA patent/SG11201405925QA/en unknown
- 2012-12-17 KR KR1020147029311A patent/KR20140139004A/en not_active Application Discontinuation
- 2012-12-17 EP EP12871887.1A patent/EP2850663A4/en not_active Withdrawn
- 2012-12-17 JP JP2015501662A patent/JP6220853B2/en not_active Expired - Fee Related
- 2012-12-17 CN CN201280071739.0A patent/CN104205354B/en not_active Expired - Fee Related
- 2012-12-17 MX MX2014011370A patent/MX2014011370A/en unknown
- 2012-12-17 WO PCT/US2012/070179 patent/WO2013141913A1/en active Application Filing
- 2012-12-17 TW TW101147956A patent/TWI578558B/en not_active IP Right Cessation
-
2014
- 2014-09-22 PH PH12014502089A patent/PH12014502089A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US20130247967A1 (en) | 2013-09-26 |
| PH12014502089B1 (en) | 2014-11-24 |
| EP2850663A4 (en) | 2015-04-15 |
| EP2850663A1 (en) | 2015-03-25 |
| KR20140139004A (en) | 2014-12-04 |
| TW201340362A (en) | 2013-10-01 |
| MX2014011370A (en) | 2015-06-05 |
| PH12014502089A1 (en) | 2014-11-24 |
| CN104205354B (en) | 2016-12-21 |
| MY171360A (en) | 2019-10-10 |
| CN104205354A (en) | 2014-12-10 |
| WO2013141913A1 (en) | 2013-09-26 |
| TWI578558B (en) | 2017-04-11 |
| JP2015514313A (en) | 2015-05-18 |
| JP6220853B2 (en) | 2017-10-25 |
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