SG11201405634XA - Holder for polished work, and laminate plate used for same - Google Patents

Holder for polished work, and laminate plate used for same

Info

Publication number
SG11201405634XA
SG11201405634XA SG11201405634XA SG11201405634XA SG11201405634XA SG 11201405634X A SG11201405634X A SG 11201405634XA SG 11201405634X A SG11201405634X A SG 11201405634XA SG 11201405634X A SG11201405634X A SG 11201405634XA SG 11201405634X A SG11201405634X A SG 11201405634XA
Authority
SG
Singapore
Prior art keywords
holder
same
plate used
laminate plate
polished work
Prior art date
Application number
SG11201405634XA
Inventor
Mitsuo Taketani
Toyotaro Maruyama
Original Assignee
Sumitomo Bakelite Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co filed Critical Sumitomo Bakelite Co
Publication of SG11201405634XA publication Critical patent/SG11201405634XA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • B24B37/28Work carriers for double side lapping of plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/20Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
    • Y10T442/2926Coated or impregnated inorganic fiber fabric
    • Y10T442/2992Coated or impregnated glass fiber fabric

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Laminated Bodies (AREA)
  • Reinforced Plastic Materials (AREA)
SG11201405634XA 2012-03-30 2013-03-21 Holder for polished work, and laminate plate used for same SG11201405634XA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012078719 2012-03-30
JP2012269289 2012-12-10
PCT/JP2013/058034 WO2013146517A1 (en) 2012-03-30 2013-03-21 Material for holding item to be polished, and laminate plate using same

Publications (1)

Publication Number Publication Date
SG11201405634XA true SG11201405634XA (en) 2014-10-30

Family

ID=49259774

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201405634XA SG11201405634XA (en) 2012-03-30 2013-03-21 Holder for polished work, and laminate plate used for same

Country Status (8)

Country Link
US (1) US20150050868A1 (en)
EP (1) EP2832498A4 (en)
JP (1) JP6156362B2 (en)
KR (1) KR20140136955A (en)
CN (1) CN104245231A (en)
SG (1) SG11201405634XA (en)
TW (1) TW201400294A (en)
WO (1) WO2013146517A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160041510A (en) * 2014-10-08 2016-04-18 삼성전기주식회사 Prepreg and method for manufacturing the same
KR20160047780A (en) * 2014-10-23 2016-05-03 삼성전기주식회사 Prepreg and method for manufacturing the same
CN105694354A (en) * 2016-02-19 2016-06-22 苏州振瑞昌材料科技有限公司 Bakelite corrugated board made of preliminarily woven components with flow guide layers and method for manufacturing bakelite corrugated board
CN106380784B (en) * 2016-08-29 2019-03-08 上海国纪电子材料有限公司 A kind of preparation method of the dedicated glass-fiber-plate glue of erratic star wheel
CN106366570B (en) * 2016-08-29 2019-03-08 上海国纪电子材料有限公司 A kind of dedicated glass-fiber-plate glue of erratic star wheel
CN106398117B (en) * 2016-08-29 2019-03-08 上海国纪电子材料有限公司 A kind of preparation method of the dedicated glass-fiber-plate prepreg of erratic star wheel
CN106433029B (en) * 2016-08-29 2019-03-08 上海国纪电子材料有限公司 A kind of dedicated glass-fiber-plate prepreg of erratic star wheel
CN106366850B (en) * 2016-08-29 2021-07-16 上海国纪电子材料有限公司 Wandering star wheel
CN106398118B (en) * 2016-08-29 2019-03-08 上海国纪电子材料有限公司 A kind of preparation method of erratic star wheel
CN109983562B (en) * 2016-12-09 2022-12-20 信越半导体株式会社 Carrier for double-side polishing apparatus, and double-side polishing method
JP7062331B2 (en) * 2017-11-16 2022-05-06 株式会社ディスコ Manufacturing method of core material and manufacturing method of copper-clad laminate

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2974007B1 (en) 1997-10-20 1999-11-08 新神戸電機株式会社 Polishing object holding material and method of manufacturing polishing object
JP2001232559A (en) * 2000-02-22 2001-08-28 Sumitomo Bakelite Co Ltd Holding member for object to be polished
IE20020146A1 (en) * 2001-02-26 2002-09-18 Shin Kobe Electric Machinery Polished-piece holder and manufacturing method thereof
WO2003018675A1 (en) * 2001-08-31 2003-03-06 Sumitomo Bakelite Company Limited Resin composition, prepreg, laminated sheet and semiconductor package
JP4429936B2 (en) * 2005-03-08 2010-03-10 株式会社クラレ Prepreg and polishing carrier using the same
JP3135944U (en) * 2007-07-23 2007-10-04 京セラケミカル株式会社 Repair sheet for workpiece holding material and workpiece holding material using the same
JP2009061531A (en) * 2007-09-05 2009-03-26 Kyocera Chemical Corp Polishing object holding material and method of manufacturing the same
WO2009072164A1 (en) * 2007-12-05 2009-06-11 Sumitomo Bakelite Co., Ltd. Substrate and semiconductor device
JP2010099767A (en) * 2008-10-22 2010-05-06 Kyocera Chemical Corp Method of manufacturing polished article holding material and polishing article
KR20110111438A (en) * 2008-12-31 2011-10-11 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Coated carrier for lapping and methods of making and using

Also Published As

Publication number Publication date
TW201400294A (en) 2014-01-01
EP2832498A1 (en) 2015-02-04
EP2832498A4 (en) 2016-04-20
JPWO2013146517A1 (en) 2015-12-14
KR20140136955A (en) 2014-12-01
JP6156362B2 (en) 2017-07-05
US20150050868A1 (en) 2015-02-19
CN104245231A (en) 2014-12-24
WO2013146517A1 (en) 2013-10-03

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