SG11201403184VA - Retrofitting cleanroom fabricators into cleanspace fabricators - Google Patents

Retrofitting cleanroom fabricators into cleanspace fabricators

Info

Publication number
SG11201403184VA
SG11201403184VA SG11201403184VA SG11201403184VA SG11201403184VA SG 11201403184V A SG11201403184V A SG 11201403184VA SG 11201403184V A SG11201403184V A SG 11201403184VA SG 11201403184V A SG11201403184V A SG 11201403184VA SG 11201403184V A SG11201403184V A SG 11201403184VA
Authority
SG
Singapore
Prior art keywords
fabricators
cleanroom
retrofitting
cleanspace
cleanspace fabricators
Prior art date
Application number
SG11201403184VA
Other languages
English (en)
Inventor
Frederick A Flitsch
Original Assignee
Futrfab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Futrfab Inc filed Critical Futrfab Inc
Publication of SG11201403184VA publication Critical patent/SG11201403184VA/en

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Evolutionary Computation (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Professional, Industrial, Or Sporting Protective Garments (AREA)
  • Architecture (AREA)
  • Software Systems (AREA)
  • Ventilation (AREA)
SG11201403184VA 2012-01-12 2013-01-09 Retrofitting cleanroom fabricators into cleanspace fabricators SG11201403184VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261585951P 2012-01-12 2012-01-12
PCT/US2013/020906 WO2013106487A2 (en) 2012-01-12 2013-01-09 Retrofitting cleanroom fabricators into cleanspace fabricators

Publications (1)

Publication Number Publication Date
SG11201403184VA true SG11201403184VA (en) 2014-09-26

Family

ID=48780538

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201403184VA SG11201403184VA (en) 2012-01-12 2013-01-09 Retrofitting cleanroom fabricators into cleanspace fabricators

Country Status (6)

Country Link
US (1) US20130184848A1 (zh)
JP (1) JP2015512140A (zh)
IL (1) IL233404A0 (zh)
SG (1) SG11201403184VA (zh)
TW (1) TWI573214B (zh)
WO (1) WO2013106487A2 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150266675A1 (en) * 2014-03-24 2015-09-24 Frederick A. Flitsch Methods and apparatus for a cleanspace fabricator to process products in vessels

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625031A (ja) * 1985-06-28 1987-01-12 Kajima Corp 部分的に清浄度の異なるクリ−ンル−ム
US7513822B2 (en) * 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US9339900B2 (en) * 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
WO2007025199A2 (en) * 2005-08-26 2007-03-01 Flitsch Frederick A Multi-level cleanspace fabricator elevator system

Also Published As

Publication number Publication date
JP2015512140A (ja) 2015-04-23
WO2013106487A3 (en) 2015-01-22
TWI573214B (zh) 2017-03-01
WO2013106487A2 (en) 2013-07-18
US20130184848A1 (en) 2013-07-18
IL233404A0 (en) 2014-08-31
TW201347065A (zh) 2013-11-16

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