SG11201402043VA - Multiple beam combiner for laser processing apparatus - Google Patents

Multiple beam combiner for laser processing apparatus

Info

Publication number
SG11201402043VA
SG11201402043VA SG11201402043VA SG11201402043VA SG11201402043VA SG 11201402043V A SG11201402043V A SG 11201402043VA SG 11201402043V A SG11201402043V A SG 11201402043VA SG 11201402043V A SG11201402043V A SG 11201402043VA SG 11201402043V A SG11201402043V A SG 11201402043VA
Authority
SG
Singapore
Prior art keywords
processing apparatus
laser processing
beam combiner
multiple beam
combiner
Prior art date
Application number
SG11201402043VA
Inventor
Stephen Moffatt
Douglas E Holmgren
Samuel C Howells
Edric Tong
Bruce E Adams
Jiping Li
Aaron Muir Hunter
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG11201402043VA publication Critical patent/SG11201402043VA/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30—Collimators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0884—Catadioptric systems having a pupil corrector
    • G02B17/0888—Catadioptric systems having a pupil corrector the corrector having at least one aspheric surface, e.g. Schmidt plates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/12—Beam splitting or combining systems operating by refraction only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/12—Beam splitting or combining systems operating by refraction only
    • G02B27/123—The splitting element being a lens or a system of lenses, including arrays and surfaces with refractive power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/12—Beam splitting or combining systems operating by refraction only
    • G02B27/126—The splitting element being a prism or prismatic array, including systems based on total internal reflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Lasers (AREA)
SG11201402043VA 2011-12-16 2012-12-13 Multiple beam combiner for laser processing apparatus SG11201402043VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161576671P 2011-12-16 2011-12-16
PCT/US2012/069518 WO2013090581A1 (en) 2011-12-16 2012-12-13 Multiple beam combiner for laser processing apparatus

Publications (1)

Publication Number Publication Date
SG11201402043VA true SG11201402043VA (en) 2014-09-26

Family

ID=48613175

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201402043VA SG11201402043VA (en) 2011-12-16 2012-12-13 Multiple beam combiner for laser processing apparatus

Country Status (6)

Country Link
US (3) US8970963B2 (en)
KR (2) KR101984759B1 (en)
CN (2) CN103890913B (en)
SG (1) SG11201402043VA (en)
TW (2) TWI573650B (en)
WO (1) WO2013090581A1 (en)

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TWI573650B (en) * 2011-12-16 2017-03-11 應用材料股份有限公司 Radiation source and beam combiner for combining coherent beams
CN103364957B (en) * 2013-07-10 2016-01-06 四川大学 The device and method of even-multiple multiple beam that Sloped rotating symmetry places also is closed in FP chamber
DE112016002870T5 (en) * 2015-06-23 2018-03-15 Bien Chann Optical element arrangements for modifying the beam parameter product in laser delivery systems
CN106950707A (en) * 2017-05-25 2017-07-14 力合科技（湖南）股份有限公司 A kind of light beam coupling device
KR102109079B1 (en) * 2017-10-11 2020-05-12 (주)코셋 High-power laser diode module using parabolic mirror
DE102018115102A1 (en) * 2018-06-22 2019-12-24 Trumpf Laser- Und Systemtechnik Gmbh Optical arrangement and laser system
WO2020121770A1 (en) * 2018-12-13 2020-06-18 ソニー株式会社 Optical connector, optical cable, and electronic device
US20230012441A1 (en) * 2019-12-09 2023-01-12 Daylight Solutions, Inc. Device with a hollow output beam
KR102301687B1 (en) * 2020-07-30 2021-09-13 한화시스템 주식회사 Apparatus and method for combining lazer rays in the beam combine device
WO2022085012A1 (en) * 2020-10-25 2022-04-28 David Cohen Atmosphere-penetrating laser
JP2022096461A (en) * 2020-12-17 2022-06-29 キヤノン株式会社 Optical system and surface spectroscopic apparatus

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US3942127A (en) * 1975-04-11 1976-03-02 The United States Of America As Represented By The Secretary Of The Navy Aspheric cassegrain laser power amplifier system
US3968362A (en) 1975-08-11 1976-07-06 Honeywell Inc. Optical system for laser doppler homodyne detection
US4229067A (en) * 1978-11-17 1980-10-21 Corning Glass Works Optical waveguide mode scrambler
JPH04255280A (en) * 1991-02-07 1992-09-10 Nippon Steel Corp Semiconductor laser excitation solid-state laser device
US5295143A (en) * 1992-05-06 1994-03-15 Excel Quantronix Three color laser
JP2000214328A (en) * 1999-01-25 2000-08-04 Oyo Koden Kenkyushitsu:Kk Polarization composite element and polarization composite module
US6404542B1 (en) * 2000-07-10 2002-06-11 Sdl, Inc. Multiple emitter semiconductor laser pump source for scaling of pump power and generation of unpolarized light for light signal amplification
CN2566293Y (en) * 2002-09-05 2003-08-13 中国科学院安徽光学精密机械研究所 Multiple wavelength double-light beam paraxial parallel transmitting device
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US20070002925A1 (en) * 2004-10-25 2007-01-04 Nuvonyx, Inc. External cavity laser diode system and method thereof
US7499147B2 (en) * 2005-02-08 2009-03-03 Advanced Lcd Technologies Development Center Co., Ltd. Generation method of light intensity distribution, generation apparatus of light intensity distribution, and light modulation element assembly
US7680170B2 (en) * 2006-06-15 2010-03-16 Oclaro Photonics, Inc. Coupling devices and methods for stacked laser emitter arrays
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JP5228878B2 (en) * 2008-12-17 2013-07-03 株式会社リコー Coupling lens, lighting device, and electronic device
CN103081261B (en) * 2010-03-05 2016-03-09 泰拉二极管公司 Wavelength light beam combined system and method
WO2011109763A2 (en) * 2010-03-05 2011-09-09 TeraDiode, Inc. Selective repositioning and rotation wavelength beam combining system and method
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TWI573650B (en) * 2011-12-16 2017-03-11 應用材料股份有限公司 Radiation source and beam combiner for combining coherent beams

Also Published As

Publication number Publication date
KR20170008880A (en) 2017-01-24
CN103890913A (en) 2014-06-25
CN106291950A (en) 2017-01-04
US8970963B2 (en) 2015-03-03
CN103890913B (en) 2016-09-14
US20160139417A1 (en) 2016-05-19
CN106291950B (en) 2020-09-15
US9285595B2 (en) 2016-03-15
TWI573650B (en) 2017-03-11
KR101984759B1 (en) 2019-06-03
US9927622B2 (en) 2018-03-27
WO2013090581A1 (en) 2013-06-20
TWI642507B (en) 2018-12-01
KR101696055B1 (en) 2017-01-13
KR20140104973A (en) 2014-08-29
TW201636140A (en) 2016-10-16
US20130163091A1 (en) 2013-06-27
US20150124329A1 (en) 2015-05-07
TW201345639A (en) 2013-11-16

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