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Priority claimed from US09/458,729external-prioritypatent/US6583069B1/en
Application filed by Chartered Semiconductor MfgfiledCriticalChartered Semiconductor Mfg
Publication of SG103822A1publicationCriticalpatent/SG103822A1/en
Sol-gel process for the preparation of vitreous films possessing high adhesion properties and stablecolloidal solutions suitable for its carrying out th same