SG10202102212PA - Apparatus for polishing, processing system, and method of polishing - Google Patents

Apparatus for polishing, processing system, and method of polishing

Info

Publication number
SG10202102212PA
SG10202102212PA SG10202102212PA SG10202102212PA SG 10202102212P A SG10202102212P A SG 10202102212PA SG 10202102212P A SG10202102212P A SG 10202102212PA SG 10202102212P A SG10202102212P A SG 10202102212PA
Authority
SG
Singapore
Prior art keywords
polishing
processing system
processing
Prior art date
Application number
Inventor
Moriura Takuya
Sotozaki Hiroshi
Sone Tadakazu
Ito Masayoshi
Kobata Itsuki
Matsuo Hisanori
Terada Tetsuya
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2020038725A external-priority patent/JP7493966B2/en
Priority claimed from JP2021002919A external-priority patent/JP2021146498A/en
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10202102212PA publication Critical patent/SG10202102212PA/en

Links

SG10202102212P 2020-03-06 2021-03-04 Apparatus for polishing, processing system, and method of polishing SG10202102212PA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020038725A JP7493966B2 (en) 2020-03-06 Polishing Equipment and Processing Systems
JP2020044050 2020-03-13
JP2021002919A JP2021146498A (en) 2020-03-13 2021-01-12 Polishing device and polishing method

Publications (1)

Publication Number Publication Date
SG10202102212PA true SG10202102212PA (en) 2021-10-28

Family

ID=78372414

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202102212P SG10202102212PA (en) 2020-03-06 2021-03-04 Apparatus for polishing, processing system, and method of polishing

Country Status (1)

Country Link
SG (1) SG10202102212PA (en)

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