SG10201912309TA - Device and method for bonding of substrates - Google Patents

Device and method for bonding of substrates

Info

Publication number
SG10201912309TA
SG10201912309TA SG10201912309TA SG10201912309TA SG10201912309TA SG 10201912309T A SG10201912309T A SG 10201912309TA SG 10201912309T A SG10201912309T A SG 10201912309TA SG 10201912309T A SG10201912309T A SG 10201912309TA SG 10201912309T A SG10201912309T A SG 10201912309TA
Authority
SG
Singapore
Prior art keywords
substrates
bonding
Prior art date
Application number
SG10201912309TA
Inventor
Thomas Wagenleitner
Markus Wimplinger
Paul Lindner
Thomas Plach
Florian Kurz
Original Assignee
Ev Group E Thallner Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ev Group E Thallner Gmbh filed Critical Ev Group E Thallner Gmbh
Priority to SG10201912309TA priority Critical patent/SG10201912309TA/en
Publication of SG10201912309TA publication Critical patent/SG10201912309TA/en

Links

SG10201912309TA 2013-05-29 2013-05-29 Device and method for bonding of substrates SG10201912309TA (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG10201912309TA SG10201912309TA (en) 2013-05-29 2013-05-29 Device and method for bonding of substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG10201912309TA SG10201912309TA (en) 2013-05-29 2013-05-29 Device and method for bonding of substrates

Publications (1)

Publication Number Publication Date
SG10201912309TA true SG10201912309TA (en) 2020-02-27

Family

ID=70289001

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201912309TA SG10201912309TA (en) 2013-05-29 2013-05-29 Device and method for bonding of substrates

Country Status (1)

Country Link
SG (1) SG10201912309TA (en)

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