SG10201801169SA - Processing liquid supplying apparatus - Google Patents

Processing liquid supplying apparatus

Info

Publication number
SG10201801169SA
SG10201801169SA SG10201801169SA SG10201801169SA SG10201801169SA SG 10201801169S A SG10201801169S A SG 10201801169SA SG 10201801169S A SG10201801169S A SG 10201801169SA SG 10201801169S A SG10201801169S A SG 10201801169SA SG 10201801169S A SG10201801169S A SG 10201801169SA
Authority
SG
Singapore
Prior art keywords
weight
reservoir
supplying apparatus
additive
processing liquid
Prior art date
Application number
SG10201801169SA
Inventor
Tokumitsu Naoya
Arai Satoshi
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10201801169SA publication Critical patent/SG10201801169SA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F3/00—Severing by means other than cutting; Apparatus therefor
    • B26F3/004—Severing by means other than cutting; Apparatus therefor by means of a fluid jet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/08—Means for treating work or cutting member to facilitate cutting
    • B26D7/088—Means for treating work or cutting member to facilitate cutting by cleaning or lubricating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F1/00—Preventing the formation of electrostatic charges

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Dicing (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

PROCESSING LIQUID SUPPLYING APPARATUS A processing liquid supplying apparatus includes: a reservoir containing an additive to be added to a liquid flowing through a passage connected at its one end to a liquid supply source and connected at its other end to a processing apparatus; an injection pump adapted to inject the additive in the reservoir into the passage; a weight measuring unit adapted to measure the weight of the reservoir and convert the weight into an electrical signal at a predetermined interval during when the liquid flows in the passage and the additive is injected; a deciding unit adapted to receive the electrical signal from the weight measuring unit and decide whether or not the measured value of the weight of the reservoir is being reduced in a predetermined rate; and a warning unit adapted to issue a warning that injection is improper when it is decided by the deciding unit that the measured value of the weight is not being reduced at the predetermined rate. (Figure 1)
SG10201801169SA 2017-02-23 2018-02-12 Processing liquid supplying apparatus SG10201801169SA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017031800A JP7015638B2 (en) 2017-02-23 2017-02-23 Machining liquid supply device

Publications (1)

Publication Number Publication Date
SG10201801169SA true SG10201801169SA (en) 2018-09-27

Family

ID=63046149

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201801169SA SG10201801169SA (en) 2017-02-23 2018-02-12 Processing liquid supplying apparatus

Country Status (8)

Country Link
US (1) US10751903B2 (en)
JP (1) JP7015638B2 (en)
KR (1) KR102342128B1 (en)
CN (1) CN108511367B (en)
DE (1) DE102018202621A1 (en)
MY (1) MY189804A (en)
SG (1) SG10201801169SA (en)
TW (1) TWI735745B (en)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4411649A (en) * 1979-07-12 1983-10-25 Baxter Travenol Laboratories, Inc. Fluid flow control system
US4778450A (en) * 1979-07-12 1988-10-18 Baxter Travenol Laboratories, Inc. Fluid flow control system
US4600401A (en) * 1981-04-15 1986-07-15 Baxter Travenol Laboratories Fluid flow control system
JP2595985B2 (en) * 1987-08-28 1997-04-02 株式会社島津製作所 Flow control device for chemical liquid injection
JPH0386251A (en) * 1989-08-28 1991-04-11 Todoroki Sangyo Kk Chemical reaction controller
KR960001415A (en) * 1994-06-20 1996-01-25 김태구 Variable Silencer for Intake Manifold of Automobile
KR100454120B1 (en) 2001-11-12 2004-10-26 삼성전자주식회사 Device of supplying chemical for slurry mechanical polishing apparatus and method thereof
US7770448B2 (en) * 2005-09-16 2010-08-10 Air Liquide Electronics U.S. LP. Chemical storage device with integrated load cell
JP4908097B2 (en) 2006-07-28 2012-04-04 株式会社ディスコ Cutting equipment
JP2014527881A (en) * 2011-09-21 2014-10-23 ベイヤー メディカル ケア インク． Continuous multi-fluid pump device, drive and actuation system and method
JP6039512B2 (en) 2013-07-18 2016-12-07 Ｔｏｗａ株式会社 Cutting apparatus and method for manufacturing electronic parts
JP6208498B2 (en) 2013-08-29 2017-10-04 株式会社ディスコ Polishing pad and wafer processing method
JP2016165771A (en) 2015-03-10 2016-09-15 株式会社ディスコ Processing liquid circulation type processing system

Also Published As

Publication number Publication date
KR20180097452A (en) 2018-08-31
MY189804A (en) 2022-03-08
DE102018202621A1 (en) 2018-08-23
TWI735745B (en) 2021-08-11
JP2018134714A (en) 2018-08-30
TW201832282A (en) 2018-09-01
KR102342128B1 (en) 2021-12-21
CN108511367A (en) 2018-09-07
JP7015638B2 (en) 2022-02-03
US10751903B2 (en) 2020-08-25
CN108511367B (en) 2024-05-14
US20180236684A1 (en) 2018-08-23

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