SG10201800586RA - Motor attachment bracket, motor attachment structure, and substrate processing apparatus - Google Patents

Motor attachment bracket, motor attachment structure, and substrate processing apparatus

Info

Publication number
SG10201800586RA
SG10201800586RA SG10201800586RA SG10201800586RA SG10201800586RA SG 10201800586R A SG10201800586R A SG 10201800586RA SG 10201800586R A SG10201800586R A SG 10201800586RA SG 10201800586R A SG10201800586R A SG 10201800586RA SG 10201800586R A SG10201800586R A SG 10201800586RA
Authority
SG
Singapore
Prior art keywords
motor attachment
motor
processing apparatus
substrate processing
output shaft
Prior art date
Application number
SG10201800586RA
Inventor
Tanaka Hideaki
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10201800586RA publication Critical patent/SG10201800586RA/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/20—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium
    • H02K5/203—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium specially adapted for liquids, e.g. cooling jackets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/20—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367—Cooling facilitated by shape of device
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2205/00—Specific aspects not provided for in the other groups of this subclass relating to casings, enclosures, supports
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2209/00—Specific aspects not provided for in the other groups of this subclass relating to systems for cooling or ventilating

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Motor Or Generator Frames (AREA)
  • Motor Or Generator Cooling System (AREA)

Abstract

MOTOR ATTACHMENT BRACKET, MOTOR ATTACHMENT STRUCTURE, AND SUBSTRATE PROCESSING APPARATUS Various examples, relating to motor attachment, a motor attachment structure, substrate processing apparatus are disclosed. The present disclosure exemplifies a motor attachment bracket including a plate-shaped motor mounting portion which an output shaft insertion hole through which an output shaft of a motor is inserted penetrates, and to which the motor the output shaft of which is inserted through the output shaft insertion hole is fixed. A fluid path in which a cooling fluid is circulated is formed in a metal member formed with the motor mounting portion, a motor attachment structure using the motor attachment bracket, and a substrate processing apparatus. Figure 1
SG10201800586RA 2017-01-30 2018-01-23 Motor attachment bracket, motor attachment structure, and substrate processing apparatus SG10201800586RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017014291A JP6916623B2 (en) 2017-01-30 2017-01-30 Motor mounting bracket, motor mounting structure, board processing device

Publications (1)

Publication Number Publication Date
SG10201800586RA true SG10201800586RA (en) 2018-08-30

Family

ID=62980719

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201800586RA SG10201800586RA (en) 2017-01-30 2018-01-23 Motor attachment bracket, motor attachment structure, and substrate processing apparatus

Country Status (3)

Country Link
US (1) US10680496B2 (en)
JP (1) JP6916623B2 (en)
SG (1) SG10201800586RA (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6916623B2 (en) * 2017-01-30 2021-08-11 株式会社荏原製作所 Motor mounting bracket, motor mounting structure, board processing device

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62149243U (en) * 1986-03-12 1987-09-21
JPH08243511A (en) 1995-03-10 1996-09-24 Dainippon Screen Mfg Co Ltd Substrate washer
JPH1028349A (en) * 1996-07-08 1998-01-27 Mitsuba Corp Waterproof structure in electric motor
FR2757327B1 (en) * 1996-12-16 1999-01-22 Valeo Equip Electr Moteur MOTOR VEHICLE ALTERNATOR WITH WATER COOLED REAR BEARING
JP3314032B2 (en) * 1998-04-28 2002-08-12 東京エレクトロン株式会社 Processing equipment
JP3728406B2 (en) 2000-06-15 2005-12-21 シャープ株式会社 Substrate cleaning device
JP3448844B2 (en) 2000-08-25 2003-09-22 株式会社石井表記 Substrate cleaning device
US6992409B2 (en) * 2002-03-15 2006-01-31 Denso Corporation Liquid-cooled rotary electric machine integrated with an inverter
US7462963B2 (en) * 2004-11-30 2008-12-09 Nissan Motor Co., Ltd. Motor cooling device and cooling method
JP4656998B2 (en) * 2005-04-22 2011-03-23 トヨタ自動車株式会社 In-wheel motor cooling structure
JP2007297462A (en) * 2006-04-28 2007-11-15 Fukoku Co Ltd Heat-conductive vibration absorption material and motor securing mount
JP4678385B2 (en) * 2007-06-13 2011-04-27 トヨタ自動車株式会社 DRIVE DEVICE AND VEHICLE HAVING DRIVE DEVICE
US8080909B2 (en) * 2009-05-19 2011-12-20 Ford Global Technologies, Llc Cooling system and method for an electric motor
JP5429216B2 (en) * 2011-03-16 2014-02-26 株式会社安川電機 Rotating electrical machine air duct and rotating electrical machine unit
US9331553B2 (en) * 2011-09-19 2016-05-03 Georgia Tech Research Corporation Systems and methods for direct winding cooling of electric machines
KR101863481B1 (en) * 2014-03-27 2018-05-31 프리펠 테크놀로지스, 엘엘씨 Induction motor with transverse liquid cooled rotor and stator
JP6916623B2 (en) * 2017-01-30 2021-08-11 株式会社荏原製作所 Motor mounting bracket, motor mounting structure, board processing device

Also Published As

Publication number Publication date
JP6916623B2 (en) 2021-08-11
US20180219456A1 (en) 2018-08-02
JP2018125914A (en) 2018-08-09
US10680496B2 (en) 2020-06-09

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