SG10201710711YA - Vertical Chromatic Confocal Scanning Method and System - Google Patents

Vertical Chromatic Confocal Scanning Method and System

Info

Publication number
SG10201710711YA
SG10201710711YA SG10201710711YA SG10201710711YA SG10201710711YA SG 10201710711Y A SG10201710711Y A SG 10201710711YA SG 10201710711Y A SG10201710711Y A SG 10201710711YA SG 10201710711Y A SG10201710711Y A SG 10201710711YA SG 10201710711Y A SG10201710711Y A SG 10201710711YA
Authority
SG
Singapore
Prior art keywords
spectral
confocal
scanning method
confocal scanning
chromatic confocal
Prior art date
Application number
SG10201710711YA
Inventor
Jiangwen Deng
Wui Fung Sze
Lei Song
Original Assignee
Asm Tech Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asm Tech Singapore Pte Ltd filed Critical Asm Tech Singapore Pte Ltd
Publication of SG10201710711YA publication Critical patent/SG10201710711YA/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/10—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming different wavelengths into image signals
    • H04N25/11—Arrangement of colour filter arrays [CFA]; Filter mosaics
    • H04N25/13—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements
    • H04N25/134—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements based on three different wavelength filter elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

VERTICAL CHROMATIC CONFOCAL SCANNING METHOD AND SYSTEM 5 A method of scanning a surface of an object using a confocal imaging system comprises the steps of obtaining first, second and third confocal images of the surface of the object when the object is illuminated respectively by light rays having first, second and third spectral waveforms, and using a camera to capture responsive signals from the object illuminated by the first, second and 10 third spectral waveforms. The first, second and third spectral waveforms are distinguishable from one another and each spectral waveform has overlapping portions relative to another spectral waveform. Thereafter, heights of a plurality of points on the surface of the object corresponding to the plurality of points on each confocal image are determined based on said 15 captured responsive signals. (FIG. 2)
SG10201710711YA 2016-12-29 2017-12-21 Vertical Chromatic Confocal Scanning Method and System SG10201710711YA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15/394,358 US10197781B2 (en) 2016-12-29 2016-12-29 Vertical chromatic confocal scanning method and system

Publications (1)

Publication Number Publication Date
SG10201710711YA true SG10201710711YA (en) 2018-07-30

Family

ID=62712270

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201710711YA SG10201710711YA (en) 2016-12-29 2017-12-21 Vertical Chromatic Confocal Scanning Method and System

Country Status (3)

Country Link
US (1) US10197781B2 (en)
CN (1) CN108253905B (en)
SG (1) SG10201710711YA (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101899711B1 (en) * 2017-02-07 2018-09-17 한국광기술원 Confocal Image Display Apparatus using Chromatic Aberration Lens
US11467270B2 (en) * 2019-03-27 2022-10-11 Asmpt Singapore Pte. Ltd. Apparatus and method for calibrating or testing an imaging device
WO2023034780A1 (en) * 2021-08-30 2023-03-09 Nanostring Technologies, Inc. Methods, systems and apparatus for a multi-spectral structured illumination microscope
CN117213367B (en) * 2023-09-18 2024-03-19 合肥埃科光电科技股份有限公司 Line spectrum confocal high-precision calibration method, system, equipment and storage medium

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3747471B2 (en) * 2002-03-07 2006-02-22 株式会社高岳製作所 Polarization direction detection type two-dimensional light reception timing detection device and surface shape measurement device using the same
DE102007019267A1 (en) * 2007-04-24 2008-10-30 Degudent Gmbh Measuring arrangement and method for three-dimensional measuring of an object
TWI490444B (en) 2009-01-23 2015-07-01 Univ Nat Taipei Technology Slit-scan microscopic system and method using the same
CN102749027B (en) * 2011-04-18 2015-08-12 陈亮嘉 Linear color confocal microscope system
TWI434022B (en) 2011-11-29 2014-04-11 Univ Nat Taipei Technology Chromatic confocal microscope system and signal process method of the same
CN103162617B (en) * 2011-12-09 2015-08-26 陈亮嘉 Color confocal microscope system and signal processing method thereof
DE102012009836A1 (en) * 2012-05-16 2013-11-21 Carl Zeiss Microscopy Gmbh Light microscope and method for image acquisition with a light microscope
KR102048793B1 (en) * 2013-02-12 2019-11-26 지고 코포레이션 Surface topography interferometer with surface color

Also Published As

Publication number Publication date
US20180188515A1 (en) 2018-07-05
CN108253905B (en) 2020-07-28
CN108253905A (en) 2018-07-06
US10197781B2 (en) 2019-02-05

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