SG10201706823QA - Force feedback electrodes in mems accelerometer - Google Patents

Force feedback electrodes in mems accelerometer

Info

Publication number
SG10201706823QA
SG10201706823QA SG10201706823QA SG10201706823QA SG10201706823QA SG 10201706823Q A SG10201706823Q A SG 10201706823QA SG 10201706823Q A SG10201706823Q A SG 10201706823QA SG 10201706823Q A SG10201706823Q A SG 10201706823QA SG 10201706823Q A SG10201706823Q A SG 10201706823QA
Authority
SG
Singapore
Prior art keywords
force feedback
mems accelerometer
feedback electrodes
electrodes
mems
Prior art date
Application number
SG10201706823QA
Inventor
Ender Ocak Ilker
Chengliang Sun
Ming-Lin Tsai Julius
Nirodha Fernando Sanchitha
Original Assignee
Pgs Geophysical As
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pgs Geophysical As, Agency Science Tech & Res filed Critical Pgs Geophysical As
Publication of SG10201706823QA publication Critical patent/SG10201706823QA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/02—Generating seismic energy
    • G01V1/04—Details
    • G01V1/09—Transporting arrangements, e.g. on vehicles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/38—Seismology; Seismic or acoustic prospecting or detecting specially adapted for water-covered areas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0837—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations

Landscapes

  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Geology (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Geophysics (AREA)
  • Oceanography (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
SG10201706823QA 2013-03-14 2014-03-12 Force feedback electrodes in mems accelerometer SG10201706823QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361786259P 2013-03-14 2013-03-14
US14/190,721 US20140260618A1 (en) 2013-03-14 2014-02-26 Force feedback electrodes in mems accelerometer

Publications (1)

Publication Number Publication Date
SG10201706823QA true SG10201706823QA (en) 2017-10-30

Family

ID=50241205

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201400598UA SG10201400598UA (en) 2013-03-14 2014-03-12 Force feedback electrodes in mems accelerometer
SG10201706823QA SG10201706823QA (en) 2013-03-14 2014-03-12 Force feedback electrodes in mems accelerometer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10201400598UA SG10201400598UA (en) 2013-03-14 2014-03-12 Force feedback electrodes in mems accelerometer

Country Status (4)

Country Link
US (2) US20140260618A1 (en)
EP (1) EP2778692B1 (en)
CA (1) CA2844685A1 (en)
SG (2) SG10201400598UA (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9321630B2 (en) * 2013-02-20 2016-04-26 Pgs Geophysical As Sensor with vacuum-sealed cavity
US20140260617A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Fully differential capacitive architecture for mems accelerometer
US20140260618A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Force feedback electrodes in mems accelerometer
WO2015104210A1 (en) * 2013-12-30 2015-07-16 Pgs Geophysical As Control system for marine vibrators to reduce friction effects
US10330696B2 (en) * 2016-03-24 2019-06-25 Northrop Grumman Systems Corporation Accelerometer sensor system
US10816568B2 (en) 2017-12-26 2020-10-27 Physical Logic Ltd. Closed loop accelerometer
CN109324212A (en) * 2018-07-10 2019-02-12 深圳市眼景科技有限公司 Mems accelerometer with force feedback electrode
CN108761128B (en) * 2018-09-05 2024-04-02 中国工程物理研究院电子工程研究所 Piezoelectric vibration excitation self-diagnosis MEMS accelerometer core and accelerometer
CN110501521B (en) * 2019-08-12 2020-12-11 武汉大学 Piezoelectric accelerometer
CN111913006A (en) * 2020-07-15 2020-11-10 北京自动化控制设备研究所 Quartz vibrating beam accelerometer driving circuit
CN114314239A (en) * 2022-03-07 2022-04-12 山东梯配网络科技有限公司 Elevator trapping automatic alarm system based on Internet of things

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2443471A (en) 1945-03-29 1948-06-15 Bell Telephone Labor Inc Piezoelectric damping means for mechanical vibrations
US4104920A (en) * 1977-04-01 1978-08-08 The Singer Company Piezoelectric damping mechanism
US4175723A (en) 1978-04-03 1979-11-27 Great Lakes Carbon Corporation Method and apparatus for neutralizing the effect of accelerating and decelerating forces
US4565940A (en) * 1984-08-14 1986-01-21 Massachusetts Institute Of Technology Method and apparatus using a piezoelectric film for active control of vibrations
US4849668A (en) * 1987-05-19 1989-07-18 Massachusetts Institute Of Technology Embedded piezoelectric structure and control
JPH0672899B2 (en) * 1988-04-01 1994-09-14 株式会社日立製作所 Acceleration sensor
US4932261A (en) 1988-06-20 1990-06-12 Triton Technologies, Inc. Micro-machined accelerometer with tilt compensation
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
FR2689627B1 (en) * 1992-04-07 1997-06-20 Sextant Avionique IMPROVEMENT WITH PENDULAR MICRO-SENSORS.
US5396798A (en) * 1993-04-15 1995-03-14 Honeywell Inc. Mechanical resonance, silicon accelerometer
DE59304431D1 (en) * 1993-05-05 1996-12-12 Litef Gmbh Micromechanical acceleration measuring device and method for its production
US5565625A (en) 1994-12-01 1996-10-15 Analog Devices, Inc. Sensor with separate actuator and sense fingers
JPH09196682A (en) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd Angular velocity sensor and acceleration sensor
US5894090A (en) * 1996-05-31 1999-04-13 California Institute Of Technology Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same
US6040625A (en) 1997-09-25 2000-03-21 I/O Sensors, Inc. Sensor package arrangement
US6196067B1 (en) * 1998-05-05 2001-03-06 California Institute Of Technology Silicon micromachined accelerometer/seismometer and method of making the same
US6584845B1 (en) * 1999-02-10 2003-07-01 California Institute Of Technology Inertial sensor and method of use
AU2001270026A1 (en) * 2000-06-21 2002-01-02 Input/Output, Inc. Accelerometer with folded beams
US6504385B2 (en) * 2001-05-31 2003-01-07 Hewlett-Pakcard Company Three-axis motion sensor
KR100382766B1 (en) 2001-07-02 2003-05-09 삼성전자주식회사 Apparatus and method for measuring change of capacitance
US20040073373A1 (en) 2002-10-10 2004-04-15 Wilson Colin A. Inertial augmentation of seismic streamer positioning
US6981416B2 (en) 2003-11-21 2006-01-03 Chung-Shan Institute Of Science And Technology Multi-axis solid state accelerometer
DE10357870B4 (en) * 2003-12-11 2013-02-07 Robert Bosch Gmbh Sensor with symmetrical limitation of a signal
MXPA06008524A (en) 2004-01-29 2007-04-02 Westerngeco Seismic Holdings Seismic cable positioning using coupled inertial system units.
US7069784B1 (en) 2004-12-29 2006-07-04 Honeywell International Inc. Pendulous in-plane MEMS accelerometer device
US7392685B2 (en) 2005-07-26 2008-07-01 Honeywell International Inc. Accelerometer having adjustable damping
US7258011B2 (en) * 2005-11-21 2007-08-21 Invensense Inc. Multiple axis accelerometer
US7610809B2 (en) * 2007-01-18 2009-11-03 Freescale Semiconductor, Inc. Differential capacitive sensor and method of making same
US7484411B2 (en) * 2007-01-30 2009-02-03 Hewlett-Packard Development Company, L.P. Three phase capacitance-based sensing and actuation
US8192398B2 (en) 2008-03-13 2012-06-05 Medtronic, Inc. Medical device and medical instrument alignment
DE102008016004A1 (en) * 2008-03-27 2009-10-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Microelectromechanical inertial sensor with atmospheric damping
US7971483B2 (en) * 2008-03-28 2011-07-05 Honeywell International Inc. Systems and methods for acceleration and rotational determination from an out-of-plane MEMS device
US9213119B2 (en) * 2008-10-29 2015-12-15 Conocophillips Company Marine seismic acquisition
SG173732A1 (en) 2009-02-17 2011-09-29 Agency Science Tech & Res Miniaturized piezoelectric accelerometers
US7974152B2 (en) 2009-06-23 2011-07-05 Pgs Geophysical As Control system for marine vibrators and seismic acquisition system using such control system
US8528405B2 (en) 2009-12-04 2013-09-10 The Charles Stark Draper Laboratory, Inc. Flexure assemblies and methods for manufacturing and using the same
US8427901B2 (en) 2009-12-21 2013-04-23 Pgs Geophysical As Combined impulsive and non-impulsive seismic sources
US9297923B2 (en) 2010-03-01 2016-03-29 Westerngeco L.L.C. Gravity measurements using seismic streamers
US20120002504A1 (en) 2010-03-01 2012-01-05 Everhard Muyzert Gravity measurements in marine, land and/or seabed seismic applications
US8446798B2 (en) 2010-06-29 2013-05-21 Pgs Geophysical As Marine acoustic vibrator having enhanced low-frequency amplitude
SG179386A1 (en) 2010-09-22 2012-04-27 Agency Science Tech & Res A transducer
US8534276B2 (en) 2010-10-18 2013-09-17 John L Palumbo Tea kettle
US8634276B2 (en) 2011-03-21 2014-01-21 Teledyne Instruments, Inc. Tunable bubble sound source
US8331198B2 (en) 2011-03-21 2012-12-11 Teledyne Instruments, Inc. Gas-filled bubble sound source
US8441892B2 (en) 2011-03-21 2013-05-14 Teledyne Instruments, Inc. Gas-filled bubble seismo-acoustic source
US10139505B2 (en) 2011-08-09 2018-11-27 Pgs Geophysical As Digital sensor streamers and applications thereof
US20130044565A1 (en) 2011-08-15 2013-02-21 Frederick James Barr Piezoelectric sensors for geophysical streamers
US9046547B2 (en) * 2012-08-13 2015-06-02 Pgs Geophysical As Accelerometer having multiple feedback systems operating on a given proof mass
US20140260618A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Force feedback electrodes in mems accelerometer
US20140260617A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Fully differential capacitive architecture for mems accelerometer

Also Published As

Publication number Publication date
US20140260618A1 (en) 2014-09-18
SG10201400598UA (en) 2014-10-30
EP2778692B1 (en) 2015-11-18
CA2844685A1 (en) 2014-09-14
US9945968B2 (en) 2018-04-17
US20160202366A1 (en) 2016-07-14
EP2778692A1 (en) 2014-09-17

Similar Documents

Publication Publication Date Title
HRP20171168T4 (en) P2x7 modulators
SG10201706823QA (en) Force feedback electrodes in mems accelerometer
HK1254111A1 (en) P2x7 modulators
HK1187014A1 (en) Force feedback triggers
GB201307773D0 (en) MEMS sensors
EP3067679A4 (en) Force sensor
HK1222348A1 (en) Constant force syringe
HK1218652A1 (en) P2x7 modulators p2x7
EP2989433A4 (en) Capacitive mems sensor devices
SG10201404634WA (en) Piezoelectric accelerometer
EP3003966A4 (en) Methods for stiction reduction in mems sensors
EP2890427A4 (en) Electrochemically-actuated microfluidic devices
EP2984853A4 (en) Differential outputs in multiple motor mems devices
HK1218651A1 (en) P2x7 modulators p2x7
EP2939281A4 (en) Piezoelectric devices
EP2959571A4 (en) Bidirectional mems driving arrangement
GB201317859D0 (en) Accelerometer control
GB201322918D0 (en) Accelerometers
EP2923945A4 (en) Ornithopter
HK1203628A1 (en) Improvements in accelerometers
EP2923944A4 (en) Ornithopter
EP2824422A4 (en) Inertial force sensor
GB2511337B (en) A Force Feedback Device
GB201315250D0 (en) Electro touch safety device
AU2013901222A0 (en) Gravity dependent movement element