SG10201705881WA - Determining apparatus for determining object stored in cassette - Google Patents
Determining apparatus for determining object stored in cassetteInfo
- Publication number
- SG10201705881WA SG10201705881WA SG10201705881WA SG10201705881WA SG10201705881WA SG 10201705881W A SG10201705881W A SG 10201705881WA SG 10201705881W A SG10201705881W A SG 10201705881WA SG 10201705881W A SG10201705881W A SG 10201705881WA SG 10201705881W A SG10201705881W A SG 10201705881WA
- Authority
- SG
- Singapore
- Prior art keywords
- determining
- cassette
- object stored
- determining apparatus
- determining object
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V8/00—Prospecting or detecting by optical means
- G01V8/10—Detecting, e.g. by using light barriers
- G01V8/20—Detecting, e.g. by using light barriers using multiple transmitters or receivers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V8/00—Prospecting or detecting by optical means
- G01V8/10—Detecting, e.g. by using light barriers
- G01V8/12—Detecting, e.g. by using light barriers using one transmitter and one receiver
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geophysics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016158408A JP6689539B2 (en) | 2016-08-12 | 2016-08-12 | Judgment device |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201705881WA true SG10201705881WA (en) | 2018-03-28 |
Family
ID=61018558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201705881WA SG10201705881WA (en) | 2016-08-12 | 2017-07-18 | Determining apparatus for determining object stored in cassette |
Country Status (8)
Country | Link |
---|---|
US (1) | US10094951B2 (en) |
JP (1) | JP6689539B2 (en) |
KR (1) | KR102190336B1 (en) |
CN (1) | CN107731708B (en) |
DE (1) | DE102017213963B4 (en) |
MY (1) | MY183731A (en) |
SG (1) | SG10201705881WA (en) |
TW (1) | TWI724194B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7126809B2 (en) * | 2017-04-13 | 2022-08-29 | 浜松ホトニクス株式会社 | Image acquisition device and image acquisition method |
US10533852B1 (en) * | 2018-09-27 | 2020-01-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Leveling sensor, load port including the same, and method of leveling a load port |
JP7336877B2 (en) * | 2019-05-21 | 2023-09-01 | 東京エレクトロン株式会社 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
CN110797276B (en) * | 2019-11-22 | 2021-12-07 | 衡阳开拓光电科技有限公司 | Small-size board carries chip processing and connects feeder equipment |
JP2023076058A (en) | 2021-11-22 | 2023-06-01 | 株式会社ディスコ | Processing device |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2868645B2 (en) * | 1991-04-19 | 1999-03-10 | 東京エレクトロン株式会社 | Wafer transfer device, wafer inclination detecting method, and wafer detecting method |
KR100315007B1 (en) * | 1995-11-22 | 2002-02-28 | 이시다 아키라 | Substrate detection and transfer apparatus in cassette and method thereof |
JPH1167876A (en) * | 1997-08-14 | 1999-03-09 | Hitachi Tokyo Electron Co Ltd | Die recognition method and semiconductor manufacture device |
JP4253365B2 (en) * | 1997-10-17 | 2009-04-08 | オリンパス株式会社 | Wafer transfer device |
US6188323B1 (en) * | 1998-10-15 | 2001-02-13 | Asyst Technologies, Inc. | Wafer mapping system |
US6545752B1 (en) * | 2000-07-07 | 2003-04-08 | Daitron, Inc. | Method and apparatus for detecting defects along the edge of electronic media |
JP3565810B2 (en) * | 2001-09-25 | 2004-09-15 | 大日本スクリーン製造株式会社 | Apparatus for opening and closing lid of substrate storage container, substrate detection method and apparatus |
US7054713B2 (en) * | 2002-01-07 | 2006-05-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Calibration cassette pod for robot teaching and method of using |
JP4118592B2 (en) * | 2002-04-22 | 2008-07-16 | 富士通株式会社 | Load port and semiconductor manufacturing equipment |
JP4091378B2 (en) * | 2002-08-28 | 2008-05-28 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
JP2004207507A (en) * | 2002-12-25 | 2004-07-22 | Shinko Electric Co Ltd | Substrate detecting apparatus |
JP2004363085A (en) * | 2003-05-09 | 2004-12-24 | Ebara Corp | Inspection apparatus by charged particle beam and method for manufacturing device using inspection apparatus |
US7015492B2 (en) * | 2003-08-15 | 2006-03-21 | Asm International N.V. | Method and apparatus for mapping of wafers located inside a closed wafer cassette |
TWI367192B (en) * | 2003-11-13 | 2012-07-01 | Applied Materials Inc | Calibration of high speed loader to substrate transport system |
JP4176041B2 (en) * | 2004-04-14 | 2008-11-05 | オリンパス株式会社 | Classification apparatus and classification method |
JP4491446B2 (en) * | 2005-11-04 | 2010-06-30 | 株式会社オーク製作所 | Peripheral exposure apparatus and method |
JP4522360B2 (en) * | 2005-12-02 | 2010-08-11 | 日東電工株式会社 | Semiconductor wafer position determination method and apparatus using the same |
US7732332B2 (en) * | 2006-03-10 | 2010-06-08 | United Microelectronics Corp. | Chemical mechanical polishing method with inspection pre and post processing |
DE102007010225B4 (en) * | 2007-02-28 | 2018-08-23 | Vistec Semiconductor Systems Gmbh | Method for taking high-resolution images of defects on the top of the wafer edge |
JP5384270B2 (en) * | 2009-09-21 | 2014-01-08 | 東京エレクトロン株式会社 | loader |
JP2012146809A (en) * | 2011-01-12 | 2012-08-02 | Hitachi Kokusai Electric Inc | Substrate processing apparatus and substrate processing method |
JP5935676B2 (en) * | 2012-12-07 | 2016-06-15 | 東京エレクトロン株式会社 | Substrate processing apparatus, operation method of substrate apparatus, and storage medium |
JP6212292B2 (en) | 2013-06-11 | 2017-10-11 | リンテック株式会社 | Load port |
JP6227334B2 (en) * | 2013-09-04 | 2017-11-08 | ローツェ株式会社 | Load port for detecting multiple types of semiconductor wafers |
JP6248788B2 (en) * | 2014-04-28 | 2017-12-20 | シンフォニアテクノロジー株式会社 | Wafer mapping apparatus and load port having the same |
JP6415220B2 (en) * | 2014-09-29 | 2018-10-31 | 株式会社Screenホールディングス | Substrate processing apparatus and substrate processing method |
-
2016
- 2016-08-12 JP JP2016158408A patent/JP6689539B2/en active Active
-
2017
- 2017-06-28 TW TW106121542A patent/TWI724194B/en active
- 2017-07-17 MY MYPI2017702627A patent/MY183731A/en unknown
- 2017-07-18 SG SG10201705881WA patent/SG10201705881WA/en unknown
- 2017-07-28 CN CN201710630572.1A patent/CN107731708B/en active Active
- 2017-08-01 US US15/666,215 patent/US10094951B2/en active Active
- 2017-08-07 KR KR1020170099520A patent/KR102190336B1/en active IP Right Grant
- 2017-08-10 DE DE102017213963.3A patent/DE102017213963B4/en active Active
Also Published As
Publication number | Publication date |
---|---|
DE102017213963B4 (en) | 2022-05-05 |
CN107731708A (en) | 2018-02-23 |
KR102190336B1 (en) | 2020-12-11 |
MY183731A (en) | 2021-03-10 |
KR20180018362A (en) | 2018-02-21 |
TWI724194B (en) | 2021-04-11 |
US10094951B2 (en) | 2018-10-09 |
TW201816915A (en) | 2018-05-01 |
US20180045851A1 (en) | 2018-02-15 |
CN107731708B (en) | 2023-05-30 |
DE102017213963A1 (en) | 2018-02-15 |
JP6689539B2 (en) | 2020-04-28 |
JP2018026486A (en) | 2018-02-15 |
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