SG10201608174TA - Closure Element For A Vacuum Seal Having A Friction Stir Welding Connection - Google Patents

Closure Element For A Vacuum Seal Having A Friction Stir Welding Connection

Info

Publication number
SG10201608174TA
SG10201608174TA SG10201608174TA SG10201608174TA SG10201608174TA SG 10201608174T A SG10201608174T A SG 10201608174TA SG 10201608174T A SG10201608174T A SG 10201608174TA SG 10201608174T A SG10201608174T A SG 10201608174TA SG 10201608174T A SG10201608174T A SG 10201608174TA
Authority
SG
Singapore
Prior art keywords
closure element
friction stir
stir welding
vacuum seal
welding connection
Prior art date
Application number
SG10201608174TA
Inventor
Thomas Blecha
Rudolf Gfeller
Max Hossfeld
Original Assignee
Vat Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vat Holding Ag filed Critical Vat Holding Ag
Publication of SG10201608174TA publication Critical patent/SG10201608174TA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/12—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
    • B23K20/122—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding using a non-consumable tool, e.g. friction stir welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/12—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
    • B23K20/122—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding using a non-consumable tool, e.g. friction stir welding
    • B23K20/1265—Non-butt welded joints, e.g. overlap-joints, T-joints or spot welds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
  • Sealing Devices (AREA)
  • Valve Housings (AREA)
SG10201608174TA 2015-10-02 2016-09-30 Closure Element For A Vacuum Seal Having A Friction Stir Welding Connection SG10201608174TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15188085.3A EP3150322A1 (en) 2015-10-02 2015-10-02 Closure element for a vacuum sealing with a friction stir welding connection

Publications (1)

Publication Number Publication Date
SG10201608174TA true SG10201608174TA (en) 2017-05-30

Family

ID=54260642

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201608174TA SG10201608174TA (en) 2015-10-02 2016-09-30 Closure Element For A Vacuum Seal Having A Friction Stir Welding Connection

Country Status (7)

Country Link
US (1) US10876637B2 (en)
EP (1) EP3150322A1 (en)
JP (1) JP6875092B2 (en)
KR (1) KR102598563B1 (en)
CN (1) CN106838458B (en)
SG (1) SG10201608174TA (en)
TW (1) TWI701404B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230059635A (en) * 2021-10-26 2023-05-03 삼성전자주식회사 Valve structure and substrate processing apparatus including the same
DE102021129883A1 (en) * 2021-11-16 2023-05-17 Vat Holding Ag valve plate

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3717724A1 (en) 1987-05-26 1988-12-08 Schertler Siegfried VALVE VALVE WITH A VALVE CASE
DE3801998C1 (en) 1988-01-23 1989-05-18 Schertler, Siegfried, Haag, Ch
JP3143250B2 (en) 1993-02-16 2001-03-07 バット ホールディング アーゲー Actuator
DE19746241C2 (en) 1997-10-20 2000-05-31 Vat Holding Ag Haag Device for closing an opening
US6172320B1 (en) * 1998-09-30 2001-01-09 Ultra Clean Technology Systems And Services Inc. Welding method for forming chromium oxide passivated film at welded portion
US6089537A (en) 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6629682B2 (en) * 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
US6471181B2 (en) 2001-01-11 2002-10-29 Vat Holding Ag Suspension of a valve plate of a vacuum valve
US6416037B1 (en) 2001-01-11 2002-07-09 Vat Holding Ag Vacuum pipe
JP4321017B2 (en) * 2002-07-26 2009-08-26 トヨタ自動車株式会社 Friction stir welding method and rotating tool for friction stir welding
JP4314985B2 (en) * 2003-12-05 2009-08-19 マツダ株式会社 Spot welding method for metal parts
JP4372534B2 (en) * 2003-12-24 2009-11-25 川崎重工業株式会社 Joint strength estimation method, deformation state estimation method, and joint condition determination method
JP4148152B2 (en) 2004-02-16 2008-09-10 マツダ株式会社 Friction spot joint structure
CN1968783A (en) 2004-03-24 2007-05-23 Sii米加钻石公司 Solid state processing of materials through friction stir processing and friction stir mixing
US20100078224A1 (en) * 2004-05-21 2010-04-01 Smith International, Inc. Ball hole welding using the friction stir welding (fsw) process
JP4784602B2 (en) * 2005-03-04 2011-10-05 日本軽金属株式会社 Sputtering target, method for producing the same, and method for regenerating sputtering target using the method
US20070286923A1 (en) * 2006-06-08 2007-12-13 Husky Injection Molding Systems Ltd. Piston and valve stem assembly for a hot runner
CH699258B1 (en) 2006-07-11 2010-02-15 Vat Holding Ag Vacuum valve for use with closure plate for gas density closing of flow path, comprises valve housing with opening for flow path and curve closed valve seat surface surrounding opening
JP4986532B2 (en) * 2006-08-03 2012-07-25 住友軽金属工業株式会社 Friction stir welding method
JP5080169B2 (en) 2006-09-20 2012-11-21 バット ホールディング アーゲー Vacuum valve
WO2008056449A1 (en) * 2006-11-10 2008-05-15 Hino Motors, Ltd. Structure for joining members
JP5094141B2 (en) * 2006-11-10 2012-12-12 日野自動車株式会社 Member joint structure
DE102008061315B4 (en) * 2008-12-11 2012-11-15 Vat Holding Ag Suspension of a valve plate on a valve rod
EP2601004A2 (en) 2010-08-02 2013-06-12 Megastir Technologies LLC System for using high rotary speed for minimizing the load during friction stir welding
EP2913573A1 (en) * 2014-02-26 2015-09-02 VAT Holding AG Vacuum valve
JP6241344B2 (en) 2014-03-25 2017-12-06 日亜化学工業株式会社 Display system
CN204308404U (en) * 2014-12-17 2015-05-06 昆山斯格威电子科技有限公司 Robot agitating friction welder

Also Published As

Publication number Publication date
TW201723362A (en) 2017-07-01
TWI701404B (en) 2020-08-11
KR20170040110A (en) 2017-04-12
CN106838458B (en) 2020-12-08
KR102598563B1 (en) 2023-11-06
EP3150322A1 (en) 2017-04-05
JP6875092B2 (en) 2021-05-19
CN106838458A (en) 2017-06-13
US10876637B2 (en) 2020-12-29
JP2017106618A (en) 2017-06-15
US20170097097A1 (en) 2017-04-06

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