SG10201501132QA - Handling device, robot arm vibration sensor and methods of operation - Google Patents

Handling device, robot arm vibration sensor and methods of operation

Info

Publication number
SG10201501132QA
SG10201501132QA SG10201501132QA SG10201501132QA SG10201501132QA SG 10201501132Q A SG10201501132Q A SG 10201501132QA SG 10201501132Q A SG10201501132Q A SG 10201501132QA SG 10201501132Q A SG10201501132Q A SG 10201501132QA SG 10201501132Q A SG10201501132Q A SG 10201501132QA
Authority
SG
Singapore
Prior art keywords
methods
robot arm
handling device
vibration sensor
arm vibration
Prior art date
Application number
SG10201501132QA
Inventor
Min Zhuan Koh
Chong Wui Chyun Eugene
Original Assignee
Sigenic Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sigenic Pte Ltd filed Critical Sigenic Pte Ltd
Priority to SG10201501132QA priority Critical patent/SG10201501132QA/en
Priority to US14/974,844 priority patent/US20160184988A1/en
Publication of SG10201501132QA publication Critical patent/SG10201501132QA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1602—Programme controls characterised by the control system, structure, architecture
    • B25J9/161—Hardware, e.g. neural networks, fuzzy logic, interfaces, processor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1628—Programme controls characterised by the control loop
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H17/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1674—Programme controls characterised by safety, monitoring, diagnostic
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37432—Detected by accelerometer, piezo electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37434—Measuring vibration of machine or workpiece or tool
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40237—Bus for communication with sensors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/02—Arm motion controller
    • Y10S901/09—Closed loop, sensor feedback controls arm movement

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mathematical Physics (AREA)
  • Fuzzy Systems (AREA)
  • Evolutionary Computation (AREA)
  • Software Systems (AREA)
  • Artificial Intelligence (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
SG10201501132QA 2014-12-26 2015-02-13 Handling device, robot arm vibration sensor and methods of operation SG10201501132QA (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG10201501132QA SG10201501132QA (en) 2014-12-26 2015-02-13 Handling device, robot arm vibration sensor and methods of operation
US14/974,844 US20160184988A1 (en) 2014-12-26 2015-12-18 Vibration Sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG10201408730Q 2014-12-26
SG10201501132QA SG10201501132QA (en) 2014-12-26 2015-02-13 Handling device, robot arm vibration sensor and methods of operation

Publications (1)

Publication Number Publication Date
SG10201501132QA true SG10201501132QA (en) 2016-07-28

Family

ID=56163176

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201501132QA SG10201501132QA (en) 2014-12-26 2015-02-13 Handling device, robot arm vibration sensor and methods of operation

Country Status (2)

Country Link
US (1) US20160184988A1 (en)
SG (1) SG10201501132QA (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10695907B2 (en) * 2017-09-29 2020-06-30 Intel Corporation Methods and apparatus for monitoring robot health in manufacturing environments
US20210008736A1 (en) * 2018-03-29 2021-01-14 Nissan Motor Co., Ltd. Malfunction detection device and malfunction detection method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8686839B2 (en) * 2011-11-01 2014-04-01 Texas Instruments Incorporated Closed-loop haptic or other tactile feedback system for mobile devices, touch screen devices, and other devices

Also Published As

Publication number Publication date
US20160184988A1 (en) 2016-06-30

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